JPH02232837A - Magneto-optical recording medium and its production - Google Patents
Magneto-optical recording medium and its productionInfo
- Publication number
- JPH02232837A JPH02232837A JP5422789A JP5422789A JPH02232837A JP H02232837 A JPH02232837 A JP H02232837A JP 5422789 A JP5422789 A JP 5422789A JP 5422789 A JP5422789 A JP 5422789A JP H02232837 A JPH02232837 A JP H02232837A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- recording medium
- magneto
- optical recording
- protective layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000010410 layer Substances 0.000 claims abstract description 38
- 239000011241 protective layer Substances 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 24
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 18
- -1 polyethylene Polymers 0.000 claims abstract description 16
- 239000004698 Polyethylene Substances 0.000 claims abstract description 15
- 239000004642 Polyimide Substances 0.000 claims abstract description 15
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 15
- 239000010439 graphite Substances 0.000 claims abstract description 15
- 229920000573 polyethylene Polymers 0.000 claims abstract description 15
- 229920001721 polyimide Polymers 0.000 claims abstract description 15
- 239000010409 thin film Substances 0.000 claims abstract description 14
- 239000010408 film Substances 0.000 claims abstract description 13
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 10
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 9
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims abstract description 6
- 230000005415 magnetization Effects 0.000 claims abstract description 6
- 150000003624 transition metals Chemical class 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 238000002207 thermal evaporation Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 6
- 230000003647 oxidation Effects 0.000 abstract description 6
- 238000007254 oxidation reaction Methods 0.000 abstract description 6
- 230000001681 protective effect Effects 0.000 abstract description 3
- 239000002245 particle Substances 0.000 abstract description 2
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 229910000640 Fe alloy Inorganic materials 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」′
本発明は、情報の記録、読みだしを、光ビームを介して
行う光磁気記録媒体の製造方法に係わり、特に光磁気記
録媒体の寿命の改善に間する。Detailed Description of the Invention "Industrial Application Field" The present invention relates to a method for manufacturing a magneto-optical recording medium in which information is recorded and read out using a light beam, and particularly relates to a method for manufacturing a magneto-optical recording medium in which information is recorded and read out using a light beam. Take time to improve.
「発明の概要」
本発明は、希土類及び遷移金属から成る光磁気記録層と
、その保護層として、グラファイト、ポリイミド及びポ
リエチレンの混合物を含有する薄膜層とを有する光磁気
記録媒体と、その製造方法に関するものである。"Summary of the Invention" The present invention provides a magneto-optical recording medium having a magneto-optical recording layer made of a rare earth and a transition metal, and a thin film layer containing a mixture of graphite, polyimide and polyethylene as a protective layer thereof, and a method for manufacturing the same. It is related to.
前記保護層は、次の特徴をもっていること、また記録層
形成と相前後して、この保護層を形成することが極めて
容易である。The protective layer has the following characteristics, and it is extremely easy to form the protective layer before and after forming the recording layer.
１）熱膨張係数等が記録層に近い為に記録層との密着性
が優れている。1) Excellent adhesion with the recording layer because the coefficient of thermal expansion, etc. is close to that of the recording layer.
２）記録層と同等かそれ以上にち密であり、気体をほと
んど通過しない。2) It is as dense as or more dense than the recording layer, and almost no gas passes through it.
３）それ自体安定な炭化物あるいは、炭素又は窒素との
混合物を形成し耐酸化性、耐候性、 耐熱性、耐湿性
等に優れた特性を有する．
「従来の技術」
希土類及び、遷移金属からなる非晶質合金薄膜層は、光
磁気記録媒体として以下の優れた特徴を有している。3) It forms a stable carbide by itself or a mixture with carbon or nitrogen, and has excellent properties such as oxidation resistance, weather resistance, heat resistance, and moisture resistance. "Prior Art" An amorphous alloy thin film layer made of rare earths and transition metals has the following excellent characteristics as a magneto-optical recording medium.
１）非晶質故に粒界雑音が無い。1) Because it is amorphous, there is no grain boundary noise.
２）広い組成範囲で垂直磁気異方性を有する。2) It has perpendicular magnetic anisotropy over a wide composition range.
３）特に基板材料に限定されず、ガラス、シリコンウエ
ハーあるいは、アクリル等の有機材料といった安価な基
板を使う事ができる．
４）蒸着法、スパッタ法等簡便な製膜技術が適応でき、
量産性が高い。3) The substrate material is not particularly limited, and inexpensive substrates such as glass, silicon wafers, or organic materials such as acrylic can be used. 4) Simple film forming techniques such as vapor deposition and sputtering methods can be applied.
Highly mass-producible.
しかしながら、大気中で容易に酸化され易く寿命の点か
ら信頼性に欠ける短所がある。However, it has the disadvantage of being easily oxidized in the atmosphere and lacking in reliability in terms of longevity.
媒体の記録特性を損なう事なく、前記した短所を改善す
るためには、希土類遷移金属合金層の上に酸化防止を目
的とした保護層を被覆するのが、効果的であると知られ
ている．
従来技術では、かかる保護層として蒸着法または、スパ
ッタ法で成形した硅素第一酸化物あるいは、硅素第二酸
化物、ないしスビナー法で成形した有機材料が用いられ
ている．
しかしながら、かかる従来技術においては保護層の材料
しいては、物性が、記録層と大幅に異なるために次の欠
点があった．
１）保護層の厚さを、１μｍ以上にすると剥離し易い．
２）保護層がち密さに欠落し、保護屡の厚さが、１μｍ
程度では記録層の酸化を回避できない．
「発明が解決しようとする課題 」
本発明は、前記した従来技術の問題点を解決する為にな
されたものであり、記録層と保護層とを具備する光磁気
記録媒体において、記録層との密着性が良好で、充分な
ち密性を有し、かつそれ自身耐酸化性、耐熱性に優れた
保護層を有する光磁気記録媒体とその媒体を簡便に製造
する方法を提供するものである．
「課題 を解決するための手段」
本発明の光磁気記録媒体とその製造方法は、希土類、及
び遷移金属を含有する非晶質合金からなり、かつ基板面
に垂直に磁化容易軸を有する記録層となる薄膜層と、保
護層となる薄膜層とを、具備した光磁気記録媒体におい
て、前記保護層が、グラファイト、ポリイミド及びポリ
エチレンを用いた真空成膜法により形成されていること
を特徴とする．
第１項記載の保護層において、熱蒸着法を使用し、蒸発
源としてグラファイト、ポリイミド及びポリエチレンを
用いて、保護の薄膜層を形成する事を特徴とする．
第１項記載の保ｌＩＩ層において、スパッタ法を使用し
、ターゲットとしてグラファイト、ポリイミド及びポリ
エチレンを用いて、保護の薄膜層を形成する事を特徴と
する．
「 実施例」
以下、本発明について実施例に基づいて詳細に説明する
。In order to improve the above-mentioned disadvantages without impairing the recording characteristics of the medium, it is known that it is effective to coat the rare earth transition metal alloy layer with a protective layer for the purpose of preventing oxidation. ．． In the prior art, as such a protective layer, silicon first oxide or silicon second oxide formed by vapor deposition or sputtering, or an organic material formed by Sviner method is used. However, in this prior art, the physical properties of the material of the protective layer are significantly different from those of the recording layer, resulting in the following drawbacks. 1) If the thickness of the protective layer is 1 μm or more, it will easily peel off. 2) The protective layer lacks density, and the thickness of the protective layer is 1 μm.
However, oxidation of the recording layer cannot be avoided. "Problems to be Solved by the Invention" The present invention was made to solve the problems of the prior art described above, and is directed to a magneto-optical recording medium comprising a recording layer and a protective layer. The present invention provides a magneto-optical recording medium having good adhesion, sufficient density, and a protective layer that itself has excellent oxidation resistance and heat resistance, and a method for easily manufacturing the medium. "Means for Solving the Problems" The magneto-optical recording medium and the manufacturing method thereof of the present invention provide a recording layer made of an amorphous alloy containing a rare earth element and a transition metal, and having an axis of easy magnetization perpendicular to the substrate surface. A magneto-optical recording medium comprising a thin film layer serving as a protective layer and a thin film layer serving as a protective layer, characterized in that the protective layer is formed by a vacuum film forming method using graphite, polyimide, and polyethylene. ．． The protective layer according to item 1 is characterized in that the protective thin film layer is formed using a thermal evaporation method and using graphite, polyimide, and polyethylene as an evaporation source. In the protection III layer described in item 1, the protective thin film layer is formed using a sputtering method and using graphite, polyimide, and polyethylene as targets. "Examples" The present invention will be described in detail below based on Examples.
第１図は、本発明の光磁気記録媒体の製造装置である、
一実施例の構成図である。FIG. 1 shows an apparatus for manufacturing a magneto-optical recording medium of the present invention.
FIG. 2 is a configuration diagram of an embodiment.
第１図は、熱蒸着装置であり、１ は真空槽、２はガラ
ス基板、３ はグラファイト、ポリイミド及びポリエチ
レンを含む蒸着源、４ は、蒸着源を加熱するヒータ、
５ は排気系である。以上の容器ｌ 内をｌネ１０−６
Ｔｏｒｒ （ないし１．３ネ１０−４Ｐａ）以下の高温
真空中で、薄膜材料であるグラファイト、ポリイミド及
びポリエチレンを加熱して、この蒸発粒子を基板上に沈
着させて保護層である薄膜を形成する。FIG. 1 shows a thermal evaporation apparatus, in which 1 is a vacuum chamber, 2 is a glass substrate, 3 is a vapor deposition source containing graphite, polyimide, and polyethylene, 4 is a heater that heats the vapor deposition source,
5 is the exhaust system. Inside the container 10-6
Graphite, polyimide, and polyethylene, which are thin film materials, are heated in a high-temperature vacuum of less than Torr (or 1.3 to 10-4 Pa), and the evaporated particles are deposited on the substrate to form a thin film that is a protective layer. .
第２図は、上記した方法で制作した光磁気記録媒体の構
成図である。FIG. 2 is a block diagram of a magneto-optical recording medium produced by the method described above.
ｌ３ はガラス基板、１２ は膜厚１０００ Ａ
のＴｂ−Ｆｅ合金からなる記録層、１１ は膜厚ｓ
ｏｏ Ａ のグラファイト、ポリイミド及びポリエチ
レンからなる保護層である。13 is a glass substrate, 12 is a film thickness of 1000 A
A recording layer made of a Tb-Fe alloy, 11 has a film thickness s
oo A is a protective layer made of graphite, polyimide, and polyethylene.
かかる構成の光記録磁気媒体の情報の記録、読みだし用
の光ビームは基板を介して照射される。A light beam for recording and reading information on the optical recording magnetic medium having such a configuration is irradiated through the substrate.
第二図に示した光記録磁気媒体のヒステリシスルーブを
、振動試料型磁力計を用いて測定した。The hysteresis loop of the optical recording magnetic medium shown in FIG. 2 was measured using a vibrating sample magnetometer.
測定を前記媒体作成直後及び温度４０度、湿度９８％の
恒温恒湿槽中に１０時間放置した後で試みた結果、両者
で有意差は見られなかった．
比較の為にｌｏｏｏ，ＡのＴｂ−Ｆｅ記録層を形成した
単層記録媒体（例−１とする）及び、例−１と同一の、
Ｔｂ−Ｆｅ膜上にスパッタ法でシリコン酸化物膜を保護
層として被覆した２層の記録媒体（例−２とする）を制
作し前記実施例と同一の測定を行った。Measurements were carried out immediately after the medium was prepared and after it was left in a constant temperature and humidity chamber at a temperature of 40 degrees and a humidity of 98% for 10 hours, and no significant difference was found between the two. For comparison, a single-layer recording medium with a Tb-Fe recording layer of looo, A (referred to as Example-1), and the same as Example-1,
A two-layer recording medium (referred to as Example 2) in which a Tb--Fe film was coated with a silicon oxide film as a protective layer by sputtering was fabricated, and the same measurements as in the previous example were performed.
その結果媒体作製直後の測定では、例−１、例一２共前
記実施例と同一のヒステリシスルーブを示したが、恒温
恒湿槽内（４０℃、９０％）にｌθ時間放置した後の測
定では、例−１の場合、飽和磁化、保磁力共ほとんど消
失し、例−２の場合、飽和磁化は媒体作製直後の測定値
の約 ２７３、保磁力は同じ比較で約 １７２に低下し
た。As a result, in the measurement immediately after the medium was prepared, both Example 1 and Example 1 showed the same hysteresis loop as in the previous example, but the measurement after leaving the medium in a constant temperature and humidity chamber (40°C, 90%) for lθ time In the case of Example-1, both the saturation magnetization and coercive force almost disappeared, and in the case of Example-2, the saturation magnetization decreased to about 273, which was the measured value immediately after the medium was prepared, and the coercive force decreased to about 172 in the same comparison.
この比較例からも明らかなように、本発明における保護
層を使用した光磁気記録媒体の寿命は、従来のものと比
べ格段に耐腐食性が向上していることがわかる。
）第３図は、本発明による光磁気記録媒
体の他の実施例である。２４ はアクリル基板、２３
は膜厚１００Ａ以下の、グラファイト、ポリイミド
及びポリエチレンからなる第一の保護層、２２ は、
Ｔｂ−Ｆｅ合金からなる記録層、２ｌ は膜厚５００
Ａのグラファイ１・、ポリイミド及びポリエチレンか
らなる第二の保護層である。かかる構成においても第二
図の構成と同様、記録、読みだし用の光ビームの照射を
基板を介して行う。As is clear from this comparative example, the lifetime of the magneto-optical recording medium using the protective layer of the present invention is significantly improved in corrosion resistance compared to the conventional one.
) FIG. 3 shows another embodiment of the magneto-optical recording medium according to the present invention. 24 is an acrylic substrate, 23
22 is a first protective layer made of graphite, polyimide, and polyethylene and has a thickness of 100A or less;
Recording layer made of Tb-Fe alloy, 2l has a film thickness of 500 mm.
A second protective layer made of Graphite 1, polyimide, and polyethylene. In this configuration, as in the configuration shown in FIG. 2, the recording and reading light beams are irradiated through the substrate.
この場合は、第一の保護層の厚さをｘｏｏＡ以下にする
ことで、入射光ビームのほとんどを第一の保護層を透過
させ、記録層に至らしむことが可能である。In this case, by setting the thickness of the first protective layer to be equal to or less than xooA, most of the incident light beam can be transmitted through the first protective layer and reach the recording layer.
しかるに、本発明における保護層は、気体透過性を有す
るアクリル等の有機樹脂材料よりなる基板を用いた場合
にも有効で、基板を透過する大気中の酸素分子による酸
化を防止するための保護層としても使用できる。However, the protective layer in the present invention is also effective when using a substrate made of an organic resin material such as acrylic that has gas permeability. It can also be used as
尚、上記実施例には、記録層及び保護層中の希土類とし
てＴＩ）、遷移金属としてＦｅ， また保ｉ！層中の
希土類としてＴｂ， 遷移金属としてＦｅを用いた例
のみを述べたが、本発明は、Ｔｂ以外の希土類（例えば
Ｇｄ．Ｄｙ．ｌＩｏ等） Ｆｅ以外の遷移金属（例えば
Ｃｏ．Ｎｉ等）の各糾合せよりなる記録層を使用する際
にも有効であることは、明かである．
保護層の構成材料としてグラファイト、ポリイミド、ポ
リエチレンを用いた例を示したがグラファイト、ポリイ
ミド、ポリエチレン以外の高分子が、炭素の代わりに窒
素を用いた場合にも前記実施例と同様に、耐腐食性向上
の効果がみられた。In addition, in the above example, TI) was used as the rare earth in the recording layer and the protective layer, Fe was used as the transition metal, and I! Although only examples have been described in which Tb is used as the rare earth element in the layer and Fe is used as the transition metal, the present invention is also applicable to rare earth elements other than Tb (for example, Gd.Dy.lIo, etc.) and transition metals other than Fe (for example, Co.Ni, etc.). It is clear that this method is also effective when using a recording layer consisting of a combination of the following. Although we have shown an example in which graphite, polyimide, and polyethylene were used as the constituent materials of the protective layer, the same corrosion resistance can be obtained when polymers other than graphite, polyimide, and polyethylene are used in place of carbon, and nitrogen is used instead of carbon. The effect of improving sex was seen.
尚、熱蒸着装置の実施例と同じくスバッタ法を用いて保
護層を形成する方法でも、同様の成果を得ることができ
た。It should be noted that similar results could be obtained by forming the protective layer using the sputtering method as in the example using the thermal evaporation apparatus.
第１図は、本発明の光磁気記録媒体の製造方法の一実施
例の構成図。
第２図は、本発明の光磁気記録媒体の一実施例の構成図
。
第３図は、本発明の光磁気記録媒体の他の一実施例の構
成図。
ｌ・・・真空槽
２・・・基板
３・・・蒸発源
４・・・ヒータ
５・・・排気
１１・・・保護層
１２・・・記録層
１３・・・基板
２１・・・保護層
２２・・・記録層
２３・・・保護層FIG. 1 is a block diagram of an embodiment of the method for manufacturing a magneto-optical recording medium of the present invention. FIG. 2 is a configuration diagram of an embodiment of the magneto-optical recording medium of the present invention. FIG. 3 is a configuration diagram of another embodiment of the magneto-optical recording medium of the present invention. l... Vacuum chamber 2... Substrate 3... Evaporation source 4... Heater 5... Exhaust 11... Protective layer 12... Recording layer 13... Substrate 21... Protective layer 22... Recording layer 23... Protective layer
Claims (1)
つ基板面に垂直に磁化容易軸を有する記録層となる薄膜
層と、保護層となる薄膜層とを、具備した光磁気記録媒
体において、前記保護層が、真空成膜法により形成され
たグラファイト、ポリイミド及びポリエチレンからなる
ことを特徴とする光磁気記録媒体。 ２） 前記真空成膜法が熱蒸着法であることを特徴とする第１
項記載の光磁気記録媒体。 ３） 前記真空成膜法が、スパッタ法であることを特徴とする
第１項記載の光磁気記録媒体。 ４） 希土類及び遷移金属を含有する非晶質合金からなり、か
つ基盤面に垂直に磁化容易軸を有する記録層となる薄膜
層と、保護層となる薄膜層とを、具備した光記録媒体の
製造方法において、前記保護層が、グラファイト、ポリ
イミド及びポリエチレンを用いた真空成膜法により形成
されることを特徴とする光磁気記録媒体の製造方法。 ５） 前記真空成膜法が、熱蒸着法であることを特徴とする第
４項記載の光磁気記録媒体の製造方法。 ６） 前記真空成膜法が、スパッタ法であることを特徴とする
第４項記載の光磁気記録媒体の製造方法。[Scope of Claims] 1) A thin film layer that is made of an amorphous alloy containing rare earth elements and transition metals and has an axis of easy magnetization perpendicular to the substrate surface, which will serve as a recording layer, and a thin film layer that will serve as a protective layer, 1. A magneto-optical recording medium comprising: a magneto-optical recording medium, wherein the protective layer is made of graphite, polyimide, and polyethylene formed by a vacuum film-forming method. 2) A first method characterized in that the vacuum film forming method is a thermal evaporation method.
Magneto-optical recording medium as described in . 3) The magneto-optical recording medium according to item 1, wherein the vacuum film forming method is a sputtering method. 4) An optical recording medium comprising a thin film layer that is made of an amorphous alloy containing a rare earth element and a transition metal and that is a recording layer and has an axis of easy magnetization perpendicular to the substrate surface, and a thin film layer that is a protective layer. A method for manufacturing a magneto-optical recording medium, characterized in that the protective layer is formed by a vacuum film forming method using graphite, polyimide, and polyethylene. 5) The method for manufacturing a magneto-optical recording medium according to item 4, wherein the vacuum film forming method is a thermal evaporation method. 6) The method for manufacturing a magneto-optical recording medium according to item 4, wherein the vacuum film forming method is a sputtering method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5422789A JPH02232837A (en) | 1989-03-07 | 1989-03-07 | Magneto-optical recording medium and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5422789A JPH02232837A (en) | 1989-03-07 | 1989-03-07 | Magneto-optical recording medium and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02232837A true JPH02232837A (en) | 1990-09-14 |
Family
ID=12964659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5422789A Pending JPH02232837A (en) | 1989-03-07 | 1989-03-07 | Magneto-optical recording medium and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02232837A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1091115C (en) * | 1999-06-11 | 2002-09-18 | 中国科学院化学研究所 | Composite nanometer-level polyamide/graphite material and its preparation |
-
1989
- 1989-03-07 JP JP5422789A patent/JPH02232837A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1091115C (en) * | 1999-06-11 | 2002-09-18 | 中国科学院化学研究所 | Composite nanometer-level polyamide/graphite material and its preparation |
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