JPH0222022Y2 - - Google Patents

Info

Publication number
JPH0222022Y2
JPH0222022Y2 JP2944984U JP2944984U JPH0222022Y2 JP H0222022 Y2 JPH0222022 Y2 JP H0222022Y2 JP 2944984 U JP2944984 U JP 2944984U JP 2944984 U JP2944984 U JP 2944984U JP H0222022 Y2 JPH0222022 Y2 JP H0222022Y2
Authority
JP
Japan
Prior art keywords
liquid
treatment
tower
waste gas
treatment tower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2944984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60140633U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2944984U priority Critical patent/JPS60140633U/ja
Publication of JPS60140633U publication Critical patent/JPS60140633U/ja
Application granted granted Critical
Publication of JPH0222022Y2 publication Critical patent/JPH0222022Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP2944984U 1984-02-29 1984-02-29 廃ガス処理装置 Granted JPS60140633U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2944984U JPS60140633U (ja) 1984-02-29 1984-02-29 廃ガス処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2944984U JPS60140633U (ja) 1984-02-29 1984-02-29 廃ガス処理装置

Publications (2)

Publication Number Publication Date
JPS60140633U JPS60140633U (ja) 1985-09-18
JPH0222022Y2 true JPH0222022Y2 (enrdf_load_stackoverflow) 1990-06-13

Family

ID=30528264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2944984U Granted JPS60140633U (ja) 1984-02-29 1984-02-29 廃ガス処理装置

Country Status (1)

Country Link
JP (1) JPS60140633U (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11156139A (ja) * 1997-11-21 1999-06-15 Toshiba Corp 外気処理装置及び外気清浄化システム
JP5964740B2 (ja) * 2012-12-21 2016-08-03 株式会社荏原製作所 研磨装置
JP5896929B2 (ja) * 2013-01-22 2016-03-30 信越化学工業株式会社 クロロシラン類の廃ガス処理システムおよび廃ガス処理方法

Also Published As

Publication number Publication date
JPS60140633U (ja) 1985-09-18

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