JPH02273587A - 洗浄装置 - Google Patents

洗浄装置

Info

Publication number
JPH02273587A
JPH02273587A JP9445989A JP9445989A JPH02273587A JP H02273587 A JPH02273587 A JP H02273587A JP 9445989 A JP9445989 A JP 9445989A JP 9445989 A JP9445989 A JP 9445989A JP H02273587 A JPH02273587 A JP H02273587A
Authority
JP
Japan
Prior art keywords
cleaning
processing chamber
cleaned
processing
shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9445989A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542316B2 (enExample
Inventor
Masahide Uchino
正英 内野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JAPAN FUIRUDO KK
Japan Field Co Ltd
Original Assignee
JAPAN FUIRUDO KK
Japan Field Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JAPAN FUIRUDO KK, Japan Field Co Ltd filed Critical JAPAN FUIRUDO KK
Priority to JP9445989A priority Critical patent/JPH02273587A/ja
Publication of JPH02273587A publication Critical patent/JPH02273587A/ja
Publication of JPH0542316B2 publication Critical patent/JPH0542316B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP9445989A 1989-04-14 1989-04-14 洗浄装置 Granted JPH02273587A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9445989A JPH02273587A (ja) 1989-04-14 1989-04-14 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9445989A JPH02273587A (ja) 1989-04-14 1989-04-14 洗浄装置

Publications (2)

Publication Number Publication Date
JPH02273587A true JPH02273587A (ja) 1990-11-08
JPH0542316B2 JPH0542316B2 (enExample) 1993-06-28

Family

ID=14110856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9445989A Granted JPH02273587A (ja) 1989-04-14 1989-04-14 洗浄装置

Country Status (1)

Country Link
JP (1) JPH02273587A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013202566A (ja) * 2012-03-29 2013-10-07 Sharp Corp 洗浄乾燥装置および洗浄乾燥方法
JP2023064028A (ja) * 2021-10-25 2023-05-10 ジャパン・フィールド株式会社 被洗浄物の洗浄方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013202566A (ja) * 2012-03-29 2013-10-07 Sharp Corp 洗浄乾燥装置および洗浄乾燥方法
JP2023064028A (ja) * 2021-10-25 2023-05-10 ジャパン・フィールド株式会社 被洗浄物の洗浄方法

Also Published As

Publication number Publication date
JPH0542316B2 (enExample) 1993-06-28

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