JPH0225996B2 - - Google Patents
Info
- Publication number
- JPH0225996B2 JPH0225996B2 JP63128564A JP12856488A JPH0225996B2 JP H0225996 B2 JPH0225996 B2 JP H0225996B2 JP 63128564 A JP63128564 A JP 63128564A JP 12856488 A JP12856488 A JP 12856488A JP H0225996 B2 JPH0225996 B2 JP H0225996B2
- Authority
- JP
- Japan
- Prior art keywords
- plating bath
- solution
- film
- concentration
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 33
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 24
- 238000007747 plating Methods 0.000 claims description 24
- 229910003321 CoFe Inorganic materials 0.000 claims description 21
- 238000004070 electrodeposition Methods 0.000 claims description 14
- 229910052742 iron Inorganic materials 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 11
- 239000010941 cobalt Substances 0.000 claims description 9
- 229910017052 cobalt Inorganic materials 0.000 claims description 9
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 9
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 claims description 7
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 6
- 238000009713 electroplating Methods 0.000 claims description 6
- 239000004327 boric acid Substances 0.000 claims description 4
- 239000011734 sodium Substances 0.000 claims description 4
- 229910000361 cobalt sulfate Inorganic materials 0.000 claims description 3
- 229940044175 cobalt sulfate Drugs 0.000 claims description 3
- KTVIXTQDYHMGHF-UHFFFAOYSA-L cobalt(2+) sulfate Chemical compound [Co+2].[O-]S([O-])(=O)=O KTVIXTQDYHMGHF-UHFFFAOYSA-L 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000005294 ferromagnetic effect Effects 0.000 claims description 3
- 229910000358 iron sulfate Inorganic materials 0.000 claims description 3
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 claims description 3
- 239000004094 surface-active agent Substances 0.000 claims description 2
- 239000008151 electrolyte solution Substances 0.000 claims 5
- 239000000243 solution Substances 0.000 claims 5
- CVHZOJJKTDOEJC-UHFFFAOYSA-N saccharin Chemical compound C1=CC=C2C(=O)NS(=O)(=O)C2=C1 CVHZOJJKTDOEJC-UHFFFAOYSA-N 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000006179 pH buffering agent Substances 0.000 claims 1
- 230000005291 magnetic effect Effects 0.000 description 29
- 239000010408 film Substances 0.000 description 21
- 239000010409 thin film Substances 0.000 description 15
- 229910000889 permalloy Inorganic materials 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000008021 deposition Effects 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 231100000053 low toxicity Toxicity 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- WINXNKPZLFISPD-UHFFFAOYSA-M Saccharin sodium Chemical compound [Na+].C1=CC=C2C(=O)[N-]S(=O)(=O)C2=C1 WINXNKPZLFISPD-UHFFFAOYSA-M 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000005381 magnetic domain Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910002070 thin film alloy Inorganic materials 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000006172 buffering agent Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910001628 calcium chloride Inorganic materials 0.000 description 1
- 239000001110 calcium chloride Substances 0.000 description 1
- GVPFVAHMJGGAJG-UHFFFAOYSA-L cobalt dichloride Chemical compound [Cl-].[Cl-].[Co+2] GVPFVAHMJGGAJG-UHFFFAOYSA-L 0.000 description 1
- FQMNUIZEFUVPNU-UHFFFAOYSA-N cobalt iron Chemical compound [Fe].[Co].[Co] FQMNUIZEFUVPNU-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229960002089 ferrous chloride Drugs 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 description 1
- 231100001231 less toxic Toxicity 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
- C25D3/562—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of iron or nickel or cobalt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S205/00—Electrolysis: processes, compositions used therein, and methods of preparing the compositions
- Y10S205/922—Electrolytic coating of magnetic storage medium, other than selected area coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Thin Magnetic Films (AREA)
- Magnetic Heads (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US056089 | 1987-05-29 | ||
| US07/056,089 US4756816A (en) | 1987-05-29 | 1987-05-29 | Electrodeposition of high moment cobalt iron |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63307294A JPS63307294A (ja) | 1988-12-14 |
| JPH0225996B2 true JPH0225996B2 (esLanguage) | 1990-06-06 |
Family
ID=22002078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63128564A Granted JPS63307294A (ja) | 1987-05-29 | 1988-05-27 | 強磁性コーティング用メッキ浴及びその使用方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4756816A (esLanguage) |
| EP (1) | EP0293107A3 (esLanguage) |
| JP (1) | JPS63307294A (esLanguage) |
| AU (1) | AU1635788A (esLanguage) |
| CA (1) | CA1329916C (esLanguage) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0447044A1 (en) * | 1990-02-23 | 1991-09-18 | Eaton Corporation | Magneto-elastic film and process |
| JP2544845B2 (ja) * | 1990-08-23 | 1996-10-16 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 磁性薄膜、ラミネ―ト、磁気記録ヘッドおよび磁気遮蔽体ならびにラミネ―トの製造方法 |
| JPH06176926A (ja) * | 1992-12-02 | 1994-06-24 | Matsushita Electric Ind Co Ltd | 組成変調軟磁性膜およびその製造方法 |
| DE19949549A1 (de) * | 1999-10-14 | 2001-04-26 | Hille & Mueller Gmbh & Co | Elektrolytisch beschichtetes Kaltband, vorzugsweise zur Verwendung für die Herstellung von Batteriehülsen sowie Verfahren zur Beschichtung desselben |
| US6797141B1 (en) * | 1999-11-25 | 2004-09-28 | Enthone Inc. | Removal of coagulates from a non-glare electroplating bath |
| US6855240B2 (en) * | 2000-08-09 | 2005-02-15 | Hitachi Global Storage Technologies Netherlands B.V. | CoFe alloy film and process of making same |
| US6776891B2 (en) | 2001-05-18 | 2004-08-17 | Headway Technologies, Inc. | Method of manufacturing an ultra high saturation moment soft magnetic thin film |
| US6795273B2 (en) | 2002-01-08 | 2004-09-21 | Quantum Materials Design, Inc. | Magnetic recording head with high saturation magnetization write pole having alternating interface-defining Fe/Co layers |
| US7001499B2 (en) | 2002-01-18 | 2006-02-21 | Hitachi Global Storage Technologies Netherlands B.V. | Method for electroplating a body-centered cubic nickel-iron alloy thin film with a high saturation flux density |
| RU2239672C2 (ru) * | 2002-11-12 | 2004-11-10 | Курская государственная сельскохозяйственная академия им. проф. И.И. Иванова | Способ электролитического осаждения сплава железо-молибден-кобальт |
| US20080197021A1 (en) * | 2007-02-16 | 2008-08-21 | Headway Technologies, Inc. | Method to make superior soft (low Hk), high moment magnetic film and its application in writer heads |
| CN102383149B (zh) * | 2011-11-09 | 2014-07-02 | 广东达志环保科技股份有限公司 | 一种环保三价铬电镀液及其电镀方法 |
| US10132699B1 (en) * | 2014-10-06 | 2018-11-20 | National Technology & Engineering Solutions Of Sandia, Llc | Electrodeposition processes for magnetostrictive resonators |
| US11697885B2 (en) * | 2016-09-19 | 2023-07-11 | University Of Central Florida Research Foundation, Inc. | Production of nanoporous films |
| JP7197933B2 (ja) | 2021-05-27 | 2022-12-28 | 石原ケミカル株式会社 | アンダーバリアメタルとソルダー層とを含む構造体 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2507400A (en) * | 1943-08-02 | 1950-05-09 | Sk Wellman Co | Method of electroplating with iron and cobalt |
| US4053373A (en) * | 1975-07-09 | 1977-10-11 | M & T Chemicals Inc. | Electroplating of nickel, cobalt, nickel-cobalt, nickel-iron, cobalt-iron and nickel-iron-cobalt deposits |
| US4014759A (en) * | 1975-07-09 | 1977-03-29 | M & T Chemicals Inc. | Electroplating iron alloys containing nickel, cobalt or nickel and cobalt |
| US4208254A (en) * | 1976-09-22 | 1980-06-17 | Satoshi Ichioka | Method of plating an iron-cobalt alloy on a substrate |
| US4102756A (en) * | 1976-12-30 | 1978-07-25 | International Business Machines Corporation | Nickel-iron (80:20) alloy thin film electroplating method and electrochemical treatment and plating apparatus |
| US4526968A (en) * | 1981-08-24 | 1985-07-02 | M&T Chemicals Inc. | Quaternary aminehydroxypropane sulfobetaines |
| US4430171A (en) * | 1981-08-24 | 1984-02-07 | M&T Chemicals Inc. | Electroplating baths for nickel, iron, cobalt and alloys thereof |
| US4661216A (en) * | 1986-04-21 | 1987-04-28 | International Business Machines Corporation | Electrodepositing CoNiFe alloys for thin film heads |
-
1987
- 1987-05-29 US US07/056,089 patent/US4756816A/en not_active Expired - Lifetime
-
1988
- 1988-05-12 EP EP88304303A patent/EP0293107A3/en not_active Withdrawn
- 1988-05-17 AU AU16357/88A patent/AU1635788A/en not_active Abandoned
- 1988-05-27 JP JP63128564A patent/JPS63307294A/ja active Granted
- 1988-05-27 CA CA000568030A patent/CA1329916C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CA1329916C (en) | 1994-05-31 |
| US4756816A (en) | 1988-07-12 |
| EP0293107A2 (en) | 1988-11-30 |
| JPS63307294A (ja) | 1988-12-14 |
| EP0293107A3 (en) | 1990-08-01 |
| AU1635788A (en) | 1988-12-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |