JPH03173959A - Magneto-optical recording medium and production thereof - Google Patents
Magneto-optical recording medium and production thereofInfo
- Publication number
- JPH03173959A JPH03173959A JP31317789A JP31317789A JPH03173959A JP H03173959 A JPH03173959 A JP H03173959A JP 31317789 A JP31317789 A JP 31317789A JP 31317789 A JP31317789 A JP 31317789A JP H03173959 A JPH03173959 A JP H03173959A
- Authority
- JP
- Japan
- Prior art keywords
- optical recording
- recording medium
- magneto
- layer
- protective layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 229920006231 aramid fiber Polymers 0.000 claims abstract description 14
- 239000004760 aramid Substances 0.000 claims abstract description 11
- 238000004544 sputter deposition Methods 0.000 claims abstract description 9
- 239000010410 layer Substances 0.000 claims description 37
- 239000011241 protective layer Substances 0.000 claims description 29
- 239000010408 film Substances 0.000 claims description 16
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 13
- 239000010409 thin film Substances 0.000 claims description 10
- 229910052723 transition metal Inorganic materials 0.000 claims description 9
- 150000003624 transition metals Chemical class 0.000 claims description 8
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 7
- 230000005415 magnetization Effects 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000002207 thermal evaporation Methods 0.000 claims description 4
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 3
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 claims 1
- 230000001681 protective effect Effects 0.000 abstract description 7
- 238000005260 corrosion Methods 0.000 abstract description 6
- 230000007797 corrosion Effects 0.000 abstract description 6
- 229910000640 Fe alloy Inorganic materials 0.000 abstract description 2
- 229920001577 copolymer Polymers 0.000 description 12
- 239000007789 gas Substances 0.000 description 9
- 125000005739 1,1,2,2-tetrafluoroethanediyl group Chemical group FC(F)([*:1])C(F)(F)[*:2] 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229920003235 aromatic polyamide Polymers 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- -1 rare earth transition metal Chemical class 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は、情報の記録、読みだしを、光ビームを介して
行う光磁気記録媒体の製造方法に係わり、特に光磁気記
録媒体の寿命の改善に関する。Detailed Description of the Invention "Field of Industrial Application" The present invention relates to a method of manufacturing a magneto-optical recording medium in which information is recorded and read out using a light beam, and particularly relates to a method of manufacturing a magneto-optical recording medium in which information is recorded and read out using a light beam. Regarding improvement.
「発明の概要」
本発明は、希土類及び遷移金属から成る光磁気記録層と
、その保護層として、アラミド繊維及びＥＴＦＥ （テ
トラフルオロエチレン共重合体［ＣＦ２ＣＦ２］ −’
−［ＣＨ２ＣＨ２］−’）を含有する薄膜層とを有する
光磁気記録媒体と、その製造方法に関するものである。"Summary of the Invention" The present invention provides a magneto-optical recording layer made of a rare earth element and a transition metal, and a protective layer for the magneto-optical recording layer made of aramid fiber and ETFE (tetrafluoroethylene copolymer [CF2CF2] -'
The present invention relates to a magneto-optical recording medium having a thin film layer containing -[CH2CH2]-') and a method for manufacturing the same.
前記保護層は、次の特徴をもっていること、また記録層
形成と相前後して、この保護層を形成することが極めて
容易である。The protective layer has the following characteristics, and it is extremely easy to form the protective layer before and after forming the recording layer.
１）熱膨張係数等の記録層に近い為に記録層との密着性
が優れている。1) Excellent adhesion with the recording layer since the coefficient of thermal expansion is close to that of the recording layer.
２）記録層と同等かそれ以上に緻密であり、気体をほと
んど通過しない。2) It is as dense as or more dense than the recording layer, and almost no gas passes through it.
３）それ自体安定な炭化物あるいは、炭素又は窒素との
混合物を形成し耐酸化性、耐候性、耐熱性、耐湿性等に
優れた特性を有する。3) It forms a stable carbide by itself or a mixture with carbon or nitrogen, and has excellent properties such as oxidation resistance, weather resistance, heat resistance, and moisture resistance.
「従来の技術」
希土類及び、遷移金属からなる非晶置台全薄膜層は、光
磁気記録媒体として以下の優れた特徴を有している。"Prior Art" An amorphous all-thin film layer made of rare earths and transition metals has the following excellent characteristics as a magneto-optical recording medium.
■）非晶負数に粒界雑音が無い。■) There is no grain boundary noise in amorphous negative numbers.
２）広い組成範囲で垂直磁気異方性を有する。2) It has perpendicular magnetic anisotropy over a wide composition range.
３）特に基板材料に限定されず、ガラス、シリコンウェ
ハーあるいは、アクリル等の有機材料といった安価な基
板を使う事ができる。3) The substrate material is not particularly limited, and inexpensive substrates such as glass, silicon wafers, or organic materials such as acrylic can be used.
４）蒸着法、スパッタ法等簡便な製膜技術が適応でき、
ｆｆｉ産性が高い。4) Simple film forming techniques such as vapor deposition and sputtering methods can be applied.
ffi productivity is high.
しかしながら、大気中で容易に酸化され易く寿命の点か
ら信頼性に欠ける短所がある。However, it has the disadvantage of being easily oxidized in the atmosphere and lacking in reliability in terms of longevity.
媒体の記録特性を損なう事なく、前記した短所を改善す
るためには、希土類遷移金属合金層の上に酸化防止を目
的とした保護層を被覆するのが、効果的であると知られ
ている。In order to improve the above-mentioned disadvantages without impairing the recording characteristics of the medium, it is known that it is effective to coat the rare earth transition metal alloy layer with a protective layer for the purpose of preventing oxidation. .
従来技術では、かかる保護層として蒸着法または、スパ
ッタ法で成形した硅素第一酸化物あるいは、硅素第二酸
化物、ないしスピナー法で成形した有機材料が用いられ
ている。In the prior art, silicon primary oxide or silicon secondary oxide molded by vapor deposition or sputtering, or an organic material molded by spinner method is used as such a protective layer in the prior art.
しかしながら、かかる従来技術においては保護層の材料
しいては、物性が、記録層と大幅に異なるために次の欠
点があった。However, in this prior art, the physical properties of the material of the protective layer are significantly different from those of the recording layer, resulting in the following drawbacks.
１）保護層の厚さを、１μｍ以上にすると剥離し易い。1) When the thickness of the protective layer is 1 μm or more, it is easy to peel off.
２）保護層が緻密さに欠落し、保護層の厚さが、１μｍ
程度では記録層の酸化を回避できない。2) The protective layer lacks density, and the thickness of the protective layer is 1 μm.
Oxidation of the recording layer cannot be avoided at this level.
「発明が解決しようとする課題」
本発明は、前記した従来技術の問題点を解決する為にな
されたものであり、その目的とするところは、記録層と
保護層とを具備する光磁気記録媒体において、記録層と
の密着性が良好で、充分な緻密性を有し、かつそれ自身
耐酸化性、耐熱性に優れた保護層を有する光磁気記録媒
体とその媒体を簡便に製造する方法を提供するものであ
る。"Problems to be Solved by the Invention" The present invention has been made to solve the problems of the prior art described above, and its purpose is to provide a magneto-optical recording device comprising a recording layer and a protective layer. A magneto-optical recording medium that has good adhesion to a recording layer, sufficient density, and a protective layer that itself has excellent oxidation resistance and heat resistance, and a method for easily manufacturing the medium. It provides:
「課題を解決するための手段」
本発明の光磁気記録媒体とその製造方法は、１）
希土類、及び遷移金属を含有する非晶質合金からなり、
かつ基板面に垂直に磁化容易軸を有する記録層となる薄
膜層と、保護層となる薄膜層とを、具備した光磁気記録
媒体において、前記保護層が、アラミド繊維及びＥＴＦ
Ｅ （テトラフルオロエチレン共重合体 −［ＣＦ２Ｃ
Ｆ２１−’−［ＣＨ２ＣＨ２］−’）を用いた真空成膜
法により形成されていることを特徴とする。"Means for Solving the Problems" The magneto-optical recording medium of the present invention and its manufacturing method are: 1) made of an amorphous alloy containing a rare earth and a transition metal;
and a magneto-optical recording medium comprising a thin film layer serving as a recording layer and having an axis of easy magnetization perpendicular to the substrate surface, and a thin film layer serving as a protective layer, wherein the protective layer is made of aramid fiber and ETF.
E (tetrafluoroethylene copolymer -[CF2C
It is characterized in that it is formed by a vacuum film forming method using F21-'-[CH2CH2]-').
２）
第１項記載の保護層において、熱蒸着法を使用し、蒸発
源としてアラミド繊維及びＥＴＦＥ（テトラフルオロエ
チレン共重合体 −［ＣＦ２ＣＦ２］−’−［ＣＨ２Ｃ
Ｈ２］−’）を用いて、保護の薄膜層を形成する事を特
徴とする特
３ ）
第１項記載の保護層において、スパッタ法を使用し、タ
ーゲットとしてアラミドｋｌａ Ｍｌ及びＥＴＦＥ（テ
トラフルオロエチレン共重合体 −［ＣＦ２ ＣＦ ２
コー’−［ＣＨ２ＣＨ２コー°〉を用いて、保温の薄膜
層を形成する事を特徴とする。2) In the protective layer described in item 1, a thermal evaporation method is used, and aramid fibers and ETFE (tetrafluoroethylene copolymer -[CF2CF2]-'-[CH2C
3) In the protective layer described in item 1, a sputtering method is used to form a protective thin film layer using aramid KLA Ml and ETFE (tetrafluoroethylene) as targets. Copolymer -[CF2 CF2
It is characterized by forming a heat-retaining thin film layer using CO'-[CH2CH2CO°].
「実施例」
以下、本発明について実施例に凰づいて詳細に説明する
。"Examples" The present invention will be described in detail below with reference to Examples.
第１図は、本発明の光磁気記録媒体の製造装置である、
一実施例の構成図である。FIG. 1 shows an apparatus for manufacturing a magneto-optical recording medium of the present invention.
FIG. 1 is a configuration diagram of an embodiment.
第１図は、スパッタ装置であり、１ 沼閉性に優れた容
器、２ はアラミド繊維及びＥＴＦＥ （テトラフルオ
ロエチレン共重合体 −［ＣＦ２ＣＦ２］［ＣＨ２ＣＨ
２コー′）を含むターゲット源拉、３ は基板、４ は
、ＲＦ定電源５．はアルゴン（Ａｒ）ガス導入系、６
も同じくアルゴン（Ａｒ）ガス導入系、７ はガス排気
系である。Figure 1 shows a sputtering device, 1 a container with excellent swamp sealing properties, 2 aramid fibers and ETFE (tetrafluoroethylene copolymer - [CF2CF2] [CH2CH
3 is the substrate, 4 is the RF constant power source 5. is an argon (Ar) gas introduction system, 6
Similarly, 7 is an argon (Ar) gas introduction system, and 7 is a gas exhaust system.
以上の容器 ｌ 内をｌネ１ｆｌ’Ｔｏｒｒ （ないし
ｌ・３ネｌｆｌ’Ｐａ）以下に真空排気した後、一定流
量のＡｒガスを５を介して導入した容器１内部のガス圧
力を２０ｍＴｏｒｒに維持した。そして、電源４を投入
しＲＦ ′ｒｉ力２００Ｗ で、基板３の上にＴｂ−Ｆ
ｅ合金よりなる記録膜を形成した。After evacuating the inside of the above container 1 to below 1fl'Torr (or 1.3ml'Pa), a constant flow of Ar gas was introduced through 5 to maintain the gas pressure inside container 1 at 20mTorr. did. Then, turn on the power supply 4 and apply 200W of RF ri power to the Tb-F on the board 3.
A recording film made of e-alloy was formed.
次に一旦主源４をオフにし、２ のアラミド繊維及びＥ
ＴＦＥ （テトラフルオロエチレン共重合体 −［Ｃ
Ｆ２０ Ｆ２コ −’−［ＣＨ２ＣＨ２］ −’）を
含むターゲット源粒をセットし、再度ＲＦ電力２００ｗ
を投入して、前記した記録膜上にスパッタ源粒であ
るアラミド繊維及びＥＴＦＥ （テトラフルオロエチレ
ン共重合体 −［ＣＦ２ＣＦ２］ −’−［ＣＨ２ＣＨ
２］−’）からなる厚さ５００人ノ保護層を形成した。Next, turn off the main source 4, and use the aramid fibers and E
TFE (tetrafluoroethylene copolymer -[C
Set the target source particle containing F20 F2co-'-[CH2CH2]-') and turn on the RF power to 200w again.
Aramid fibers and ETFE (tetrafluoroethylene copolymer -[CF2CF2] -'-[CH2CH
2]-') was formed to a thickness of 500 people.
第２図は、上記した方法で制作した光磁気記録媒体の構
成図である。FIG. 2 is a block diagram of a magneto-optical recording medium produced by the method described above.
１３ハガラス基板、１２ ハ膜ＪｒＪ、１０００Ａノ
Ｔｂ−Ｆ・：′
ｅ合金からなる記録層、１１ は膜厚５００人 のア
ラミド繊維及びＥＴＦＥ （テトラフルオロエチレン共
重合体 −［ＣＦ２ＣＦ２］ −’−［ＣＨ２０Ｈ２］
−″）からなる保護層である。13 is a glass substrate, 12 is a film JrJ, a recording layer made of 1000A-Tb-F.:' e alloy, 11 is aramid fiber with a film thickness of 500 mm and ETFE (tetrafluoroethylene copolymer -[CF2CF2] -'-[ CH20H2]
-'').
かかる構成の光記録磁気媒体の情報の記録、読みだし用
の光ビームは基板を介して照射される。A light beam for recording and reading information on the optical recording magnetic medium having such a configuration is irradiated through the substrate.
第二図に示した光記録磁気媒体のヒステリシスループを
、振動試料型磁力計を用いて１１１１定した。The hysteresis loop of the optical recording magnetic medium shown in FIG. 2 was determined using a vibrating sample magnetometer.
）１１１定を前記媒体作成直後及び温度４０°Ｃ％
？’Ａ度９８％の恒温恒温槽中に１０峙間放置した後で
試みた結果、両者で有意差は見られなかった。) 111 constant immediately after the medium was prepared and at a temperature of 40°C%.
? When tested after being left in a constant temperature bath at 98% A for 10 hours, no significant difference was found between the two.
比較の為に１０００人のＴｂ−Ｆｅ記録層を形成した単
層記録媒体（例−ｌとする）及び、例−１と同一の、Ｔ
ｂ−Ｆｅ膜上にスパッタ法でシリコン酸化物膜を保護層
として被覆した２層の記録媒体（例−２とする）を制作
し前記実施例と同一の測定を行った。For comparison, a single-layer recording medium with 1000 Tb-Fe recording layers (called Example-1) and the same Tb-Fe recording layer as Example-1 were used.
A two-layer recording medium (referred to as Example 2) in which a b-Fe film was coated with a silicon oxide film as a protective layer by sputtering was fabricated, and the same measurements as in the previous example were performed.
その結果媒体作製直後の測定では、例−１、例−２共前
記実施例と同一のヒステリシスループを示したが、恒温
恒湿槽内（４０℃、９０％）に１０時間放置した後の測
定では、例−１の場合、飽和磁化、保磁力共はとんど消
失し、例−２の場合、飽和磁化は媒体作製直後の測定値
の約 ２／３、保磁力は同じ比較で約 １／２に低下し
た。As a result, in the measurement immediately after the medium was prepared, both Examples 1 and 2 showed the same hysteresis loop as in the above example, but the measurement after leaving the medium in a constant temperature and humidity chamber (40°C, 90%) for 10 hours. So, in the case of Example-1, both the saturation magnetization and the coercive force almost disappear, and in the case of the Example-2, the saturation magnetization is about 2/3 of the value measured immediately after the medium was prepared, and the coercive force is about 1 in the same comparison. /2.
この比較例からも明らかなように、本発明における保護
層を使用した光磁気記録媒体の寿命は、従来のものと比
べ格段に耐腐食性が向上していることがわかる。As is clear from this comparative example, the lifetime of the magneto-optical recording medium using the protective layer of the present invention is significantly improved in corrosion resistance compared to the conventional one.
第３図は、本発明による光磁気記録媒体の他の実施例で
ある。２４ はアクリル基板、２３ は膜厚１００
Å以下の、アラミドＪａ Ｎ（１及びＥＴＦＥ （テト
ラフルオロエチレン共重合体 −［ＣＦ２ＣＦ２］ −
’−［ＣＨ２ＣＨ２］−０）からなる第一の保ｉｉ！層
、２２ は、Ｔｂ−Ｆｅ合金からなる記録層、２１
は膜厚５００人のアラミド）Ｍ維及びＥＴＦＥ （テ
トラフルオロエチレン共重合体 −［ＣＦ２ＣＦ２］
−’−［ＣＨ２ＣＨ２］−’）からなる第二の保ｆｆ１
ｆｆである。かかる構成においても第二図の構成と同様
、記録、読みだし用の光ビームの照射を基板を介して行
う。FIG. 3 shows another embodiment of the magneto-optical recording medium according to the present invention. 24 is an acrylic substrate, 23 is a film thickness of 100
Aramid Ja N(1 and ETFE (tetrafluoroethylene copolymer −[CF2CF2] −
'-[CH2CH2]-0) The first protection ii! Layer 22 is a recording layer 21 made of a Tb-Fe alloy.
Aramid (film thickness: 500) M fiber and ETFE (tetrafluoroethylene copolymer - [CF2CF2]
-'-[CH2CH2]-')
It is ff. In this configuration, as in the configuration shown in FIG. 2, the recording and reading light beams are irradiated through the substrate.
この場合は、第一の保護層の厚さを１００Ａ以下にする
ことで、入射光ビームのほとんどを第一の保護層を透過
させ、記録層に至らしむことが可能である。In this case, by setting the thickness of the first protective layer to 100A or less, most of the incident light beam can be transmitted through the first protective layer and reach the recording layer.
しかるに、本発明における保護層は、気体透過性を有す
るアクリル等の有機樹脂材料よりなる基板を用いた場合
にも有効で、基板を透過する大気中の酸素分子による酸
化を防止するための保護層としても使用できる。However, the protective layer in the present invention is also effective when using a substrate made of an organic resin material such as acrylic that has gas permeability. It can also be used as
尚、上記実施例には、記録層及び保ＩＩ層中の粘土類と
して乃、遷移金属としてＦｅ、また保１ＩＦＸＩ中の希
土類として乳、遷移金属としてＦｅを用いた例のみを述
べたが、本発明は、Ｔｂ以外の希土類（例えばＧｄ、Ｄ
ｙ、Ｈｏ等） Ｆｅ以外の遷移金属（例えばＧｏ、Ｎｉ
等）の各組合せよりなる記録層を使用する際にも有効で
あることは、明かである。In the above examples, only examples were described in which Fe was used as the clay and the transition metal in the recording layer and the storage layer II, and milk was used as the rare earth element and Fe was used as the transition metal in the storage layer IFXI. The invention is based on rare earth elements other than Tb (e.g. Gd, D
y, Ho, etc.) Transition metals other than Fe (e.g. Go, Ni
It is clear that it is also effective when using a recording layer consisting of a combination of the following.
保Ｗｉｍの構成材料としてアラミド繊維及びＥＴＦＥ（
テトラフルオロエチレン共重合体 −［ＣＦ２ＣＦ”コ
ー”−［ＣＨ２ＣＨ”ｌ−’）を用いた例を示したがア
ラミド繊維及びＥＴＦＥ （テトラフルオロエチレン共
重合体 −［ＣＦ’ＣＦ”］ −’−［ＣＨ２ＣＨ２］
−”）以外の高分子を用いる事も可能である。 又、
保護層中の安定化元素として炭素を用いたが、炭素の代
わりに窒素を用いた場合にも前記実施例と同様に、耐腐
食性向上の効果がみられた。 尚、スパッタ法の実施
例と同じく熱蒸着装置を用いて保護層を形成する方法で
も、同様の成果を得ることができた。Aramid fiber and ETFE (
Although an example using tetrafluoroethylene copolymer -[CF2CF"co"-[CH2CH"l-'] was shown, aramid fiber and ETFE (tetrafluoroethylene copolymer -[CF'CF"] -'-[ CH2CH2]
It is also possible to use polymers other than
Although carbon was used as a stabilizing element in the protective layer, the effect of improving corrosion resistance was also observed when nitrogen was used instead of carbon, as in the above example. It should be noted that similar results could be obtained by forming the protective layer using a thermal evaporation device as in the sputtering example.
「発明の効果」
以上述べたように、本発明は耐熱性、耐腐食性高分子物
質を保護膜材料とし、容易に耐熱性、耐腐食性に優れた
特性をもつ光磁気記録媒体の保護膜を生成することを可
ｒｉ士にした。"Effects of the Invention" As described above, the present invention uses a heat-resistant and corrosion-resistant polymeric substance as a protective film material, and can easily form a protective film for a magneto-optical recording medium that has excellent properties of heat resistance and corrosion resistance. It is now possible to generate .
第１図は、本発明の光磁気記録媒体の製造方法の一実施
例の構成図。
第２図は、本発明の光磁気記録媒体の一実施例の１１４
戒図。
第３図は、本発明の光磁気記録媒体の他の一実施例の構
成図。
１・・・密閉容器
２・・・ターゲット
３・・・基板
４・・・電源
５・・・ガス導入系
６・・・ガス導入系
７・・・排気系
１１・・・保護層
１２・・・記録層
１３・・・基板
１４・・・レーザ光
２１・・・第二の保護層
２２・・・記録層
２３・・・第一の保護層
２４・・・基板
２５・・・レーザ光
以上。FIG. 1 is a block diagram of an embodiment of the method for manufacturing a magneto-optical recording medium of the present invention. FIG. 2 shows 114 of an embodiment of the magneto-optical recording medium of the present invention.
Precept map. FIG. 3 is a configuration diagram of another embodiment of the magneto-optical recording medium of the present invention. 1... Sealed container 2... Target 3... Substrate 4... Power supply 5... Gas introduction system 6... Gas introduction system 7... Exhaust system 11... Protective layer 12...・Recording layer 13...Substrate 14...Laser light 21...Second protective layer 22...Recording layer 23...First protective layer 24...Substrate 25...Laser light or more .
Claims (1)
つ基板面に垂直に磁化容易軸を有する記録層となる薄膜
層と、保護層となる薄膜層とを、具備した光磁気記録媒
体において、前記保護層が、真空成膜法により形成され
たアラミド繊維及びＥＴＦＥ（テトラフルオロエチレン
共重合体−［ＣＦ＾２ＣＦ＾２］−＾ｎ−［ＣＨ＾２Ｃ
Ｈ＾２］−＾ｎ）からなることを特徴とする光磁気記録
媒体。 ２） 前記真空成膜法が熱蒸着法であることを特徴とする請求
項１記載の光磁気記録媒体。 ３） 前記真空成膜法が、スパッタ法であることを特徴とする
請求項１記載の光磁気記録媒体。 ４） 希土類及び遷移金属を含有する非晶質合金からなり、か
つ基盤面に垂直に磁化容易軸を有する記録層となる薄膜
層と、保護層となる薄膜層とを、具備した光記録媒体の
製造方法において、前記保護層が、アラミド繊維及びＥ
ＴＦＥ（テトラフルオロエチレン共重合体−［ＣＦ＾２
ＣＦ＾２］−＾ｎ−［ＣＨ＾２ＣＨ＾２］−＾ｎ）を用
いた真空成膜法により形成されることを特徴とする光記
録媒体の製造方法。 ５） 前記真空成膜法が、熱蒸着法であることを特徴とする請
求項４記載の光磁気記録媒体の製造方法。 ６） 前記真空成膜法が、スパッタ法であることを特徴とする
請求項４記載の光磁気記録媒体の製造方法。[Scope of Claims] 1) A thin film layer that is made of an amorphous alloy containing rare earth elements and transition metals and has an axis of easy magnetization perpendicular to the substrate surface, which will serve as a recording layer, and a thin film layer that will serve as a protective layer, In the magneto-optical recording medium, the protective layer comprises aramid fibers and ETFE (tetrafluoroethylene copolymer-[CF^2CF^2]-^n-[CH^2C) formed by a vacuum film-forming method.
H^2]-^n). 2) The magneto-optical recording medium according to claim 1, wherein the vacuum film forming method is a thermal evaporation method. 3) The magneto-optical recording medium according to claim 1, wherein the vacuum film forming method is a sputtering method. 4) An optical recording medium comprising a thin film layer that is made of an amorphous alloy containing a rare earth element and a transition metal and that is a recording layer and has an axis of easy magnetization perpendicular to the substrate surface, and a thin film layer that is a protective layer. In the manufacturing method, the protective layer comprises aramid fiber and E
TFE (tetrafluoroethylene copolymer-[CF^2
CF^2]-^n-[CH^2CH^2]-^n) A method for manufacturing an optical recording medium, characterized in that it is formed by a vacuum film forming method using CF^2]-^n-[CH^2CH^2]-^n). 5) The method for manufacturing a magneto-optical recording medium according to claim 4, wherein the vacuum film forming method is a thermal evaporation method. 6) The method for manufacturing a magneto-optical recording medium according to claim 4, wherein the vacuum film forming method is a sputtering method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31317789A JPH03173959A (en) | 1989-12-01 | 1989-12-01 | Magneto-optical recording medium and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31317789A JPH03173959A (en) | 1989-12-01 | 1989-12-01 | Magneto-optical recording medium and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03173959A true JPH03173959A (en) | 1991-07-29 |
Family
ID=18038033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31317789A Pending JPH03173959A (en) | 1989-12-01 | 1989-12-01 | Magneto-optical recording medium and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03173959A (en) |
-
1989
- 1989-12-01 JP JP31317789A patent/JPH03173959A/en active Pending
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