JPH0234915B2 - - Google Patents
Info
- Publication number
- JPH0234915B2 JPH0234915B2 JP60123614A JP12361485A JPH0234915B2 JP H0234915 B2 JPH0234915 B2 JP H0234915B2 JP 60123614 A JP60123614 A JP 60123614A JP 12361485 A JP12361485 A JP 12361485A JP H0234915 B2 JPH0234915 B2 JP H0234915B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- magnetic flux
- melt
- single crystal
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 41
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000004907 flux Effects 0.000 description 40
- 239000000155 melt Substances 0.000 description 22
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 15
- 238000010586 diagram Methods 0.000 description 8
- 239000002994 raw material Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000005206 flow analysis Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12361485A JPS61286294A (ja) | 1985-06-07 | 1985-06-07 | 単結晶引上装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12361485A JPS61286294A (ja) | 1985-06-07 | 1985-06-07 | 単結晶引上装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61286294A JPS61286294A (ja) | 1986-12-16 |
JPH0234915B2 true JPH0234915B2 (US08088918-20120103-C00476.png) | 1990-08-07 |
Family
ID=14864953
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12361485A Granted JPS61286294A (ja) | 1985-06-07 | 1985-06-07 | 単結晶引上装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61286294A (US08088918-20120103-C00476.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0471214U (US08088918-20120103-C00476.png) * | 1990-11-01 | 1992-06-24 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2556967B2 (ja) * | 1986-04-30 | 1996-11-27 | 東芝セラミツクス株式会社 | 単結晶の育成装置 |
JP2561072B2 (ja) * | 1986-04-30 | 1996-12-04 | 東芝セラミツクス株式会社 | 単結晶の育成方法及びその装置 |
JP2572070B2 (ja) * | 1987-07-20 | 1997-01-16 | 東芝セラミツクス株式会社 | 単結晶の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59203793A (ja) * | 1983-05-07 | 1984-11-17 | Agency Of Ind Science & Technol | 半絶縁性ガリウム砒素単結晶の製造方法 |
JPS6081086A (ja) * | 1983-10-07 | 1985-05-09 | Shin Etsu Handotai Co Ltd | 単結晶の成長方法および装置 |
-
1985
- 1985-06-07 JP JP12361485A patent/JPS61286294A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59203793A (ja) * | 1983-05-07 | 1984-11-17 | Agency Of Ind Science & Technol | 半絶縁性ガリウム砒素単結晶の製造方法 |
JPS6081086A (ja) * | 1983-10-07 | 1985-05-09 | Shin Etsu Handotai Co Ltd | 単結晶の成長方法および装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0471214U (US08088918-20120103-C00476.png) * | 1990-11-01 | 1992-06-24 |
Also Published As
Publication number | Publication date |
---|---|
JPS61286294A (ja) | 1986-12-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |