JPH0225233Y2 - - Google Patents
Info
- Publication number
- JPH0225233Y2 JPH0225233Y2 JP1980138292U JP13829280U JPH0225233Y2 JP H0225233 Y2 JPH0225233 Y2 JP H0225233Y2 JP 1980138292 U JP1980138292 U JP 1980138292U JP 13829280 U JP13829280 U JP 13829280U JP H0225233 Y2 JPH0225233 Y2 JP H0225233Y2
- Authority
- JP
- Japan
- Prior art keywords
- ribs
- basket
- side walls
- wafers
- inner surfaces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980138292U JPH0225233Y2 (US07534539-20090519-C00280.png) | 1980-09-30 | 1980-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980138292U JPH0225233Y2 (US07534539-20090519-C00280.png) | 1980-09-30 | 1980-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5761831U JPS5761831U (US07534539-20090519-C00280.png) | 1982-04-13 |
| JPH0225233Y2 true JPH0225233Y2 (US07534539-20090519-C00280.png) | 1990-07-11 |
Family
ID=29498336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980138292U Expired JPH0225233Y2 (US07534539-20090519-C00280.png) | 1980-09-30 | 1980-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225233Y2 (US07534539-20090519-C00280.png) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5056148A (US07534539-20090519-C00280.png) * | 1973-09-14 | 1975-05-16 | ||
| JPS5410429A (en) * | 1977-06-06 | 1979-01-26 | Anshien Ets Pooru Waasu Sa De | Improvement in valve for opening or closing fluid conduit |
-
1980
- 1980-09-30 JP JP1980138292U patent/JPH0225233Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5056148A (US07534539-20090519-C00280.png) * | 1973-09-14 | 1975-05-16 | ||
| JPS5410429A (en) * | 1977-06-06 | 1979-01-26 | Anshien Ets Pooru Waasu Sa De | Improvement in valve for opening or closing fluid conduit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5761831U (US07534539-20090519-C00280.png) | 1982-04-13 |
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