JPH02217395A - 結晶質窒化珪素塊状体 - Google Patents

結晶質窒化珪素塊状体

Info

Publication number
JPH02217395A
JPH02217395A JP24887089A JP24887089A JPH02217395A JP H02217395 A JPH02217395 A JP H02217395A JP 24887089 A JP24887089 A JP 24887089A JP 24887089 A JP24887089 A JP 24887089A JP H02217395 A JPH02217395 A JP H02217395A
Authority
JP
Japan
Prior art keywords
massive body
beta
crystal
temperature
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24887089A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357075B2 (enrdf_load_stackoverflow
Inventor
Toshio Hirai
平井　敏雄
Shinsuke Hayashi
林　真輔
Akira Okubo
昭 大久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP55121690A external-priority patent/JPS5747706A/ja
Application filed by Individual filed Critical Individual
Priority to JP24887089A priority Critical patent/JPH02217395A/ja
Publication of JPH02217395A publication Critical patent/JPH02217395A/ja
Publication of JPH0357075B2 publication Critical patent/JPH0357075B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP24887089A 1980-09-04 1989-09-25 結晶質窒化珪素塊状体 Granted JPH02217395A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24887089A JPH02217395A (ja) 1980-09-04 1989-09-25 結晶質窒化珪素塊状体

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP55121690A JPS5747706A (en) 1980-09-04 1980-09-04 Lump of silicon nitride containing ti and its manufacture
JP24887089A JPH02217395A (ja) 1980-09-04 1989-09-25 結晶質窒化珪素塊状体

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55121690A Division JPS5747706A (en) 1980-09-04 1980-09-04 Lump of silicon nitride containing ti and its manufacture

Publications (2)

Publication Number Publication Date
JPH02217395A true JPH02217395A (ja) 1990-08-30
JPH0357075B2 JPH0357075B2 (enrdf_load_stackoverflow) 1991-08-30

Family

ID=26458984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24887089A Granted JPH02217395A (ja) 1980-09-04 1989-09-25 結晶質窒化珪素塊状体

Country Status (1)

Country Link
JP (1) JPH02217395A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0357075B2 (enrdf_load_stackoverflow) 1991-08-30

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