JPH0222836Y2 - - Google Patents

Info

Publication number
JPH0222836Y2
JPH0222836Y2 JP1983151413U JP15141383U JPH0222836Y2 JP H0222836 Y2 JPH0222836 Y2 JP H0222836Y2 JP 1983151413 U JP1983151413 U JP 1983151413U JP 15141383 U JP15141383 U JP 15141383U JP H0222836 Y2 JPH0222836 Y2 JP H0222836Y2
Authority
JP
Japan
Prior art keywords
disk
clamp arm
shaft
screw shaft
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983151413U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6060042U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15141383U priority Critical patent/JPS6060042U/ja
Publication of JPS6060042U publication Critical patent/JPS6060042U/ja
Application granted granted Critical
Publication of JPH0222836Y2 publication Critical patent/JPH0222836Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
JP15141383U 1983-09-30 1983-09-30 デイスククランプ装置 Granted JPS6060042U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15141383U JPS6060042U (ja) 1983-09-30 1983-09-30 デイスククランプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15141383U JPS6060042U (ja) 1983-09-30 1983-09-30 デイスククランプ装置

Publications (2)

Publication Number Publication Date
JPS6060042U JPS6060042U (ja) 1985-04-26
JPH0222836Y2 true JPH0222836Y2 (en:Method) 1990-06-20

Family

ID=30335536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15141383U Granted JPS6060042U (ja) 1983-09-30 1983-09-30 デイスククランプ装置

Country Status (1)

Country Link
JP (1) JPS6060042U (en:Method)

Cited By (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7304488B2 (en) 2002-05-23 2007-12-04 Cascade Microtech, Inc. Shielded probe for high-frequency testing of a device under test
US7321233B2 (en) 1995-04-14 2008-01-22 Cascade Microtech, Inc. System for evaluating probing networks
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
US7348787B2 (en) 1992-06-11 2008-03-25 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US7352168B2 (en) 2000-09-05 2008-04-01 Cascade Microtech, Inc. Chuck for holding a device under test
US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
US7362115B2 (en) 2003-12-24 2008-04-22 Cascade Microtech, Inc. Chuck with integrated wafer support
US7368925B2 (en) 2002-01-25 2008-05-06 Cascade Microtech, Inc. Probe station with two platens
US7403025B2 (en) 2000-02-25 2008-07-22 Cascade Microtech, Inc. Membrane probing system
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7417446B2 (en) 2002-11-13 2008-08-26 Cascade Microtech, Inc. Probe for combined signals
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7436170B2 (en) 1997-06-06 2008-10-14 Cascade Microtech, Inc. Probe station having multiple enclosures
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
US7456646B2 (en) 2000-12-04 2008-11-25 Cascade Microtech, Inc. Wafer probe
US7468609B2 (en) 2003-05-06 2008-12-23 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7492147B2 (en) 1992-06-11 2009-02-17 Cascade Microtech, Inc. Wafer probe station having a skirting component
US7498829B2 (en) 2003-05-23 2009-03-03 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7498828B2 (en) 2002-11-25 2009-03-03 Cascade Microtech, Inc. Probe station with low inductance path
US7504823B2 (en) 2004-06-07 2009-03-17 Cascade Microtech, Inc. Thermal optical chuck
US7504842B2 (en) 1997-05-28 2009-03-17 Cascade Microtech, Inc. Probe holder for testing of a test device
US7514944B2 (en) 2004-07-07 2009-04-07 Cascade Microtech, Inc. Probe head having a membrane suspended probe
US7533462B2 (en) 1999-06-04 2009-05-19 Cascade Microtech, Inc. Method of constructing a membrane probe
US7541821B2 (en) 1996-08-08 2009-06-02 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US7550984B2 (en) 2002-11-08 2009-06-23 Cascade Microtech, Inc. Probe station with low noise characteristics
US7554322B2 (en) 2000-09-05 2009-06-30 Cascade Microtech, Inc. Probe station
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7616017B2 (en) 1999-06-30 2009-11-10 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US7619419B2 (en) 2005-06-13 2009-11-17 Cascade Microtech, Inc. Wideband active-passive differential signal probe
US7639003B2 (en) 2002-12-13 2009-12-29 Cascade Microtech, Inc. Guarded tub enclosure
US9429638B2 (en) 2008-11-21 2016-08-30 Cascade Microtech, Inc. Method of replacing an existing contact of a wafer probing assembly

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031802A (en:Method) * 1973-07-20 1975-03-28

Cited By (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7348787B2 (en) 1992-06-11 2008-03-25 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US7492147B2 (en) 1992-06-11 2009-02-17 Cascade Microtech, Inc. Wafer probe station having a skirting component
US7595632B2 (en) 1992-06-11 2009-09-29 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US7589518B2 (en) 1992-06-11 2009-09-15 Cascade Microtech, Inc. Wafer probe station having a skirting component
US7321233B2 (en) 1995-04-14 2008-01-22 Cascade Microtech, Inc. System for evaluating probing networks
US7541821B2 (en) 1996-08-08 2009-06-02 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US7504842B2 (en) 1997-05-28 2009-03-17 Cascade Microtech, Inc. Probe holder for testing of a test device
US7436170B2 (en) 1997-06-06 2008-10-14 Cascade Microtech, Inc. Probe station having multiple enclosures
US7626379B2 (en) 1997-06-06 2009-12-01 Cascade Microtech, Inc. Probe station having multiple enclosures
US7533462B2 (en) 1999-06-04 2009-05-19 Cascade Microtech, Inc. Method of constructing a membrane probe
US7616017B2 (en) 1999-06-30 2009-11-10 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US7403025B2 (en) 2000-02-25 2008-07-22 Cascade Microtech, Inc. Membrane probing system
US7352168B2 (en) 2000-09-05 2008-04-01 Cascade Microtech, Inc. Chuck for holding a device under test
US7518358B2 (en) 2000-09-05 2009-04-14 Cascade Microtech, Inc. Chuck for holding a device under test
US7423419B2 (en) 2000-09-05 2008-09-09 Cascade Microtech, Inc. Chuck for holding a device under test
US7514915B2 (en) 2000-09-05 2009-04-07 Cascade Microtech, Inc. Chuck for holding a device under test
US7554322B2 (en) 2000-09-05 2009-06-30 Cascade Microtech, Inc. Probe station
US7501810B2 (en) 2000-09-05 2009-03-10 Cascade Microtech, Inc. Chuck for holding a device under test
US7495461B2 (en) 2000-12-04 2009-02-24 Cascade Microtech, Inc. Wafer probe
US7456646B2 (en) 2000-12-04 2008-11-25 Cascade Microtech, Inc. Wafer probe
US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
US7492175B2 (en) 2001-08-21 2009-02-17 Cascade Microtech, Inc. Membrane probing system
US7368925B2 (en) 2002-01-25 2008-05-06 Cascade Microtech, Inc. Probe station with two platens
US7482823B2 (en) 2002-05-23 2009-01-27 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7489149B2 (en) 2002-05-23 2009-02-10 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7436194B2 (en) 2002-05-23 2008-10-14 Cascade Microtech, Inc. Shielded probe with low contact resistance for testing a device under test
US7304488B2 (en) 2002-05-23 2007-12-04 Cascade Microtech, Inc. Shielded probe for high-frequency testing of a device under test
US7518387B2 (en) 2002-05-23 2009-04-14 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7550984B2 (en) 2002-11-08 2009-06-23 Cascade Microtech, Inc. Probe station with low noise characteristics
US7453276B2 (en) 2002-11-13 2008-11-18 Cascade Microtech, Inc. Probe for combined signals
US7417446B2 (en) 2002-11-13 2008-08-26 Cascade Microtech, Inc. Probe for combined signals
US7498828B2 (en) 2002-11-25 2009-03-03 Cascade Microtech, Inc. Probe station with low inductance path
US7639003B2 (en) 2002-12-13 2009-12-29 Cascade Microtech, Inc. Guarded tub enclosure
US7468609B2 (en) 2003-05-06 2008-12-23 Cascade Microtech, Inc. Switched suspended conductor and connection
US7498829B2 (en) 2003-05-23 2009-03-03 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7876115B2 (en) 2003-05-23 2011-01-25 Cascade Microtech, Inc. Chuck for holding a device under test
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7501842B2 (en) 2003-05-23 2009-03-10 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7362115B2 (en) 2003-12-24 2008-04-22 Cascade Microtech, Inc. Chuck with integrated wafer support
US7504823B2 (en) 2004-06-07 2009-03-17 Cascade Microtech, Inc. Thermal optical chuck
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
US7514944B2 (en) 2004-07-07 2009-04-07 Cascade Microtech, Inc. Probe head having a membrane suspended probe
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US8013623B2 (en) 2004-09-13 2011-09-06 Cascade Microtech, Inc. Double sided probing structures
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
US7619419B2 (en) 2005-06-13 2009-11-17 Cascade Microtech, Inc. Wideband active-passive differential signal probe
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US9429638B2 (en) 2008-11-21 2016-08-30 Cascade Microtech, Inc. Method of replacing an existing contact of a wafer probing assembly

Also Published As

Publication number Publication date
JPS6060042U (ja) 1985-04-26

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