JPH02257655A - Gate array - Google Patents
Gate arrayInfo
- Publication number
- JPH02257655A JPH02257655A JP7923989A JP7923989A JPH02257655A JP H02257655 A JPH02257655 A JP H02257655A JP 7923989 A JP7923989 A JP 7923989A JP 7923989 A JP7923989 A JP 7923989A JP H02257655 A JPH02257655 A JP H02257655A
- Authority
- JP
- Japan
- Prior art keywords
- logic circuit
- pattern
- mounting
- pattern area
- internal logic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 abstract description 11
- 230000007547 defect Effects 0.000 abstract description 8
- 239000002184 metal Substances 0.000 abstract description 3
- 239000000470 constituent Substances 0.000 abstract 1
- 238000004458 analytical method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000003491 array Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 235000014121 butter Nutrition 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、入出力用バッファ回路搭載用パターン領域と
内部論理回路搭載用パターン領域を具備するゲ・−ドア
レイに関し、特に不良発生時のチップ解析を容易にした
ゲートアレイに関するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a gated array having a pattern area for mounting an input/output buffer circuit and a pattern area for mounting an internal logic circuit. This relates to gate arrays that are easy to analyze.
従来のゲートアレイは、そのチップパターンを第2図に
示すように、入出力用バッファ回路搭載用パターン領域
1と内部論理回路搭載用パターン領域2から構成され、
このパターン領域20周辺に入出力用バッファ回路搭載
用パターン領域1が配置された構造を有している。As shown in FIG. 2, the conventional gate array has a chip pattern consisting of a pattern area 1 for mounting an input/output buffer circuit and a pattern area 2 for mounting an internal logic circuit.
It has a structure in which a pattern area 1 for mounting an input/output buffer circuit is arranged around this pattern area 20.
ところで、かかるゲートアレイは、拡散工程等のトラン
ジスタ生成工程を完了したものをストックしておき、金
属配線工程によシ入出力用バックァ回路搭載用パターン
領域1には入出力用バッファ回路素子配置、内部論理回
路搭載用パターン領域2には内部論理回路構成素子配置
拳内部論理回路構成素子間相互配線、および内部論理回
路構成素子と入出力用バッファ回路素子間相互配線を計
算機により自動で行なうのが一般的である。By the way, such gate arrays are stocked after completing the transistor generation process such as the diffusion process, and the pattern area 1 for mounting the input/output buffer circuit is equipped with the input/output buffer circuit elements arranged in the metal wiring process. In the internal logic circuit mounting pattern area 2, the internal logic circuit components are arranged, and the mutual wiring between the internal logic circuit components and the mutual wiring between the internal logic circuit components and the input/output buffer circuit elements are automatically performed by a computer. Common.
ところが、このようなゲートアレイの場合、計算機によ
シ自動配置配線を行なうため、内部論理回路構成素子の
配置位置がランダムであシ、不良解析時チップパターン
追跡が困難である。また、通常ゲートアレイの場合、顧
客が回路設計および機能評価用入出力信号を作成するた
め、不良解析時の論理回路追跡、不良の原因となる論理
回路素子の推定が困難であυ、実質上不良解析はほとん
ど不可能に近いという問題点があった。However, in the case of such a gate array, since automatic placement and wiring is performed by a computer, the placement positions of the internal logic circuit elements are random, making it difficult to trace the chip pattern during failure analysis. Furthermore, in the case of normal gate arrays, the customer creates circuit design and input/output signals for functional evaluation, making it difficult to trace the logic circuit during failure analysis and to estimate the logic circuit element that causes the failure. The problem was that failure analysis was almost impossible.
本発明は上記のような問題点を解消するためになされた
もので、製造工程上の問題に起因する不良の解析を容易
にできるゲートアレイを得ることを目的とする。The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to obtain a gate array that can easily analyze defects caused by problems in the manufacturing process.
本発明に係るゲートアレイは、チップバターy上の入出
力用バッフ7回路搭載用パターン領域と内部論理回路搭
載用パターン領域との間にチップモニタ搭載用パターン
領域を設けたものである。In the gate array according to the present invention, a chip monitor mounting pattern area is provided between the input/output buffer 7 circuit mounting pattern area and the internal logic circuit mounting pattern area on the chip butter y.
本発明においては、チップモニタ搭載用パターン領域に
チップ仕上シモニタパターンを搭載することによシ、不
良発生時ウエノ・プロセス仕上シの良否判定が容易に可
能となる。In the present invention, by mounting a chip finish monitor pattern in the chip monitor mounting pattern area, it becomes possible to easily determine the quality of the Ueno process finish when a defect occurs.
〔実施例〕 以下、本発明の一実施例を図について説明する。〔Example〕 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第1図は本発明の一実施例を示すゲートアレイチップパ
ターンの概念図である。この実施例が第2図に示した従
来例のものと異なる点は、入出力用バッフ7回路搭載用
パターン領域1と内部論理回路搭載用パターン領域2と
の間にチップモニタ搭載用パターン領域3を設けたこと
である。FIG. 1 is a conceptual diagram of a gate array chip pattern showing one embodiment of the present invention. This embodiment is different from the conventional example shown in FIG. This is because we have established the following.
上記実施例構成のゲートアレイによると、入出力用バッ
フ7回路搭載用パターン領域1および内部論理回路搭載
用パターン領域2に対し、従来例と同様に1客先論理回
路に対応した回路構成素子・配線を計算機による自動配
置配線を行う。一方、チップモニタ搭載用パターン領域
3には、内部論理回路搭載用パターン領域2上のトラン
ジスタパターン(以下、ベーシックセルと略称する)と
同じものを並べておき、金属配線工程によυ不良解析の
容易な論理回路を組み込む。この論理回路は、インバー
タチェーン、シフトレジスタ等何でもよく、要は製造者
が解析容易と考える論理回路であればよい。通常、製品
初期デバッグが完了し量産体制にはいった製品の不良原
因は、製造工程、特にウェハプロセス上の不具合に起因
するものが大半であシ、またトランジスタ等のパターン
形状にも依存し、論理回路そのものにはあtb依存しな
い。それ故、ゲートアレイの場合、内部論理回路搭載用
パターン領域2上のベーシックセルは同一形状のものが
並べられているので、このベーシックセルと同じものを
チップモニタ搭載用パターン領域3に並べて不良解析容
易な論理回路を搭載すれば、内部論理回路搭載パターン
領域2上のウェハプロセス仕上りをモニタでき、製品不
良解析が容易となる。According to the gate array having the configuration of the above embodiment, the pattern area 1 for mounting seven input/output buffer circuits and the pattern area 2 for mounting internal logic circuit are provided with circuit components corresponding to one customer's logic circuit, as in the conventional example. Automatically place and route wiring using a computer. On the other hand, in the chip monitor mounting pattern area 3, the same transistor patterns (hereinafter abbreviated as basic cells) on the internal logic circuit mounting pattern area 2 are lined up to facilitate υ failure analysis during the metal wiring process. Incorporate logic circuits. This logic circuit may be any type of logic circuit such as an inverter chain or a shift register, and in short, it may be any logic circuit that the manufacturer deems easy to analyze. Normally, the causes of defects in products that have completed initial product debugging and are ready for mass production are mostly due to defects in the manufacturing process, especially in the wafer process, and also depend on the pattern shape of transistors, etc. It does not depend on Atb on the circuit itself. Therefore, in the case of a gate array, the basic cells of the same shape are lined up on the internal logic circuit mounting pattern area 2, so the same basic cells are lined up in the chip monitor mounting pattern area 3 for failure analysis. If a simple logic circuit is mounted, the wafer process finish on the internal logic circuit mounting pattern area 2 can be monitored, and product failure analysis becomes easy.
なお、上記実施例ではチップ4辺に対し全てチップモニ
タ搭載用パターン形状を設けたものを示したが、チップ
3辺のみ、2辺のみ、1辺のみに対してチップモニタ搭
載用パターン領域を設けた場合も、不良検出感度は低下
していくカミ、基本的に上記実施例と同様の効果を奏す
る。In addition, in the above embodiment, a pattern shape for mounting a chip monitor is provided on all four sides of the chip, but a pattern area for mounting a chip monitor is provided on only three sides, only two sides, or only one side of the chip. Even in this case, the defect detection sensitivity decreases, and basically the same effect as in the above embodiment is achieved.
以上のように、本発明のゲートアレイによれば、入出力
用バッファ回路搭載用バター/領域と内部論理回路搭載
用パターン領域間にチップモニタ搭載用パターン領域を
設けたので、不良発生時ウェハプロセス仕上りの良否判
定が可能になる。従って、一般的に論理回路設計等顧客
が担当しているため、製造側での不良解析がほぼ不可能
なゲートアレイの不良解析が、チップモニタ搭載用パタ
ーン領域上に製造側でのチップ仕上シモニタ用論理回路
を搭載することによシ、容易に行なうことができ、実用
上の効果は頗る大である。As described above, according to the gate array of the present invention, since the pattern area for mounting the chip monitor is provided between the butter/area for mounting the input/output buffer circuit and the pattern area for mounting the internal logic circuit, the wafer process can be carried out in the event of a failure. It becomes possible to judge the quality of the finish. Therefore, gate array failure analysis, which is almost impossible on the manufacturing side because the customer is in charge of logic circuit design, etc., is performed on the chip finishing pattern area on the chip monitor mounting pattern area. This can be easily done by incorporating a logic circuit for the purpose, and the practical effect is extremely large.
第1図は本発明の一実施例を示すゲートアレイチップパ
ターンの概念図、第2図は従来の一例を示すゲートアレ
イチップパターンの概略図である。
1・―・・入出力バッファ回路搭載用パターン領域、2
拳φ拳・内部論理回路搭載用パターン領域、3・拳・Φ
チップモニタ搭載用パターン領域。FIG. 1 is a conceptual diagram of a gate array chip pattern showing an embodiment of the present invention, and FIG. 2 is a schematic diagram of a gate array chip pattern showing a conventional example. 1. --- Pattern area for mounting input/output buffer circuit, 2
FistφFist・Pattern area for mounting internal logic circuit, 3・Fist・Φ
Pattern area for chip monitor mounting.
Claims (1)
理回路用素子・配線搭載用パターン領域を具備したゲー
トアレイチップパターンにおいて、入出力用バッファ回
路搭載用パターン領域と内部論理回路用素子、配線搭載
用パターン領域間に、チツプモニタ搭載用パターン領域
を設けたことを特徴とするゲートアレイ。In a gate array chip pattern that has a pattern area for mounting an input/output buffer circuit and a pattern area for mounting internal logic circuit elements and wiring, a pattern area for mounting an input/output buffer circuit and a pattern for mounting internal logic circuit elements and wiring. A gate array characterized in that a pattern area for mounting a chip monitor is provided between areas.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7923989A JPH02257655A (en) | 1989-03-29 | 1989-03-29 | Gate array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7923989A JPH02257655A (en) | 1989-03-29 | 1989-03-29 | Gate array |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02257655A true JPH02257655A (en) | 1990-10-18 |
Family
ID=13684312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7923989A Pending JPH02257655A (en) | 1989-03-29 | 1989-03-29 | Gate array |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02257655A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04179138A (en) * | 1990-11-08 | 1992-06-25 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
-
1989
- 1989-03-29 JP JP7923989A patent/JPH02257655A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04179138A (en) * | 1990-11-08 | 1992-06-25 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
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