JPH0221650B2 - - Google Patents

Info

Publication number
JPH0221650B2
JPH0221650B2 JP59021896A JP2189684A JPH0221650B2 JP H0221650 B2 JPH0221650 B2 JP H0221650B2 JP 59021896 A JP59021896 A JP 59021896A JP 2189684 A JP2189684 A JP 2189684A JP H0221650 B2 JPH0221650 B2 JP H0221650B2
Authority
JP
Japan
Prior art keywords
signal
laser beam
image sensor
mark
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59021896A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60166952A (ja
Inventor
Naoki Ayada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59021896A priority Critical patent/JPS60166952A/ja
Priority to US06/606,537 priority patent/US4634876A/en
Priority to DE3417580A priority patent/DE3417580C2/de
Priority to GB08412310A priority patent/GB2141538B/en
Publication of JPS60166952A publication Critical patent/JPS60166952A/ja
Publication of JPH0221650B2 publication Critical patent/JPH0221650B2/ja
Priority to HK717/91A priority patent/HK71791A/xx
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59021896A 1983-05-13 1984-02-10 位置検出装置 Granted JPS60166952A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP59021896A JPS60166952A (ja) 1984-02-10 1984-02-10 位置検出装置
US06/606,537 US4634876A (en) 1983-05-13 1984-05-03 Object position detecting apparatus using accumulation type sensor
DE3417580A DE3417580C2 (de) 1983-05-13 1984-05-11 Einrichtung zum Ermitteln der Position eines Objekts
GB08412310A GB2141538B (en) 1983-05-13 1984-05-14 Detecting position/alignment
HK717/91A HK71791A (en) 1983-05-13 1991-09-05 An object position detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59021896A JPS60166952A (ja) 1984-02-10 1984-02-10 位置検出装置

Publications (2)

Publication Number Publication Date
JPS60166952A JPS60166952A (ja) 1985-08-30
JPH0221650B2 true JPH0221650B2 (enExample) 1990-05-15

Family

ID=12067871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59021896A Granted JPS60166952A (ja) 1983-05-13 1984-02-10 位置検出装置

Country Status (1)

Country Link
JP (1) JPS60166952A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH052153U (ja) * 1991-06-19 1993-01-14 株式会社エヌ・エム・ビーセミコンダクター ペリクル膜付きレチクル

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100682955B1 (ko) 2006-01-06 2007-02-15 삼성전자주식회사 스캐너의 구동특성 평가장치 및 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH052153U (ja) * 1991-06-19 1993-01-14 株式会社エヌ・エム・ビーセミコンダクター ペリクル膜付きレチクル

Also Published As

Publication number Publication date
JPS60166952A (ja) 1985-08-30

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