JPH0228226B2 - - Google Patents

Info

Publication number
JPH0228226B2
JPH0228226B2 JP56168188A JP16818881A JPH0228226B2 JP H0228226 B2 JPH0228226 B2 JP H0228226B2 JP 56168188 A JP56168188 A JP 56168188A JP 16818881 A JP16818881 A JP 16818881A JP H0228226 B2 JPH0228226 B2 JP H0228226B2
Authority
JP
Japan
Prior art keywords
sample
ionized
substance
argon
neutral particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56168188A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5868856A (ja
Inventor
Munehiji Naito
Yoshihiro Naito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56168188A priority Critical patent/JPS5868856A/ja
Publication of JPS5868856A publication Critical patent/JPS5868856A/ja
Publication of JPH0228226B2 publication Critical patent/JPH0228226B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP56168188A 1981-10-21 1981-10-21 イオン源 Granted JPS5868856A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56168188A JPS5868856A (ja) 1981-10-21 1981-10-21 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56168188A JPS5868856A (ja) 1981-10-21 1981-10-21 イオン源

Publications (2)

Publication Number Publication Date
JPS5868856A JPS5868856A (ja) 1983-04-23
JPH0228226B2 true JPH0228226B2 (cs) 1990-06-22

Family

ID=15863408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56168188A Granted JPS5868856A (ja) 1981-10-21 1981-10-21 イオン源

Country Status (1)

Country Link
JP (1) JPS5868856A (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5493361U (cs) * 1977-12-14 1979-07-02

Also Published As

Publication number Publication date
JPS5868856A (ja) 1983-04-23

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