JPH023108Y2 - - Google Patents
Info
- Publication number
- JPH023108Y2 JPH023108Y2 JP14602486U JP14602486U JPH023108Y2 JP H023108 Y2 JPH023108 Y2 JP H023108Y2 JP 14602486 U JP14602486 U JP 14602486U JP 14602486 U JP14602486 U JP 14602486U JP H023108 Y2 JPH023108 Y2 JP H023108Y2
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- heat treatment
- heat
- fixed
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 39
- 230000007246 mechanism Effects 0.000 claims description 20
- 239000010453 quartz Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 6
- 229910010293 ceramic material Inorganic materials 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 230000001174 ascending effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 description 16
- 238000007789 sealing Methods 0.000 description 7
- 239000012535 impurity Substances 0.000 description 6
- 230000003014 reinforcing effect Effects 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Tunnel Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14602486U JPH023108Y2 (enrdf_load_stackoverflow) | 1986-09-24 | 1986-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14602486U JPH023108Y2 (enrdf_load_stackoverflow) | 1986-09-24 | 1986-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6352095U JPS6352095U (enrdf_load_stackoverflow) | 1988-04-08 |
| JPH023108Y2 true JPH023108Y2 (enrdf_load_stackoverflow) | 1990-01-24 |
Family
ID=31058103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14602486U Expired JPH023108Y2 (enrdf_load_stackoverflow) | 1986-09-24 | 1986-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH023108Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-09-24 JP JP14602486U patent/JPH023108Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6352095U (enrdf_load_stackoverflow) | 1988-04-08 |
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