JPH0226851B2 - - Google Patents

Info

Publication number
JPH0226851B2
JPH0226851B2 JP16705484A JP16705484A JPH0226851B2 JP H0226851 B2 JPH0226851 B2 JP H0226851B2 JP 16705484 A JP16705484 A JP 16705484A JP 16705484 A JP16705484 A JP 16705484A JP H0226851 B2 JPH0226851 B2 JP H0226851B2
Authority
JP
Japan
Prior art keywords
resist
pattern
substrate
layer
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16705484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144628A (ja
Inventor
Takashi Niriki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Electronic Corp filed Critical Pioneer Electronic Corp
Priority to JP16705484A priority Critical patent/JPS6144628A/ja
Publication of JPS6144628A publication Critical patent/JPS6144628A/ja
Publication of JPH0226851B2 publication Critical patent/JPH0226851B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00269—Fresnel lenses

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Surface Treatment Of Glass (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP16705484A 1984-08-09 1984-08-09 マイクロフレネルレンズの製造方法 Granted JPS6144628A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16705484A JPS6144628A (ja) 1984-08-09 1984-08-09 マイクロフレネルレンズの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16705484A JPS6144628A (ja) 1984-08-09 1984-08-09 マイクロフレネルレンズの製造方法

Publications (2)

Publication Number Publication Date
JPS6144628A JPS6144628A (ja) 1986-03-04
JPH0226851B2 true JPH0226851B2 (zh) 1990-06-13

Family

ID=15842539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16705484A Granted JPS6144628A (ja) 1984-08-09 1984-08-09 マイクロフレネルレンズの製造方法

Country Status (1)

Country Link
JP (1) JPS6144628A (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6475704B1 (en) 1997-09-12 2002-11-05 Canon Kabushiki Kaisha Method for forming fine structure
JP2000098116A (ja) 1998-09-18 2000-04-07 Canon Inc 素子又は素子作製用モールド型の作製方法
JP4711251B2 (ja) * 2002-02-20 2011-06-29 カールツァイス エスエムエス リミテッド 欠陥フォトマスクを修理するための方法およびシステム
JP4904742B2 (ja) * 2004-09-16 2012-03-28 旭硝子株式会社 パターンの形成方法およびパターンを有する物品
JP2006310678A (ja) * 2005-05-02 2006-11-09 Ricoh Opt Ind Co Ltd 微細表面構造形成用基板、微細表面構造物品の製造方法及びその製造方法で製造された微細表面構造物品
JP5128808B2 (ja) * 2006-12-06 2013-01-23 スリーエム イノベイティブ プロパティズ カンパニー フレネルレンズ

Also Published As

Publication number Publication date
JPS6144628A (ja) 1986-03-04

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