JPH02233561A - Production of ceramic substrate - Google Patents
Production of ceramic substrateInfo
- Publication number
- JPH02233561A JPH02233561A JP1056867A JP5686789A JPH02233561A JP H02233561 A JPH02233561 A JP H02233561A JP 1056867 A JP1056867 A JP 1056867A JP 5686789 A JP5686789 A JP 5686789A JP H02233561 A JPH02233561 A JP H02233561A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic green
- ceramic
- firing
- green sheets
- ceramic substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 title claims description 10
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000010304 firing Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 5
- 238000001354 calcination Methods 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は各種電子素子の搭載基板等として用−られるセ
ラミウク基板の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a ceramic substrate used as a mounting substrate for various electronic devices.
従来、セラミックグリーンシ一トは１枚づつ単独或は積
層して焼成されるため、焼成効率は低いものであった。Conventionally, ceramic green sheets have been fired one by one or in layers, resulting in low firing efficiency.
従来の技術で述べたように、セラミックグ１７ 一ンν
一トを１枚づつにして焼成すると焼底効率は低ｂ．本発
明は従来の技術における上述の問題点に鑑みてなされた
もので、その目的とするところは、焼成効率のよーセラ
ミック基板の製造方法を提供することにある。As described in the prior art, ceramic 17 1 ν
If one sheet is fired one at a time, the firing efficiency will be low. The present invention has been made in view of the above-mentioned problems in the prior art, and its object is to provide a method for manufacturing a ceramic substrate with high firing efficiency.
本発明はセラミックグリーンシートを焼成してセラミッ
ク基板を製造する方法において、セラミックグリーンシ
ートを所要枚数連結した状態で焼成し、焼成後、分割す
ることを特徴とするセラミック基板の製造方法のため、
焼成効率を向上させることができたもので、以下本発司
を詳細に説明する。The present invention relates to a method for manufacturing a ceramic substrate by firing ceramic green sheets, which method comprises firing a required number of ceramic green sheets in a connected state, and dividing them after firing.
The present invention was able to improve the firing efficiency, and will be described in detail below.
本発明に用ｂるセラミ・Ｉクグリーンシ一トはアルミナ
質、マグネシア質、珪石質、窒化質、示ロン質等のよう
な耐火物骨材やセラミヴクのグリーンシ一ト全般を用い
ることができる。セッター材質についても特に限定する
ものではない。セラミ噌クグリーンシ一トの連結はミシ
ン目、鎖目、部分カット筋目等のように任意であり、又
Ｖカウト状溝等でもよく、特に限定するものではなー．
以下本発明を実施例にもとづいて説明する。As the ceramic green sheet used in the present invention, refractory aggregates such as alumina, magnesia, silica, nitride, silica, etc., and ceramic green sheets in general can be used. The material of the setter is not particularly limited either. The connection of the ceramic paste green sheet may be any arbitrary connection such as perforations, chain lines, partial cut lines, etc., or may be V-cout grooves, etc., and is not particularly limited.
The present invention will be explained below based on examples.
実施例
平均粒径２．８クロンのアルミナ９８重量部（以下単に
部と記す）に対し、タルク２部を加え混合後メチルセル
ロース５部、水迅部を加え混紳後、厚さ１． １ ｍの
シートにし乾燥後、４００ Ｘ ４００ ＩＩ１に打抜
一でセラミックグリーンシートがＶ力呼ト状溝で４枚連
結した８００ Ｘ ８００ ｔｍの４枚連結グリーンシ
一トを得、該シートｌＯ枚を積層し１００℃／時間の昇
温率で１５７０℃迄昇温させ、１５７０℃で３時間焼成
後、降温してから４枚に分割して４枚のセラミ咋ク基板
を得た。Example 2 parts of talc were added to 98 parts by weight of alumina (hereinafter simply referred to as "parts") having an average particle size of 2.8 croms, and after mixing, 5 parts of methyl cellulose and a portion of water were added, and after mixing, the thickness was 1. After forming into a 1 m sheet and drying, it was punched into a 400 x 400 II1 sheet to obtain a 4-connected green sheet of 800 x 800 tm in which four ceramic green sheets were connected with a V-shaped groove, and the sheet lO The sheets were laminated and heated to 1570° C. at a temperature increase rate of 100° C./hour. After firing at 1570° C. for 3 hours, the temperature was lowered and then divided into four pieces to obtain four ceramic board substrates.
比較例
実施例と同じシートを乾燥後４００ Ｘ ４００ ｆｉ
に打抜ｂて得たセラミヴクグリーンシー｝ １０枚を積
層した以外は実施例と同様に処理して七ラミ噌ク基板を
得た。Comparative Example The same sheet as the example was dried at 400 x 400 fi.
A seven-laminate substrate was obtained in the same manner as in Example except that 10 sheets of Ceramic Green Sea obtained by punching were laminated.
実施例及び比較例のセラミック基板の性能は第１表のよ
うである。Table 1 shows the performance of the ceramic substrates of Examples and Comparative Examples.
注 秦 従来を１００とした場合の比である。note Hata: This is the ratio when the conventional value is set to 100.
本発明は上述した如く構成されている。特許請求の範囲
に記載した構成を有するセラミック基板の製造方法にお
いては、焼成効率が向上する効果がある。The present invention is constructed as described above. The method for manufacturing a ceramic substrate having the structure described in the claims has the effect of improving firing efficiency.
Claims (1)
基板を製造する方法において、セラミックグリーンシー
トを所要枚数連結した状態で焼成し、焼成後、分割する
ことを特徴とするセラミック基板の製造方法。(1) A method for manufacturing a ceramic substrate by firing ceramic green sheets, which comprises firing a required number of ceramic green sheets in a connected state, and dividing them after firing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1056867A JPH02233561A (en) | 1989-03-08 | 1989-03-08 | Production of ceramic substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1056867A JPH02233561A (en) | 1989-03-08 | 1989-03-08 | Production of ceramic substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02233561A true JPH02233561A (en) | 1990-09-17 |
Family
ID=13039376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1056867A Pending JPH02233561A (en) | 1989-03-08 | 1989-03-08 | Production of ceramic substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02233561A (en) |
-
1989
- 1989-03-08 JP JP1056867A patent/JPH02233561A/en active Pending
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