JPH0230023Y2 - - Google Patents

Info

Publication number
JPH0230023Y2
JPH0230023Y2 JP1984037061U JP3706184U JPH0230023Y2 JP H0230023 Y2 JPH0230023 Y2 JP H0230023Y2 JP 1984037061 U JP1984037061 U JP 1984037061U JP 3706184 U JP3706184 U JP 3706184U JP H0230023 Y2 JPH0230023 Y2 JP H0230023Y2
Authority
JP
Japan
Prior art keywords
tube
liquid
constant temperature
semiconductor processing
processing liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984037061U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60148029U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3706184U priority Critical patent/JPS60148029U/ja
Publication of JPS60148029U publication Critical patent/JPS60148029U/ja
Application granted granted Critical
Publication of JPH0230023Y2 publication Critical patent/JPH0230023Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP3706184U 1984-03-15 1984-03-15 半導体処理液の供給装置 Granted JPS60148029U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3706184U JPS60148029U (ja) 1984-03-15 1984-03-15 半導体処理液の供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3706184U JPS60148029U (ja) 1984-03-15 1984-03-15 半導体処理液の供給装置

Publications (2)

Publication Number Publication Date
JPS60148029U JPS60148029U (ja) 1985-10-01
JPH0230023Y2 true JPH0230023Y2 (enExample) 1990-08-13

Family

ID=30542810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3706184U Granted JPS60148029U (ja) 1984-03-15 1984-03-15 半導体処理液の供給装置

Country Status (1)

Country Link
JP (1) JPS60148029U (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5342419Y2 (enExample) * 1973-07-09 1978-10-13
JPS582425U (ja) * 1981-06-30 1983-01-08 株式会社大金製作所 クラツチデイスクのフエ−シング取付構造

Also Published As

Publication number Publication date
JPS60148029U (ja) 1985-10-01

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