JPH02304338A - Device for measuring electric resistance - Google Patents

Abstract

PURPOSE:To simplify the method for evaluating insulating materials by applying a force on a insulating material with a terminal having a sharp top end, and measuring the load when the electric resistance rapidly changes and evaluating the insulating property and reliability of insulation. CONSTITUTION:The insulating property of a insulation film 13 partly formed on a conductive film 12 on a substrate 11 is evaluated with using a spring scale 16 and a terminal 14 with sharp top end for measuring load and using a tester 15 for measuring resistance. The film is pressed with the terminal 14 having a sharp end in the direction A in figure. Insulating property of the film 13 and its reliability can be evaluated by measuring the load when the electric resistance rapidly changes. This device has a simple structure and enables easy evaluation of insulating materials and methods of formation, etc. Thus, variation in the insulating property of products in the production process thereof can be controlled with good accuracy.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for measuring the insulation properties and reliability of insulation properties of an insulating material formed on a conductive material.

[Conventional technology]

For example, if we take a liquid crystal display as an example, the fifth
As shown in the figure, an electrode 3.4, an insulating film 5, and an alignment film 6.7 are formed on two substrates 1 and 2, and the substrates 1 and 2 are bonded and fixed with a seal 9, and a liquid crystal 8 is sandwiched between them. It is crowded. The insulation I8!5 is to prevent the electrodes 3.4 from shorting if there is a conductive foreign object such as metal in the liquid crystal 8, and high electrical insulation and insulation reliability are required. .

Conventionally, as a test method for determining whether the insulating film 5 has sufficient insulation properties and insulation reliability, the inherent electrical insulation resistance of the material, adhesion to the base material, film strength, etc. are comprehensively examined. death,
In the end, it was common to produce a product and evaluate it.

[Problem to be solved by the invention]

However, according to the conventional method described above, it is necessary to produce a large number of products in order to determine whether or not they can be used as an insulating film, and there are also problems in that variations during the process cannot be controlled. .

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and its object is to provide an electrical resistance n1 constant device that can evaluate insulators in a simple manner and with high accuracy.

[Means for solving problems]

The electrical resistance measuring device of the present invention includes means for measuring load;
It is characterized by having a terminal with a sharp tip and means for measuring electrical resistance.

[For production]

The principle and configuration will be explained with reference to FIG. Figure 1 shows the substrate 1
1, a conductive film 12 is formed on the conductive film 12, an insulating film 13 is formed on a part of the conductive film 12, and the insulation of the insulating film 13 is measured. The configuration of the measuring device uses a spring balance 16 as a means for measuring the load, a terminal 14 having a sharp tip, and a tester as a means for measuring the electrical resistance δP1. Here, when a force is applied from the direction of arrow A, the relationship between the applied force and the electrical resistance is as shown in FIG. 2, where the electrical resistance changes rapidly at a certain load a. By measuring the load a at this time, it is possible to evaluate the electrical insulation properties and the reliability of the insulation properties of the insulating film.

〔Example〕

[Example 1] In FIG. 1, a conductive film 12 made of In, 0° was formed on a glass substrate 11, and an insulating film 13 of 5 in 2 was formed by 1000 people. As a terminal with a sharp tip, the curvature of the tip is r-10 μm to 1. When the load a shown in FIG. 2 was measured using a 0 μm bottle, as shown in FIG. 3, the curvature and the load a showed a clear correlation, and the reproducibility was good.

[Example 2] As a means for measuring electrical resistance, a tester that sounds a buzzer when the electrical resistance becomes 108 Ωcm or less was used.
The substrate used in Example 1 was examined in the same manner as in Example 1. The results were similar to Example 1.

[Example 3] A pin with a curvature of r-20 μm at the tip was used as a terminal with a sharp tip for insulation measurement, and a tester that sounded a buzzer when the electrical resistance became 108 Ωcm or less was used as a means to measure electrical resistance. . As the substrate to be measured, the same substrate used in Example 1 with a SiO2 film thickness of 300 to 1500 A was used.

The relationship between the film thickness and the load a at this time is shown in FIG.

As shown in FIG. 4, the film thickness and load a showed a clear correlation, and the reproducibility was good.

[Example 4] Using the apparatus used in Example 3, the first
In the figure, a conductive film 12 made of In2O was formed on a glass substrate 11, and as an insulating film 13, 1000 films each of Al2O* and polyimide were used. The results are 300g of Aff20 and 50g of polyimide.
Met.

In Examples 1 to 4, the All 20i film was superior to the polyimide film as an insulating film material, and the S 10
It was found that the film No. 2 was superior.

[Example 5] When the apparatus used in Example 3 was used to manage the manufacturing process of an actual liquid crystal display device, defects due to variations in the manufacturing process were drastically reduced.

[Example 6] In Example 4, the insulating film 13 was made of Sin by sputtering and SLO by thermal decomposition.

Example 4
A similar comparison was made and the load a was 700g for the sputtering method and 600g for the thermal decomposition method.
It was g.

In each of the embodiments described above, the means for measuring the load is arranged on the terminal side, but it is obvious that the same effect can be obtained even if the means is arranged on the side that supports the board.

Furthermore, the object to be measured is not limited to the one in which a conductive film or insulating film is formed on a glass substrate as in the example, but also the insulation (that is, strength) of a paint applied to a metal substrate.
, an interlayer insulating film in a semiconductor, or the like.

Further, the device for measuring load and the device for measuring electrical resistance may be linked, or the data may be managed by a computer or the like.

〔Effect of the invention〕

As described above, by using the electrical resistance measuring device of the present invention, it is possible to control the manufacturing process with high accuracy, and it has become possible to easily evaluate the material, forming method, etc. of the insulator. In addition, because the device has a simple configuration, special knowledge and
No skills are required and anyone can perform measurements.

[Brief explanation of drawings]

FIG. 1 is a diagram showing the principle and configuration of the present invention. FIG. 2 is a diagram showing the relationship between electrical resistance and load. FIG. 3 is a diagram showing the relationship between curvature and load in Example 1. FIG. 4 is a diagram showing the relationship between film thickness and load in Example 3. FIG. 5 is a schematic cross-sectional view of a liquid crystal display. 1... Board 2... Board 3...electrode 4...electrode 5...Insulating film 6...Alignment film 7...Alignment film 8...LCD 9・φ fist sticker 11... Board 12... Conductive film 13◆・・・Insulating film 14...terminal 15・War・Tester 16...just springs that's all Applicant: Seiko Epson Corporation Agent: Patent attorney Kisanbe Suzuki (and 1 other person) Figure 1 a″ Second cause Destination mnae jPTn Figure 3 Figure 4

Claims (1)

[Claims] An electrical resistance measuring device comprising a means for measuring load, a terminal having a sharp tip, and a means for measuring electrical resistance.