JPH0222196A - 液相の結晶成長方法および装置 - Google Patents

液相の結晶成長方法および装置

Info

Publication number
JPH0222196A
JPH0222196A JP33311087A JP33311087A JPH0222196A JP H0222196 A JPH0222196 A JP H0222196A JP 33311087 A JP33311087 A JP 33311087A JP 33311087 A JP33311087 A JP 33311087A JP H0222196 A JPH0222196 A JP H0222196A
Authority
JP
Japan
Prior art keywords
substrate
melt
slider
temperature
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33311087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0566916B2 (enrdf_load_stackoverflow
Inventor
Hideo Kusuzawa
楠澤　英夫
Kiyotaka Benzaki
辨崎　清隆
Masaaki Sakata
雅昭 坂田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
Original Assignee
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP33311087A priority Critical patent/JPH0222196A/ja
Publication of JPH0222196A publication Critical patent/JPH0222196A/ja
Publication of JPH0566916B2 publication Critical patent/JPH0566916B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP33311087A 1987-12-29 1987-12-29 液相の結晶成長方法および装置 Granted JPH0222196A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33311087A JPH0222196A (ja) 1987-12-29 1987-12-29 液相の結晶成長方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33311087A JPH0222196A (ja) 1987-12-29 1987-12-29 液相の結晶成長方法および装置

Publications (2)

Publication Number Publication Date
JPH0222196A true JPH0222196A (ja) 1990-01-25
JPH0566916B2 JPH0566916B2 (enrdf_load_stackoverflow) 1993-09-22

Family

ID=18262394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33311087A Granted JPH0222196A (ja) 1987-12-29 1987-12-29 液相の結晶成長方法および装置

Country Status (1)

Country Link
JP (1) JPH0222196A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0566916B2 (enrdf_load_stackoverflow) 1993-09-22

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