JPH0232746B2 - - Google Patents

Info

Publication number
JPH0232746B2
JPH0232746B2 JP57052551A JP5255182A JPH0232746B2 JP H0232746 B2 JPH0232746 B2 JP H0232746B2 JP 57052551 A JP57052551 A JP 57052551A JP 5255182 A JP5255182 A JP 5255182A JP H0232746 B2 JPH0232746 B2 JP H0232746B2
Authority
JP
Japan
Prior art keywords
magnetic field
signal
detector
magnetic
charged particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57052551A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58169856A (ja
Inventor
Etsuo Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57052551A priority Critical patent/JPS58169856A/ja
Publication of JPS58169856A publication Critical patent/JPS58169856A/ja
Publication of JPH0232746B2 publication Critical patent/JPH0232746B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP57052551A 1982-03-31 1982-03-31 荷電粒子線装置 Granted JPS58169856A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57052551A JPS58169856A (ja) 1982-03-31 1982-03-31 荷電粒子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57052551A JPS58169856A (ja) 1982-03-31 1982-03-31 荷電粒子線装置

Publications (2)

Publication Number Publication Date
JPS58169856A JPS58169856A (ja) 1983-10-06
JPH0232746B2 true JPH0232746B2 (en, 2012) 1990-07-23

Family

ID=12917933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57052551A Granted JPS58169856A (ja) 1982-03-31 1982-03-31 荷電粒子線装置

Country Status (1)

Country Link
JP (1) JPS58169856A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62237654A (ja) * 1986-04-09 1987-10-17 Jeol Ltd 集束イオンビ−ム装置
US6815674B1 (en) * 2003-06-03 2004-11-09 Monitor Instruments Company, Llc Mass spectrometer and related ionizer and methods

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4853664A (en, 2012) * 1971-11-08 1973-07-27
NL7415318A (nl) * 1974-11-25 1976-05-28 Philips Nv Wienfilter.

Also Published As

Publication number Publication date
JPS58169856A (ja) 1983-10-06

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