Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP57143201ApriorityCriticalpatent/JPS5933867A/ja
Publication of JPS5933867ApublicationCriticalpatent/JPS5933867A/ja
Publication of JPH023553B2publicationCriticalpatent/JPH023553B2/ja
H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
H—ELECTRICITY
H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
H10D64/00—Electrodes of devices having potential barriers
H10D64/60—Electrodes characterised by their materials
H10D64/62—Electrodes ohmically coupled to a semiconductor