JPH0226164B2 - - Google Patents
Info
- Publication number
- JPH0226164B2 JPH0226164B2 JP28460885A JP28460885A JPH0226164B2 JP H0226164 B2 JPH0226164 B2 JP H0226164B2 JP 28460885 A JP28460885 A JP 28460885A JP 28460885 A JP28460885 A JP 28460885A JP H0226164 B2 JPH0226164 B2 JP H0226164B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light beam
- detection device
- position detection
- photoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 18
- 238000006073 displacement reaction Methods 0.000 claims description 11
- 238000012937 correction Methods 0.000 claims description 6
- 239000013307 optical fiber Substances 0.000 claims description 5
- 238000005259 measurement Methods 0.000 description 19
- 230000003746 surface roughness Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000001444 catalytic combustion detection Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28460885A JPS62144014A (ja) | 1985-12-18 | 1985-12-18 | 光電式位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28460885A JPS62144014A (ja) | 1985-12-18 | 1985-12-18 | 光電式位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62144014A JPS62144014A (ja) | 1987-06-27 |
| JPH0226164B2 true JPH0226164B2 (fr) | 1990-06-07 |
Family
ID=17680657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28460885A Granted JPS62144014A (ja) | 1985-12-18 | 1985-12-18 | 光電式位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62144014A (fr) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH079369B2 (ja) * | 1988-04-08 | 1995-02-01 | 三菱電機株式会社 | 膜厚測定装置 |
| JPH02299418A (ja) * | 1989-05-12 | 1990-12-11 | Sumitomo Electric Ind Ltd | Ｏｆケーブル線路 |
| JPH0643683Y2 (ja) * | 1989-10-12 | 1994-11-14 | サンクス株式会社 | エリアセンサ |
| JPH03196106A (ja) * | 1989-12-26 | 1991-08-27 | Olympus Optical Co Ltd | カメラの焦点検出装置 |
| JP3414439B2 (ja) * | 1993-06-07 | 2003-06-09 | オリンパス光学工業株式会社 | 距離測定装置 |
| JP2011141142A (ja) * | 2010-01-05 | 2011-07-21 | Sharp Corp | 測距センサおよび電子機器 |
| EP3396308B1 (fr) * | 2015-12-25 | 2022-02-02 | Keyence Corporation | Appareil de mesure de déplacement confocal |
-
1985
- 1985-12-18 JP JP28460885A patent/JPS62144014A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62144014A (ja) | 1987-06-27 |
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