JPH02217395A - 結晶質窒化珪素塊状体 - Google Patents

結晶質窒化珪素塊状体

Info

Publication number
JPH02217395A
JPH02217395A JP24887089A JP24887089A JPH02217395A JP H02217395 A JPH02217395 A JP H02217395A JP 24887089 A JP24887089 A JP 24887089A JP 24887089 A JP24887089 A JP 24887089A JP H02217395 A JPH02217395 A JP H02217395A
Authority
JP
Japan
Prior art keywords
massive body
beta
crystal
temperature
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24887089A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357075B2 (cs
Inventor
Toshio Hirai
平井　敏雄
Shinsuke Hayashi
林　真輔
Akira Okubo
昭 大久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP55121690A external-priority patent/JPS5747706A/ja
Application filed by Individual filed Critical Individual
Priority to JP24887089A priority Critical patent/JPH02217395A/ja
Publication of JPH02217395A publication Critical patent/JPH02217395A/ja
Publication of JPH0357075B2 publication Critical patent/JPH0357075B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP24887089A 1980-09-04 1989-09-25 結晶質窒化珪素塊状体 Granted JPH02217395A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24887089A JPH02217395A (ja) 1980-09-04 1989-09-25 結晶質窒化珪素塊状体

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP55121690A JPS5747706A (en) 1980-09-04 1980-09-04 Lump of silicon nitride containing ti and its manufacture
JP24887089A JPH02217395A (ja) 1980-09-04 1989-09-25 結晶質窒化珪素塊状体

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55121690A Division JPS5747706A (en) 1980-09-04 1980-09-04 Lump of silicon nitride containing ti and its manufacture

Publications (2)

Publication Number Publication Date
JPH02217395A true JPH02217395A (ja) 1990-08-30
JPH0357075B2 JPH0357075B2 (cs) 1991-08-30

Family

ID=26458984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24887089A Granted JPH02217395A (ja) 1980-09-04 1989-09-25 結晶質窒化珪素塊状体

Country Status (1)

Country Link
JP (1) JPH02217395A (cs)

Also Published As

Publication number Publication date
JPH0357075B2 (cs) 1991-08-30

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