JPH0233970B2 - - Google Patents

Info

Publication number
JPH0233970B2
JPH0233970B2 JP57168854A JP16885482A JPH0233970B2 JP H0233970 B2 JPH0233970 B2 JP H0233970B2 JP 57168854 A JP57168854 A JP 57168854A JP 16885482 A JP16885482 A JP 16885482A JP H0233970 B2 JPH0233970 B2 JP H0233970B2
Authority
JP
Japan
Prior art keywords
heating element
optical sensor
temperature
processing circuit
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57168854A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5958325A (ja
Inventor
Kazuyuki Tsurunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57168854A priority Critical patent/JPS5958325A/ja
Publication of JPS5958325A publication Critical patent/JPS5958325A/ja
Publication of JPH0233970B2 publication Critical patent/JPH0233970B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/602—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0818—Waveguides
    • G01J5/0821—Optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP57168854A 1982-09-28 1982-09-28 温度検出器 Granted JPS5958325A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57168854A JPS5958325A (ja) 1982-09-28 1982-09-28 温度検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57168854A JPS5958325A (ja) 1982-09-28 1982-09-28 温度検出器

Publications (2)

Publication Number Publication Date
JPS5958325A JPS5958325A (ja) 1984-04-04
JPH0233970B2 true JPH0233970B2 (enExample) 1990-07-31

Family

ID=15875778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57168854A Granted JPS5958325A (ja) 1982-09-28 1982-09-28 温度検出器

Country Status (1)

Country Link
JP (1) JPS5958325A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002357481A (ja) * 2001-06-01 2002-12-13 Tokyo Electron Ltd 温度測定方法及び装置、熱処理装置及び熱処理方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0516511Y2 (enExample) * 1985-10-21 1993-04-30
US4988212A (en) * 1985-10-25 1991-01-29 Luxtron Corporation Fiberoptic sensing of temperature and/or other physical parameters

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002357481A (ja) * 2001-06-01 2002-12-13 Tokyo Electron Ltd 温度測定方法及び装置、熱処理装置及び熱処理方法

Also Published As

Publication number Publication date
JPS5958325A (ja) 1984-04-04

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