JPH0222530B2 - - Google Patents
Info
- Publication number
- JPH0222530B2 JPH0222530B2 JP61034224A JP3422486A JPH0222530B2 JP H0222530 B2 JPH0222530 B2 JP H0222530B2 JP 61034224 A JP61034224 A JP 61034224A JP 3422486 A JP3422486 A JP 3422486A JP H0222530 B2 JPH0222530 B2 JP H0222530B2
- Authority
- JP
- Japan
- Prior art keywords
- manual alignment
- pattern
- mark
- pair
- key
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 25
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61034224A JPS62193121A (ja) | 1986-02-19 | 1986-02-19 | パタ−ン位置合わせ方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61034224A JPS62193121A (ja) | 1986-02-19 | 1986-02-19 | パタ−ン位置合わせ方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62193121A JPS62193121A (ja) | 1987-08-25 |
JPH0222530B2 true JPH0222530B2 (de) | 1990-05-18 |
Family
ID=12408174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61034224A Granted JPS62193121A (ja) | 1986-02-19 | 1986-02-19 | パタ−ン位置合わせ方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62193121A (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005123279A (ja) * | 2003-10-15 | 2005-05-12 | Mitsumi Electric Co Ltd | 半導体装置の製造方法 |
-
1986
- 1986-02-19 JP JP61034224A patent/JPS62193121A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62193121A (ja) | 1987-08-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |