JPH0228395Y2 - - Google Patents
Info
- Publication number
- JPH0228395Y2 JPH0228395Y2 JP1981087598U JP8759881U JPH0228395Y2 JP H0228395 Y2 JPH0228395 Y2 JP H0228395Y2 JP 1981087598 U JP1981087598 U JP 1981087598U JP 8759881 U JP8759881 U JP 8759881U JP H0228395 Y2 JPH0228395 Y2 JP H0228395Y2
- Authority
- JP
- Japan
- Prior art keywords
- container
- firing
- silicon carbide
- graphite
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010304 firing Methods 0.000 claims description 21
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 229910002804 graphite Inorganic materials 0.000 claims description 13
- 239000010439 graphite Substances 0.000 claims description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 13
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 13
- 239000010409 thin film Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 10
- 229910052573 porcelain Inorganic materials 0.000 description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910004613 CdTe Inorganic materials 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 241001036794 Microsorum maximum Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981087598U JPH0228395Y2 (es) | 1981-06-15 | 1981-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981087598U JPH0228395Y2 (es) | 1981-06-15 | 1981-06-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57200027U JPS57200027U (es) | 1982-12-20 |
| JPH0228395Y2 true JPH0228395Y2 (es) | 1990-07-30 |
Family
ID=29882799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981087598U Expired JPH0228395Y2 (es) | 1981-06-15 | 1981-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0228395Y2 (es) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57188822A (en) * | 1981-05-15 | 1982-11-19 | Matsushita Electric Ind Co Ltd | Vessel for baking |
-
1981
- 1981-06-15 JP JP1981087598U patent/JPH0228395Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57188822A (en) * | 1981-05-15 | 1982-11-19 | Matsushita Electric Ind Co Ltd | Vessel for baking |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57200027U (es) | 1982-12-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4264803A (en) | Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization | |
| US1948382A (en) | Oxidation resisting carbon article | |
| IE780321L (en) | Coating of supports with tin oxide. | |
| US3385723A (en) | Carbon article coated with beta silicon carbide | |
| JPH0257679A (ja) | 無定形炭素からなる皮膜の製造方法及び皮膜 | |
| EP0529593B1 (en) | A glass carbon coated graphite chuck for use in producing polycrystalline silicon | |
| JPH0228395Y2 (es) | ||
| ES8502173A1 (es) | Procedimiento para calcinar cuerpos carbonosos. | |
| KR20120115094A (ko) | 기판 처리 장치 및 기판 처리 장치에 이용되는 반응관의 표면으로의 코팅막의 형성 방법 | |
| US4734386A (en) | Boron nitride dopant source for diffusion doping | |
| SE302914B (es) | ||
| JPH0117074B2 (es) | ||
| US4686116A (en) | Process for coating small refractory particles | |
| GB1338337A (en) | Cadmium sulphide thin film sustained conductivity device and method for making same | |
| US2839426A (en) | Method of coating carbonaceous articles with silicon nitride | |
| JPH0239450B2 (es) | ||
| JP2527666B2 (ja) | ガラス状炭素被覆物品 | |
| DE3476868D1 (en) | Process for applying a tin oxide coating to a substrate starting from gaseous tin compounds | |
| JPH04300271A (ja) | 熱分解窒化ほう素複合材および高温炉用断熱材 | |
| JP3522815B2 (ja) | ガラスとの離型性に優れた熱分解炭素被覆炭素部材 | |
| KR940007272B1 (ko) | 열처리 대상물 고정구 | |
| JPH0289989A (ja) | コンデンサ素体焼成用超軽量治具 | |
| Rudham | Sintering of evaporated films of sodium chloride | |
| JPH024123Y2 (es) | ||
| JPS58223620A (ja) | 酸化錫膜の形成方法 |