JPH0224525A - Strain detector - Google Patents
Strain detectorInfo
- Publication number
- JPH0224525A JPH0224525A JP63174011A JP17401188A JPH0224525A JP H0224525 A JPH0224525 A JP H0224525A JP 63174011 A JP63174011 A JP 63174011A JP 17401188 A JP17401188 A JP 17401188A JP H0224525 A JPH0224525 A JP H0224525A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetostrictive
- magnetostriction
- magnetostrictive layer
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims abstract description 67
- 239000011241 protective layer Substances 0.000 claims abstract description 21
- 239000012811 non-conductive material Substances 0.000 claims abstract description 3
- 230000035699 permeability Effects 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 8
- 239000000696 magnetic material Substances 0.000 claims description 7
- 230000006866 deterioration Effects 0.000 abstract description 7
- 239000000428 dust Substances 0.000 abstract description 2
- 125000006850 spacer group Chemical group 0.000 abstract description 2
- 238000000926 separation method Methods 0.000 abstract 1
- 239000012790 adhesive layer Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000004907 flux Effects 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は歪検出器に関するものである。[Detailed description of the invention] [Industrial application field] This invention relates to a distortion detector.
第２図は例えば特開昭５７−２１１０３０号公報に示さ
れた従来の歪検出器を示し、１はトルクを受ける輪状の
受動部材、２は受動部材１に帯状に固着され、受動部材
１に印加されたトルクによって発生する内部歪量に応じ
て透磁率が変化する一対の高透磁率軟磁性材からなる磁
歪層、３は各磁歪層２の外周にそれぞれ設けられ、その
透磁率の変化量を検出する一対の検出コイルである。各
磁歪層２は複数個の短冊状素片から構成されており、左
右対称に±４５°の角度をなすよう配設されている。FIG. 2 shows a conventional strain detector disclosed in, for example, Japanese Unexamined Patent Publication No. 57-211030, in which 1 is a ring-shaped passive member that receives torque, 2 is fixed to the passive member 1 in a band shape, and Magnetostrictive layers 3 each made of a pair of high permeability soft magnetic materials whose magnetic permeability changes according to the amount of internal strain generated by applied torque, 3 are provided on the outer periphery of each magnetostrictive layer 2, and the amount of change in magnetic permeability thereof This is a pair of detection coils that detect. Each magnetostrictive layer 2 is composed of a plurality of strip-shaped pieces, which are arranged symmetrically at an angle of ±45°.
次に、動作について説明する。受動部材１に外部からト
ルクが印加されると、短冊状素片からなる磁歪層２の長
軸方向を主軸とする主応力が発生する。こ・の主応力は
例えば一方の磁歪層２の素片群について引張力であると
すれば、他方の磁歪層２の素片群については圧縮力であ
る。一般に、磁歪定数がゼロではない磁性材料に応力が
加わるとその磁気的性質が変化し、結果として透磁率が
変化する。この現象は機械エネルギを電気エネルギに変
換するいわゆる磁歪変換器で使われるものであり、磁性
体を変形させると変形量に応じて透磁率が変化するＶｉ
ｌｌａｒｉ効果に該当する。又、磁歪の大きさを定量的
に表わす量である磁歪常数が正の場合は、引張力が働（
ときに透磁率が増大し、圧縮力が働くときは透磁率が減
少すること、及び磁歪定数が負の場合にその逆の結果と
なることが知られている。従って、外部より印加された
トルク量に応じた変形を磁歪層２の透磁率変化として検
出し、この透磁率変化を検出コイル３により磁気的イン
ピーダンスの変化として検出することにより、受動部材
１に印加されたトルク量及びこれに伴う歪量を検出する
。Next, the operation will be explained. When torque is applied to the passive member 1 from the outside, a principal stress is generated whose main axis is the long axis direction of the magnetostrictive layer 2 made of strip-shaped pieces. If this principal stress is, for example, a tensile force for the group of fragments of one magnetostrictive layer 2, it is a compressive force for the group of fragments of the other magnetostrictive layer 2. Generally, when stress is applied to a magnetic material whose magnetostriction constant is not zero, its magnetic properties change, resulting in a change in magnetic permeability. This phenomenon is used in so-called magnetostrictive converters that convert mechanical energy into electrical energy, and when a magnetic material is deformed, the magnetic permeability changes depending on the amount of deformation.
This corresponds to the llari effect. In addition, when the magnetostriction constant, which quantitatively represents the magnitude of magnetostriction, is positive, a tensile force acts (
It is known that the magnetic permeability sometimes increases and decreases when compressive forces are applied, and vice versa when the magnetostriction constant is negative. Therefore, the deformation corresponding to the amount of torque applied from the outside is detected as a change in magnetic permeability of the magnetostrictive layer 2, and this change in magnetic permeability is detected by the detection coil 3 as a change in magnetic impedance. The amount of torque applied and the amount of distortion associated with it are detected.
上記した従来の歪検出器においては、磁性層２の機械的
保護ということは特に考慮されてなく、例えば実開昭６
１−１１４６号公報では熱収縮性チューブの収縮力によ
って磁歪層２を受動部材ｌに接着することが行われてい
るが、この場合磁歪層２に圧縮応力が印加されることに
なり、検出誤差を生じる恐れがある。又、接着剤として
はエポキシ系のものが用いられているが、この接着剤と
アモルファス磁性材などからなる磁歪層２との接着力が
弱く、高温高湿下では磁歪層２が剥離するなどの劣化現
象が生じた０例えば、温度８０°Ｃ１相対湿度９０％の
条件で２！！１間歪検出器を用いると、磁歪層２が剥離
するという現象が観測された。又、湿度による磁歪層２
の特性劣化も生じた。In the above-mentioned conventional strain detector, mechanical protection of the magnetic layer 2 is not particularly considered.
1-1146, the magnetostrictive layer 2 is bonded to the passive member l by the contraction force of a heat-shrinkable tube, but in this case compressive stress is applied to the magnetostrictive layer 2, resulting in detection error. may occur. Furthermore, although epoxy-based adhesives are used, the adhesion between this adhesive and the magnetostrictive layer 2 made of amorphous magnetic material is weak, and the magnetostrictive layer 2 may peel off under high temperature and high humidity conditions. Deterioration phenomenon occurred 0 For example, temperature 80°C 1 relative humidity 90% 2! ! When a one-time strain detector was used, a phenomenon in which the magnetostrictive layer 2 peeled off was observed. In addition, the magnetostrictive layer 2 due to humidity
Characteristic deterioration also occurred.
この発明は上記のような課題を解決するために成された
ものであり、磁歪層の湿度による特性劣化や受動部材か
らの剥離を防止するとともに、磁歪層の保護を支障なく
行うことができる歪検出器を得ることを目的とする。This invention was made in order to solve the above-mentioned problems, and it is possible to prevent characteristic deterioration of the magnetostrictive layer due to humidity and peeling from the passive member, and also to prevent the magnetostrictive layer from being peeled off from the passive member. The purpose is to obtain a detector.
この発明に係る歪検出器は、磁歪層を非接触で気密にお
おう非磁性かつ非導電性の保護層を設けたものである。The strain detector according to the present invention is provided with a nonmagnetic and nonconductive protective layer that hermetically covers the magnetostrictive layer in a non-contact manner.
この発明における保護層は磁歪層を気密におおっており
、磁歪層は湿気を塵埃の影響を受は難くなる。又、保護
層は磁歪層と非接触であるので、保護層から磁歪層へは
応力が印加されない。さらに、保護層は非磁性かつ非導
電性であるので、磁束の磁歪層に対する通流は妨げられ
ない。The protective layer in this invention airtightly covers the magnetostrictive layer, making the magnetostrictive layer less susceptible to moisture and dust. Further, since the protective layer is not in contact with the magnetostrictive layer, no stress is applied from the protective layer to the magnetostrictive layer. Furthermore, since the protective layer is non-magnetic and non-conductive, the flow of magnetic flux through the magnetostrictive layer is not impeded.
以下、この発明の実施例を図面とともに説明する。第１
図はこの発明の第１の実施例を示し、磁歪層２は接着層
４を介して受動部材ｌに接着されている。５は磁歪層２
の外周を非接触におおう保護層で、セラミックやプラス
チック例えばフッ素樹脂からなる耐熱性熱収縮チューブ
などの非磁性で非導電性の材料により形成されている。Embodiments of the present invention will be described below with reference to the drawings. 1st
The figure shows a first embodiment of the invention, in which a magnetostrictive layer 2 is bonded to a passive member l via an adhesive layer 4. 5 is magnetostrictive layer 2
It is a protective layer that covers the outer periphery of the magnet in a non-contact manner and is made of a non-magnetic, non-conductive material such as ceramic or plastic, such as a heat-resistant heat-shrinkable tube made of fluororesin.
保護層５は接着層４上に０リングやスペーサなどの非磁
性の支持部材６を介して気密に支持される。The protective layer 5 is airtightly supported on the adhesive layer 4 via a non-magnetic support member 6 such as an O-ring or a spacer.
上記した第１の実施例では、保護層５は磁歪層２と非接
触であるので保護層５から磁歪層２に応力が印加される
ことはなく、また保護層５は磁歪層２を外力から保護す
る。又、保護層５は磁歪層２を気密におおっているので
、磁歪層２は防湿、防塵され、特性劣化や接着層４の剥
離は生じない。In the first embodiment described above, since the protective layer 5 is not in contact with the magnetostrictive layer 2, no stress is applied from the protective layer 5 to the magnetostrictive layer 2, and the protective layer 5 protects the magnetostrictive layer 2 from external force. Protect. Further, since the protective layer 5 airtightly covers the magnetostrictive layer 2, the magnetostrictive layer 2 is moisture-proof and dust-proof, and deterioration of characteristics and peeling of the adhesive layer 4 do not occur.
なお、保護層５は検出コイル３への通電により発生する
磁束が磁歪層２に通流するのを妨げないように非磁性、
非導電性である必要がある。同様にして、支持部材６も
磁歪層２の磁気的特性に影響を与えないように非磁性で
ある必要がある。The protective layer 5 is made of non-magnetic material so as not to prevent the magnetic flux generated by energizing the detection coil 3 from flowing through the magnetostrictive layer 2.
Must be non-conductive. Similarly, the support member 6 also needs to be non-magnetic so as not to affect the magnetic properties of the magnetostrictive layer 2.
第３図はこの発明の第２の実施例による歪検出器を示し
、第４図はその製造方法のフローチャートを示す、ステ
ップ１０ではＮｉ５０％のパーマロイ（Ｆｅ−Ｎｉ合金
）の磁歪薄帯を脱脂、水洗、乾燥処理する。ステップ１
１では、５ｐｃｃからなる受動部材ｌに上記磁歪薄帯を
エポキシ系熱硬化性接着剤からなる接着層４を介して接
着する。ステップ１２ではフォトエツチング処理により
磁歪薄帯をシェブロン形状に選択除去し、磁歪層２を形
成する。ステップ１３では、接着層４及び磁歪層２の全
面に接着剤などの非磁性物質を塗布、硬化させる。ステ
ップ１４では、再度フォトエツチング処理を施こし、磁
歪層２の上部の非磁性物資を除去する。これによって支
持部材７を形成し、支持部材７の厚さは磁歪層２の厚さ
より厚く形成される。ステップ１５では、非磁性で非導
電性の耐熱性熱収縮チューブからなる保護層（フープ）
５を磁歪層２及び支持部材７の外周に形成する。FIG. 3 shows a strain detector according to a second embodiment of the present invention, and FIG. 4 shows a flowchart of its manufacturing method. In step 10, a magnetostrictive ribbon of permalloy (Fe-Ni alloy) containing 50% Ni is degreased. , wash with water and dry. Step 1
In Example 1, the magnetostrictive ribbon is bonded to a passive member L of 5 pcc via an adhesive layer 4 made of an epoxy thermosetting adhesive. In step 12, the magnetostrictive ribbon is selectively removed in a chevron shape by photo-etching to form the magnetostrictive layer 2. In step 13, a non-magnetic substance such as an adhesive is applied to the entire surfaces of the adhesive layer 4 and the magnetostrictive layer 2 and hardened. In step 14, photoetching is performed again to remove the non-magnetic material on the magnetostrictive layer 2. This forms the support member 7, and the thickness of the support member 7 is formed to be thicker than the thickness of the magnetostrictive layer 2. Step 15 consists of a protective layer (hoop) made of non-magnetic, non-conductive heat-resistant heat shrink tubing.
5 is formed on the outer periphery of the magnetostrictive layer 2 and the support member 7.
上記した第２の実施例においても、磁歪層２は保護層５
によって気密に保護され、第１の実施例と同様な効果を
有する。Also in the second embodiment described above, the magnetostrictive layer 2 is the protective layer 5.
The second embodiment is airtightly protected and has the same effect as the first embodiment.
第５図はこの発明の第３の実施例を示し、この例では支
持部材８を非磁性導電性の金属ベース１、により形成し
、また磁歪Ｎ２の上面にパラフィンなどの澄水性物質９
を塗布する。この例でも上記各実施例と同様な効果を有
するが、さらに支持部材８を導電性にしたことにより表
皮効果によって磁束が下部に位置する受動部材ｌに通流
することがなくなり、磁歪層２の磁気的特性が受動部材
１の影響を受けなくなる。ただし、支持部材８は磁束の
表皮深さ以上の厚さを有する。又、磁歪層２の上面にＩ
Ｂ水性物質９を塗布したことにより湿度の影響をさらに
防止することができ、錆などの影響を防止することがで
きる０例えば、温度８０°Ｃ１相対湿度９０％で５００
時間以上の試験を行った場合、歪検出器としての特性変
化は０，５％以下であった。なお、澄水性物質９を磁歪
層２と保護層５の間の空隙に充満させてもよい。FIG. 5 shows a third embodiment of the present invention, in which the support member 8 is formed of a non-magnetic conductive metal base 1, and a clear water material such as paraffin 9 is disposed on the upper surface of the magnetostrictive N2.
Apply. This example also has the same effect as each of the above embodiments, but since the support member 8 is made conductive, the magnetic flux does not flow to the passive member l located below due to the skin effect, and the magnetostrictive layer 2 The magnetic properties are no longer influenced by the passive member 1. However, the support member 8 has a thickness equal to or greater than the skin depth of the magnetic flux. Also, on the upper surface of the magnetostrictive layer 2, I
B By applying the aqueous substance 9, it is possible to further prevent the effects of humidity, and the effects of rust etc.
When the test was conducted for more than an hour, the characteristic change as a strain detector was less than 0.5%. Note that the gap between the magnetostrictive layer 2 and the protective layer 5 may be filled with the clear water substance 9.
以上のようにこの発明によれば、磁歪層を保護層により
非接触で気密におおったので、磁歪層は湿気による特性
劣化や剥離を生じなくなり、保護層から磁歪層への応力
印加による検出誤差も生じない、又、保護層は非磁性か
つ非導電性である０で・磁歪層への磁束の通流は妨げら
れず、検出悪魔の低下は生じない、これらの結果、歪検
出器の信鯨性と耐久性を向上することができる。As described above, according to the present invention, since the magnetostrictive layer is airtightly covered with the protective layer in a non-contact manner, the magnetostrictive layer does not suffer from property deterioration or peeling due to moisture, and detection errors due to stress applied from the protective layer to the magnetostrictive layer. In addition, the protective layer is non-magnetic and non-conductive, so the flow of magnetic flux to the magnetostrictive layer is not obstructed, and there is no deterioration in detection performance.As a result, the reliability of the strain detector is improved. It can improve durability and durability.
第１図はこの発明の第１の実施例による歪検出器の要部
断面図、第２図は従来の歪検出器の構成図、第３図及び
第４図はこの発明の第２の実施例による歪検出器の要部
断面図及びその製造方法を示すフローチャート、第５図
はこの発明の第３の実施例による歪検出器の要部断面図
である。
１・・・受動部材、２・・・磁歪層、３・・・検出コイ
ル、４・・・接着層、５・・・保護層、６〜８・・・支
持部材。
なお、図中同一符号は同−又は相当部分を示す。
代理人 大 岩 増 雄
第１図
第３図
第５図FIG. 1 is a sectional view of essential parts of a strain detector according to a first embodiment of the present invention, FIG. 2 is a configuration diagram of a conventional strain detector, and FIGS. FIG. 5 is a cross-sectional view of a main part of a strain detector according to an example and a flowchart showing a manufacturing method thereof. FIG. 5 is a cross-sectional view of a main part of a strain detector according to a third embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Passive member, 2... Magnetostrictive layer, 3... Detection coil, 4... Adhesive layer, 5... Protective layer, 6-8... Support member. Note that the same reference numerals in the figures indicate the same or equivalent parts. Agent Masuo Oiwa Figure 1 Figure 3 Figure 5
Claims (1)
た高透磁率軟磁性材からなる磁歪層と、磁歪層の表面を
非接触で気密におおう非磁性かつ非導電性材からなる保
護層と、磁歪層の近傍に設けられ、磁歪層の上記外力に
応じた歪による透磁率変化を検出する検出コイルを備え
たことを特徴とする歪検出器。A passive member that receives external force, a magnetostrictive layer made of a high permeability soft magnetic material fixed to the surface of the passive member, and a protective layer made of a nonmagnetic and nonconductive material that airtightly covers the surface of the magnetostrictive layer without contact. . A strain detector comprising a detection coil provided near the magnetostrictive layer to detect a change in magnetic permeability due to strain in the magnetostrictive layer in response to the external force.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63174011A JPH0224525A (en) | 1988-07-12 | 1988-07-12 | Strain detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63174011A JPH0224525A (en) | 1988-07-12 | 1988-07-12 | Strain detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0224525A true JPH0224525A (en) | 1990-01-26 |
Family
ID=15971082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63174011A Pending JPH0224525A (en) | 1988-07-12 | 1988-07-12 | Strain detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0224525A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6861265B1 (en) | 1994-10-14 | 2005-03-01 | University Of Washington | Flow cytometer droplet formation system |
-
1988
- 1988-07-12 JP JP63174011A patent/JPH0224525A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6861265B1 (en) | 1994-10-14 | 2005-03-01 | University Of Washington | Flow cytometer droplet formation system |
| US7923252B2 (en) | 1994-10-14 | 2011-04-12 | University Of Washington | Droplet formation systems for flow cytometers |
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