JPH0227750U - - Google Patents
Info
- Publication number
- JPH0227750U JPH0227750U JP1988106714U JP10671488U JPH0227750U JP H0227750 U JPH0227750 U JP H0227750U JP 1988106714 U JP1988106714 U JP 1988106714U JP 10671488 U JP10671488 U JP 10671488U JP H0227750 U JPH0227750 U JP H0227750U
- Authority
- JP
- Japan
- Prior art keywords
- section
- light receiving
- solid
- imaging device
- state imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003384 imaging method Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims 1
- 239000011159 matrix material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Landscapes
- Transforming Light Signals Into Electric Signals (AREA)
- Solid State Image Pick-Up Elements (AREA)
Description
第１図は本考案の固体撮像装置の一例の要部断
面図、第２図ａ〜第２図ｃはその製造工程を説明
するためのそれぞれ工程平面図、第３図は本考案
の固体撮像装置の他の一例の要部断面図、第４図
ａ〜第４図ｃはその他の一例の製造工程を説明す
るためのそれぞれ工程平面図、第５図は本考案の
固体撮像装置のさらに他の一例の要部断面図であ
る。
１，３３，５４……第１層目のポリシリコン層
、２，３８，５９……読み出し部、３，３７，５
８……チヤンネルストツパー領域、４，３５，５
６……電荷転送部、７，３２，５３……受光部。
FIG. 1 is a sectional view of essential parts of an example of the solid-state imaging device of the present invention, FIGS. 2a to 2c are process plan views for explaining the manufacturing process, and FIG. 3 is a solid-state imaging device of the present invention. 4a to 4c are process plan views for explaining the manufacturing process of another example of the device, and FIG. 5 is a sectional view of another example of the solid-state imaging device of the present invention. FIG. 2 is a sectional view of a main part of an example. 1, 33, 54...First layer polysilicon layer, 2, 38, 59...Reading section, 3, 37, 5
8... Channel stopper area, 4, 35, 5
6... Charge transfer section, 7, 32, 53... Light receiving section.
Claims (1)
部と、垂直方向の各列の上記受光部の間に設けら
れ電荷を垂直方向に転送する電荷転送部と、その
電荷転送部と上記受光部の間の電荷を転送を制御
する読み出し部と、上記読み出し部以外で上記受
光部の周囲を囲むチヤンネルストツパー領域とを
有する固体撮像装置において、 少なくともチヤンネルストツパー領域上には第
１層目の電極層が設けられ、その第１層目の電極
層をマスクの一部として不純物の導入が行われた
電荷転送部を有する固体撮像装置。[Claims for Utility Model Registration] Light receiving sections arranged in a matrix on a semiconductor substrate, a charge transfer section provided between the light receiving sections in each vertical column to transfer charges in the vertical direction, and the charges therefor. In a solid-state imaging device, the solid-state imaging device includes a readout section that controls charge transfer between the transfer section and the light receiving section, and a channel stopper region surrounding the light receiving section other than the readout section, at least on the channel stopper region. A solid-state imaging device having a charge transfer section provided with a first electrode layer and into which impurities are introduced using the first electrode layer as part of a mask.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988106714U JPH0755005Y2 (en) | 1988-08-12 | 1988-08-12 | Solid-state imaging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988106714U JPH0755005Y2 (en) | 1988-08-12 | 1988-08-12 | Solid-state imaging device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0227750U true JPH0227750U (en) | 1990-02-22 |
| JPH0755005Y2 JPH0755005Y2 (en) | 1995-12-18 |
Family
ID=31340473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988106714U Expired - Lifetime JPH0755005Y2 (en) | 1988-08-12 | 1988-08-12 | Solid-state imaging device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0755005Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58160580A (en) * | 1982-03-19 | 1983-09-24 | Hitachi Ltd | Scroll fluidic device |
-
1988
- 1988-08-12 JP JP1988106714U patent/JPH0755005Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58160580A (en) * | 1982-03-19 | 1983-09-24 | Hitachi Ltd | Scroll fluidic device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0755005Y2 (en) | 1995-12-18 |
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