JPH0236209Y2 - - Google Patents
Info
- Publication number
- JPH0236209Y2 JPH0236209Y2 JP1984202099U JP20209984U JPH0236209Y2 JP H0236209 Y2 JPH0236209 Y2 JP H0236209Y2 JP 1984202099 U JP1984202099 U JP 1984202099U JP 20209984 U JP20209984 U JP 20209984U JP H0236209 Y2 JPH0236209 Y2 JP H0236209Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- mesh
- sample
- scintillator
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 230000005684 electric field Effects 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 3
- 238000000605 extraction Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984202099U JPH0236209Y2 (de) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984202099U JPH0236209Y2 (de) | 1984-12-28 | 1984-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61116063U JPS61116063U (de) | 1986-07-22 |
| JPH0236209Y2 true JPH0236209Y2 (de) | 1990-10-02 |
Family
ID=30764503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984202099U Expired JPH0236209Y2 (de) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0236209Y2 (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49123573A (de) * | 1973-03-30 | 1974-11-26 |
-
1984
- 1984-12-28 JP JP1984202099U patent/JPH0236209Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49123573A (de) * | 1973-03-30 | 1974-11-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61116063U (de) | 1986-07-22 |
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