JPH0566189A - Method and device for measuring electrical characteristics - Google Patents

Method and device for measuring electrical characteristics

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Publication number
JPH0566189A
JPH0566189A JP22915991A JP22915991A JPH0566189A JP H0566189 A JPH0566189 A JP H0566189A JP 22915991 A JP22915991 A JP 22915991A JP 22915991 A JP22915991 A JP 22915991A JP H0566189 A JPH0566189 A JP H0566189A
Authority
JP
Japan
Prior art keywords
sample
voltage
piezoelectric element
resonance
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22915991A
Other languages
Japanese (ja)
Other versions
JP3087190B2 (en
Inventor
Fumiharu Iwasaki
文晴 岩崎
Hiroshi Muramatsu
宏 村松
Toshihiko Sakuhara
寿彦 作原
Kazuhiko Kimura
一彦 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
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Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP03229159A priority Critical patent/JP3087190B2/en
Publication of JPH0566189A publication Critical patent/JPH0566189A/en
Application granted granted Critical
Publication of JP3087190B2 publication Critical patent/JP3087190B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To enable the electrical characteristics of a compound whose state is changed at the application of voltage to be measured by using a piezoelectric element as a detector, and measuring the resonance frequency and the resonance resistivity of the element. CONSTITUTION:On a piezoelectric element serving as a detector a sample is fixed in such a manner that voltage can be applied thereto and a pulse generator 2 and an impedance measuring apparatus 3 are connected to the respective portions of the sample. The resonance frequency and the resonance resistivity at the application of voltage to the sample are measured by the pulse generator 2 and the impedance measuring apparatus 3 whereby the state change of the sample at the application of voltage can be measured as change in viscoelasticity. Therefore, the electrical characteristics of a compound whose state is changed with voltage can be measured using a piezoelectric element as a detector.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、化学、高分子化学、
及び電子工業分野における、電圧印加時に状態変化を生
じる化合物の、電気的な特性の試験・評価を行う方法及
び装置に関する。
BACKGROUND OF THE INVENTION The present invention relates to chemistry, polymer chemistry,
And to a method and apparatus for testing / evaluating the electrical characteristics of a compound that undergoes a state change when a voltage is applied, in the field of electronics.

【0002】[0002]

【従来の技術】従来、たとえば液晶性化合物などの電気
特性を評価する方法としては、図2に示すように液晶性
化合物を2つの電極間に挟んだサンドイッチ構造セルを
用いて測定されてきた。これは、2つの電極間に電圧を
印加した場合の液晶性化合物の配向状態を光学的に測定
する方法である。
2. Description of the Related Art Conventionally, as a method for evaluating the electrical characteristics of a liquid crystal compound, a sandwich structure cell in which a liquid crystal compound is sandwiched between two electrodes as shown in FIG. 2 has been used. This is a method of optically measuring the alignment state of a liquid crystal compound when a voltage is applied between two electrodes.

【0003】[0003]

【発明が解決しようとする課題】しかし、従来のサンド
イッチ形セルを用いた方法では、セルを構成するために
試料が多量に必要であった。また、光により被測定化合
物の電気特性を検出することから、セルの基板や電極は
透明でなければならず、さらに試料の持つ吸収波長等の
問題により、検出光の波長も試料により変えなければな
らないという課題があった。
However, in the conventional method using the sandwich type cell, a large amount of sample is required to construct the cell. In addition, since the electrical characteristics of the compound to be measured are detected by light, the substrate and electrodes of the cell must be transparent, and due to problems such as the absorption wavelength of the sample, the wavelength of the detection light must also be changed depending on the sample. There was a problem that it would not happen.

【0004】そこで、この発明の目的は、従来のこのよ
うな課題を解決するため、圧電素子を用いて試料の粘弾
性変化を検出することにより電気特性の計測ができる、
測定方法および装置を得ることである。
Therefore, the object of the present invention is to solve the above-mentioned conventional problems, and the electrical characteristics can be measured by detecting the viscoelastic change of a sample using a piezoelectric element.
To obtain a measuring method and device.

【0005】[0005]

【課題を解決するための手段】上記課題を解決するため
にこの発明は、例えば、ATカット水晶振動子を検出器
とし、水晶振動子の共振周波数変化、もしくは、インピ
ーダンス変化を連続的に計測することによって、ごく少
量の試料量で容易に電気特性計測を可能にするものであ
る。
In order to solve the above-mentioned problems, the present invention uses, for example, an AT-cut crystal oscillator as a detector, and continuously measures the resonance frequency change or impedance change of the crystal oscillator. This makes it possible to easily measure electrical characteristics with a very small amount of sample.

【0006】[0006]

【作用】上記のように構成された電気特性計測装置は、
検出器として圧電素子を用いているが、この圧電素子は
共振周波数付近の周波数の電圧を印加することにより機
械的な振動を起こす。この振動は極めて微小であるが、
物質が接した状態で物質と圧電素子表面との間のせん断
応力による抵抗を受ける。この機械的抵抗の抵抗係数
は、圧電素子の機械的な振動と電気的な振動とを対応づ
けて考えると電気的抵抗と同等であると考えることがで
きる。従って、共振周波数における共振抵抗は、圧電素
子表面の摩擦係数を反映した値と考えられ、この共振抵
抗を連続的に計測することによって、物質の粘弾性変化
を計測することができる。また、圧電素子のせん断応力
が圧電素子の弾性体として振動する力と釣りあうことか
ら、共振周波数の変化も、粘弾性変化と対応する。従っ
て、共振周波数変化を測定することによっても、試料の
粘弾性変化を追跡することができる。ここで圧電素子の
共振周波数は、試料の弾性、粘性、重量変化によって変
化し、共振抵抗は粘性変化のみによって変化することが
知られている。従って重量変化がない場合には、共振周
波数と共振抵抗値とを比較することにより、試料の粘性
的変化と弾性的変化を考察することができる。
The electrical characteristic measuring device configured as described above is
Although a piezoelectric element is used as a detector, this piezoelectric element causes mechanical vibration by applying a voltage having a frequency near the resonance frequency. This vibration is extremely small,
When the substances are in contact with each other, resistance due to shear stress between the substances and the surface of the piezoelectric element is applied. It can be considered that the resistance coefficient of the mechanical resistance is equivalent to the electric resistance when the mechanical vibration and the electric vibration of the piezoelectric element are considered in association with each other. Therefore, the resonance resistance at the resonance frequency is considered to be a value that reflects the friction coefficient of the surface of the piezoelectric element, and the viscoelastic change of the substance can be measured by continuously measuring this resonance resistance. Further, since the shear stress of the piezoelectric element balances with the force that vibrates as the elastic body of the piezoelectric element, the change in resonance frequency also corresponds to the change in viscoelasticity. Therefore, the viscoelastic change of the sample can be traced by measuring the change of the resonance frequency. Here, it is known that the resonance frequency of the piezoelectric element changes due to elasticity, viscosity, and weight change of the sample, and the resonance resistance changes only due to viscosity change. Therefore, when there is no weight change, the viscous change and elastic change of the sample can be considered by comparing the resonance frequency and the resonance resistance value.

【0007】一方、試料に電気的に配向変化が生じる場
合、その前後で粘弾性に変化が生じることが知られてお
り、よって、この2つの性質を応用することにより、試
料の電気特性を計測することが可能となった。圧電素子
としては、水晶振動子の他、SAWデバイスや圧電セラ
ミック発振子などが利用可能である。
On the other hand, it is known that when an electrical orientation change occurs in a sample, the viscoelasticity changes before and after the electrical change. Therefore, the electrical characteristics of the sample are measured by applying these two properties. It became possible to do. As the piezoelectric element, a SAW device, a piezoelectric ceramic oscillator, or the like can be used in addition to a crystal oscillator.

【0008】[0008]

【実施例】以下、この発明の実施例を図面に基づいて説
明する。図1は、本発明の電気特性計測装置の模式図を
示したものである。図1において、ATカット水晶振動
子セル1は、パルス発生器2および測定周波数が任意に
設定できるインピーダンス測定器3に接続されている。
パルス発生器2およびインピーダンス測定器3は、さら
に演算または制御を行なうためのコンピュータ4に接続
され、コンピュータ4にはプリンタ5が接続されてい
る。図3は図1の電気特性計測装置の模式図のうち、A
Tカット水晶振動子セル1部分の構造を示したものであ
る。ATカット水晶振動子11は、片面のみが試料と接
するような構造を持つプラスチック製のホルダー15に
シリコーン樹脂で封入されている。さらに、ATカット
水晶振動子11の試料面にはスペーサー16を介して試
料への電圧印加用電極14が置かれた構造になってい
る。そして、ATカット水晶振動子11と電圧印加用電
極14とスペーサー16に囲まれた空間に試料6が入
る。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a schematic diagram of an electric characteristic measuring apparatus of the present invention. In FIG. 1, an AT-cut crystal oscillator cell 1 is connected to a pulse generator 2 and an impedance measuring device 3 whose measurement frequency can be arbitrarily set.
The pulse generator 2 and the impedance measuring device 3 are connected to a computer 4 for further performing calculation or control, and a printer 5 is connected to the computer 4. 3 is a schematic diagram of the electrical characteristic measuring device of FIG.
1 shows a structure of a T-cut crystal oscillator cell 1 portion. The AT-cut crystal unit 11 is sealed with a silicone resin in a plastic holder 15 having a structure in which only one surface is in contact with the sample. Further, the AT-cut crystal oscillator 11 has a structure in which a voltage application electrode 14 to the sample is placed on the sample surface via a spacer 16. Then, the sample 6 enters the space surrounded by the AT-cut quartz crystal resonator 11, the voltage application electrode 14, and the spacer 16.

【0009】共用電極13は、電圧印加用電極14と組
み合わせて試料に電圧を印加し、同時に水晶振動子用電
極12と組み合わせて水晶振動子に電圧を印加するため
に用いられる。本発明の計測方法は、試料をATカット
水晶振動子11上に固定し、試料に電圧を印加するのと
同時にATカット水晶振動子11の共振周波数付近での
インピーダンスの測定を連続的に行ない、電圧に対する
ATカット水晶振動子11の共振周波数および共振抵抗
値の変化を得るものである。
The common electrode 13 is used in combination with the voltage application electrode 14 to apply a voltage to the sample and at the same time in combination with the crystal oscillator electrode 12 to apply a voltage to the crystal oscillator. In the measuring method of the present invention, the sample is fixed on the AT-cut crystal oscillator 11, and a voltage is applied to the sample, and at the same time, the impedance near the resonance frequency of the AT-cut crystal oscillator 11 is continuously measured. The resonance frequency and the resonance resistance value of the AT-cut crystal unit 11 with respect to the voltage are obtained.

【0010】試料をATカット水晶振動子セル1に固定
すると、ATカット水晶振動子11の共振周波数およ
び、共振抵抗値は、測定時の印加電圧での試料の粘弾性
を反映したものとなり、共振周波数及び、共振抵抗値
は、インピーダンス測定器3を用いて測定される。図4
は本実施例で用いたインピーダンス測定器のブロックダ
イアグラムである。信号発生部17でATカット水晶振
動子11の共振周波数付近の周波数を発生させ、信号分
配部18で信号発生部17で得られた信号を2つに分配
する。2つに分配された信号の内、一方はそのまま増幅
部A19,アッテネータ部A20,対数増幅部A21を
経て演算部26に入る。他方はATカット水晶振動子1
1を経た後、増幅部B22,アッテネータ部B23,対
数増幅部B24を経て演算部26に入る。また、アッテ
ネータ部B23から出てきた信号は、途中、ATカット
水晶振動子11を通過しているため、アッテネータ部A
20から出てきた信号との間には位相差がある。この位
相差は位相差検出部25で検出され、演算部26に入力
される。演算部26では入力された信号から、ATカッ
ト水晶振動子11のコンダクタンスおよびサセプタンス
を求め、表示部27に表示する。
When the sample is fixed to the AT-cut crystal oscillator cell 1, the resonance frequency and the resonance resistance value of the AT-cut crystal oscillator 11 reflect the viscoelasticity of the sample at the applied voltage at the time of measurement, resulting in resonance. The frequency and the resonance resistance value are measured using the impedance measuring device 3. Figure 4
3 is a block diagram of the impedance measuring device used in this example. The signal generation unit 17 generates a frequency near the resonance frequency of the AT-cut crystal unit 11, and the signal distribution unit 18 distributes the signal obtained by the signal generation unit 17 into two. One of the signals divided into two enters the arithmetic unit 26 as it is via the amplification unit A19, the attenuator unit A20, and the logarithmic amplification unit A21. The other is AT-cut crystal unit 1
After passing through 1, the calculation unit 26 is entered through the amplification unit B22, the attenuator unit B23, and the logarithmic amplification unit B24. Further, the signal output from the attenuator section B23 passes through the AT-cut crystal unit 11 on the way, so the attenuator section A
There is a phase difference with the signal coming out of 20. This phase difference is detected by the phase difference detection unit 25 and input to the calculation unit 26. The computing unit 26 obtains the conductance and susceptance of the AT-cut crystal unit 11 from the input signal and displays it on the display unit 27.

【0011】インピーダンス測定は、具体的には、アド
ミッタンスの虚数部であるサセプタンスの最大値と最小
値を与える周波数の間に共振周波数があることから、ま
ず最初にサセプタンスの最大値、最小値を周波数掃引し
て求め、このあいだの周波数について等間隔の周波数
で、コンダクタンスとサセプタンスの測定を行なった。
測定値は、コンダクタンス及びサセプタンスのデータを
円の最小自乗法によって処理し、円の直径を求めこの逆
数を共振抵抗の値とした。また、円の中心を求め、この
中心点のサセプタンスの値と同じサセプタンス値を示す
ような円上の周波数をサセプタンスと測定周波数の多項
式近似より求めこれを共振周波数とした。
In impedance measurement, specifically, since there is a resonance frequency between the frequency that gives the maximum value and the minimum value of the susceptance, which is the imaginary part of the admittance, first the maximum and minimum values of the susceptance are set to the frequency. The values were obtained by sweeping, and the conductance and susceptance were measured at evenly spaced frequencies.
For the measured values, conductance and susceptance data were processed by the method of least squares of a circle, and the diameter of the circle was obtained. Further, the center of the circle was obtained, and the frequency on the circle showing the same susceptance value as the value of the susceptance at this center point was obtained from the polynomial approximation of the susceptance and the measurement frequency, and this was used as the resonance frequency.

【0012】インピーダンス測定および共振抵抗値,共
振周波数を求めるための演算の処理は、コンピュータ4
によって自動的に行なわれ、その結果はディスプレイお
よびプリンタ5に表示、印刷される。また、本実施例で
は、ATカット水晶振動子を検出器としたが、GTカッ
ト水晶振動子や他の圧電材料、例えば、SAWデバイス
や圧電セラミック発振子を用いても同様の測定が可能で
あることが示されている。
The computer 4 performs the processing of the impedance measurement and the calculation for obtaining the resonance resistance value and the resonance frequency.
Automatically, and the result is displayed and printed on the display and the printer 5. Further, in the present embodiment, the AT-cut crystal unit was used as the detector, but the same measurement can be performed using a GT-cut crystal unit or another piezoelectric material such as a SAW device or a piezoelectric ceramic oscillator. Has been shown.

【0013】次に本計測方法及び装置を用いて、測定を
行なった結果について説明する。試料として一般に表示
素子などに用いられている、シアノビフェニル系の液晶
化合物(メルク社製:E44)を用いた。5V0.1H
zの電圧を印加したところ、電圧のON−OFFにより
共振周波数および共振抵抗値に変化がみられた。これに
よって、この発明の電気特性計測装置により、電圧によ
る化合物の配向状態変化を計測できることが確認され
た。
Next, the result of measurement using this measuring method and apparatus will be described. As a sample, a cyanobiphenyl-based liquid crystal compound (E44 manufactured by Merck & Co., Inc.), which is generally used for display devices and the like, was used. 5V 0.1H
When the voltage of z was applied, the resonance frequency and the resonance resistance value changed due to ON-OFF of the voltage. From this, it was confirmed that the electrical property measuring device of the present invention can measure the change in the orientation state of the compound due to the voltage.

【0014】なお、この発明は上記実施例だけではな
く、例えば電気泳動による有機化合物の分離過程の計測
等にも広く応用できる。
The present invention can be widely applied not only to the above embodiment but also to, for example, measurement of the separation process of organic compounds by electrophoresis.

【0015】[0015]

【発明の効果】この発明は、以上説明したように試料に
電圧を印加したときの圧電素子の共振周波数および共振
抵抗値変化から試料の状態変化を測定するという構成と
したので、測定試料が微量で済み、さらに従来の様な複
雑でたいへん手間のかかる測定系を組まずに電圧により
状態変化を示す化合物の電気特性を測定できる効果があ
る。
As described above, according to the present invention, the state change of the sample is measured from the change of the resonance frequency and the resonance resistance value of the piezoelectric element when the voltage is applied to the sample. In addition, there is an effect that the electrical characteristics of a compound that changes its state with voltage can be measured without constructing a complicated and labor-intensive measurement system like the conventional one.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の電気特性計測装置を示した説明図であ
る。
FIG. 1 is an explanatory view showing an electric characteristic measuring device of the present invention.

【図2】従来の電気特性計測用サンドイッチ構造セルの
説明図である。
FIG. 2 is an explanatory diagram of a conventional sandwich structure cell for measuring electrical characteristics.

【図3】本発明の実施例で用いたATカット水晶振動子
セルの構造を示す説明図である。
FIG. 3 is an explanatory diagram showing a structure of an AT-cut crystal oscillator cell used in an example of the present invention.

【図4】本発明の実施例で用いたインピーダンス測定器
のブロックダイアグラムである。
FIG. 4 is a block diagram of an impedance measuring device used in an example of the present invention.

【符号の説明】[Explanation of symbols]

1 ATカット水晶振動子セル 2 パルス発生器 3 インピーダンス測定器 4 コンピュータ 5 プリンタ 6 試料 7 ガラス基板 8 透明電極 9 偏光子 10 検出光 11 ATカット水晶振動子 12 水晶振動子用電極 13 共用電極 14 電圧印加用電極 15 ホルダー 16 スペーサー 17 信号発生部 18 信号分配部 19 増幅部A 20 アッテネータ部A 21 対数増幅部A 22 増幅部B 23 アッテネータ部B 24 対数増幅部B 25 位相差検出部 26 演算部 27 表示部 1 AT-cut crystal oscillator cell 2 Pulse generator 3 Impedance measuring device 4 Computer 5 Printer 6 Sample 7 Glass substrate 8 Transparent electrode 9 Polarizer 10 Detection light 11 AT-cut crystal oscillator 12 Crystal oscillator electrode 13 Shared electrode 14 Voltage Application electrode 15 Holder 16 Spacer 17 Signal generator 18 Signal distributor 19 Amplifier A 20 Attenuator A 21 Logarithmic amplifier A 22 Amplifier B 23 Attenuator B 24 Logarithmic amplifier B 25 Phase difference detector 26 Arithmetic unit 27 Display

───────────────────────────────────────────────────── フロントページの続き (72)発明者 木村 一彦 東京都江東区亀戸6丁目31番1号 セイコ ー電子工業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Kazuhiko Kimura 6-31-1, Kameido, Koto-ku, Tokyo Seiko Denshi Kogyo Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 圧電素子の少なくとも一方の面を試料と
接触させ、試料に電圧を印加したときの、圧電素子の共
振周波数あるいは共振抵抗値を測定して試料の粘弾性変
化を検出することにより、電圧印加時に状態変化を生じ
る試料の電気特性の計測を行うことを特徴とする電気特
性計測方法。
1. A piezoelectric element is brought into contact with at least one surface thereof, and when a voltage is applied to the sample, a resonance frequency or a resonance resistance value of the piezoelectric element is measured to detect a viscoelastic change of the sample. A method for measuring electrical characteristics, which comprises measuring the electrical characteristics of a sample that changes state when a voltage is applied.
【請求項2】 少なくとも圧電素子と圧電素子の共振周
波数を測定する装置、あるいは圧電素子の共振抵抗値を
測定する装置と、圧電素子の一方の面を試料と接触さ
せ、試料の接した圧電素子の電極と試料を挟んで前記電
極と平行に設置された電極を有する試料保持部から構成
され、前記両電極間に電圧を印加したときの圧電素子の
共振周波数あるいは共振抵抗値を連続的に測定して試料
の粘弾性変化を検出することにより、電圧印加時に状態
変化を生じる試料の電気特性の計測を行うことを特徴と
する電気特性計測装置。
2. A device for measuring at least a piezoelectric element and a resonance frequency of the piezoelectric device, or a device for measuring a resonance resistance value of the piezoelectric device, and one surface of the piezoelectric device is brought into contact with the sample, and the piezoelectric device in contact with the sample. The sample holding part has an electrode and an electrode placed in parallel with the electrode sandwiching the sample, and continuously measures the resonance frequency or the resonance resistance value of the piezoelectric element when a voltage is applied between the both electrodes. An electrical characteristic measuring device is characterized in that the electrical characteristic of the sample that causes a state change when a voltage is applied is measured by detecting the viscoelastic change of the sample.
JP03229159A 1991-09-09 1991-09-09 Method and apparatus for measuring electrical characteristics Expired - Lifetime JP3087190B2 (en)

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JP03229159A JP3087190B2 (en) 1991-09-09 1991-09-09 Method and apparatus for measuring electrical characteristics

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08261915A (en) * 1995-03-20 1996-10-11 Olympus Optical Co Ltd Tactile sensor probe and tactile sensor
JP2003042924A (en) * 2001-07-31 2003-02-13 National Institute Of Advanced Industrial & Technology Method and instrument for measuring viscosity
JP2007071722A (en) * 2005-09-07 2007-03-22 Tokyo Institute Of Technology Method of measuring parameter of elastic wave element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08261915A (en) * 1995-03-20 1996-10-11 Olympus Optical Co Ltd Tactile sensor probe and tactile sensor
JP2003042924A (en) * 2001-07-31 2003-02-13 National Institute Of Advanced Industrial & Technology Method and instrument for measuring viscosity
JP2007071722A (en) * 2005-09-07 2007-03-22 Tokyo Institute Of Technology Method of measuring parameter of elastic wave element

Also Published As

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