JPS4853664A - - Google Patents
Info
- Publication number
- JPS4853664A JPS4853664A JP46088231A JP8823171A JPS4853664A JP S4853664 A JPS4853664 A JP S4853664A JP 46088231 A JP46088231 A JP 46088231A JP 8823171 A JP8823171 A JP 8823171A JP S4853664 A JPS4853664 A JP S4853664A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46088231A JPS4853664A (en, 2012) | 1971-11-08 | 1971-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46088231A JPS4853664A (en, 2012) | 1971-11-08 | 1971-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4853664A true JPS4853664A (en, 2012) | 1973-07-27 |
Family
ID=13937078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46088231A Pending JPS4853664A (en, 2012) | 1971-11-08 | 1971-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4853664A (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56156662A (en) * | 1980-05-02 | 1981-12-03 | Hitachi Ltd | Device for ion implantation |
| JPS58169856A (ja) * | 1982-03-31 | 1983-10-06 | Jeol Ltd | 荷電粒子線装置 |
| JPS61116649A (ja) * | 1984-11-12 | 1986-06-04 | Science & Tech Agency | 電子線非破壊検査法 |
-
1971
- 1971-11-08 JP JP46088231A patent/JPS4853664A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56156662A (en) * | 1980-05-02 | 1981-12-03 | Hitachi Ltd | Device for ion implantation |
| JPS58169856A (ja) * | 1982-03-31 | 1983-10-06 | Jeol Ltd | 荷電粒子線装置 |
| JPS61116649A (ja) * | 1984-11-12 | 1986-06-04 | Science & Tech Agency | 電子線非破壊検査法 |