JPH02209798A - Forming of through hole in thick film circuit substrate - Google Patents
Forming of through hole in thick film circuit substrateInfo
- Publication number
- JPH02209798A JPH02209798A JP3056689A JP3056689A JPH02209798A JP H02209798 A JPH02209798 A JP H02209798A JP 3056689 A JP3056689 A JP 3056689A JP 3056689 A JP3056689 A JP 3056689A JP H02209798 A JPH02209798 A JP H02209798A
- Authority
- JP
- Japan
- Prior art keywords
- hole
- holes
- paste
- ceramic substrate
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 35
- 239000000919 ceramic Substances 0.000 claims abstract description 32
- 238000007639 printing Methods 0.000 claims abstract description 25
- 239000010949 copper Substances 0.000 claims abstract description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052802 copper Inorganic materials 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 20
- 239000004020 conductor Substances 0.000 abstract description 38
- 238000001035 drying Methods 0.000 abstract description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 2
- 238000004080 punching Methods 0.000 description 16
- 238000012545 processing Methods 0.000 description 8
- 238000007796 conventional method Methods 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 241000849798 Nita Species 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、電子回路基板の製造に関し、詩に厚膜回路基
板のスルーホール形成方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to the manufacture of electronic circuit boards, and more particularly to a method for forming through holes in thick film circuit boards.
従来の技術
両面に導体ベースを用いて形成された導体を持つ厚膜回
路基板のスルーホールを形成する従来技術においては、
導体ペーストを、予め孔加工されたセラミンク基板の両
側から印刷形成すると同時に孔の中央部で重なるように
吸引しながら印刷形成を行なっていた。その時用いられ
るセラミック基板の孔加工には、fil予め焼結された
セラミック基板に炭酸ガスレーザー等を用いてレーザー
加工する方法、(2)セラミックのグリーンシートの状
態で金型を用いて孔を打ち抜き、その後焼結させて孔あ
りセラミック基板を得る方法がある。(1)のし−ザー
加工のセラミック基板は、実験室レベルの少量生産向き
であり、(2)の金型加工のセラミック基板は、大量生
産向きである。Conventional Technique In the conventional technique of forming through-holes in a thick film circuit board with conductors formed on both sides using conductor bases,
The conductive paste was printed from both sides of a ceramic substrate with holes previously formed, and at the same time, the printing was performed while suctioning the paste so that it overlapped with the center of the hole. The holes in the ceramic substrate used at that time include laser processing using a carbon dioxide laser or the like on a ceramic substrate that has been sintered in advance; (2) punching holes in a ceramic green sheet using a mold; , and then sintering to obtain a ceramic substrate with holes. (1) Ceramic substrate processed by laser processing is suitable for small-scale production at the laboratory level, and ceramic substrate processed by molding (2) is suitable for mass production.
一方、第3図(al、 (b)に示すごとくレーザー加
工の孔71と金型加工の孔72とはその製造の違いから
形状が異なることは従来より広く知られるところである
。第3図f8+はレーザー加工のセラミック基板1の孔
7Iの断面図であり、セラミック基板1の上側より炭酸
ガスレーザーによりレーザー照射8がおこなわれ孔71
が形成される。この時レーザー加工された孔71はレー
ザーが照射される入り側がかならず広くなりレーザー加
工側コーナ一部9はレーザーによる基板の溶融によりか
ならず丸くなる特徴を持つ。On the other hand, as shown in FIGS. 3(al) and 3(b), it has been widely known that the laser-processed hole 71 and the mold-processed hole 72 have different shapes due to differences in their manufacturing. is a cross-sectional view of a hole 7I of a laser-processed ceramic substrate 1, in which laser irradiation 8 is performed from the upper side of the ceramic substrate 1 with a carbon dioxide laser to form a hole 71.
is formed. At this time, the laser-processed hole 71 has the characteristic that the entrance side where the laser is irradiated is always wide, and the corner part 9 on the laser-processed side is always rounded due to the melting of the substrate by the laser.
一方、第3図(1))は、グリーンシート成形による金
型をもちいた孔加工の断面図であり、グリ−シート14
は打ち抜き下金型12の上に置かれ、打ち抜き上金型パ
ンチIOにより孔72が打ち抜かれる。このとき打ち抜
き上金型バンチ10はその加工上と補強のためパンチン
グコーナ一部11を有する。このパンチングコーナ一部
11のため、打ち抜き後グリーンシーH4に打ち抜き側
コーナ一部15が丸みをおびた形で形成され、焼結後も
そのコーナ一部は残る。このため、このコーナ一部を見
ることにより基板の表裏を判別することも可能である。On the other hand, FIG. 3 (1)) is a cross-sectional view of hole processing using a mold for green sheet molding, and shows the green sheet 14.
is placed on the lower punching die 12, and the hole 72 is punched out by the upper punching die punch IO. At this time, the punching upper die bunch 10 has a punching corner portion 11 for processing and reinforcement purposes. Because of this punching corner portion 11, a punching side corner portion 15 is formed in the green sea H4 in a rounded shape after punching, and this corner portion remains even after sintering. Therefore, it is also possible to determine whether the board is front or back by looking at a part of this corner.
第2図は、従来の印刷方法を用いて形成されたセラミッ
ク回路基板の断面図である。セラミック基板1には、レ
ーザー加工あるいは金型で打ち抜かれた孔7が形成され
でいる。まずスクリーン印刷法を用いて第1番目印刷導
体2を形成すると同時に、第1番目印刷導体形成面と反
対側から吸上することにより孔内壁途中まで導体ペース
トを挿入したのち乾燥機により乾燥する。この後焼成す
る方法もとられる。次にセラミック基板1を反転し第2
番目印刷導体3を印刷形成すると同時に、第2番目印刷
導体形成面と反対側から吸引することにより孔内壁途中
まで導体ペーストを挿入し、前第1番目印刷導体形成面
と導体型なり部4を形成し両面の導体回路を導通させる
。この後乾燥、焼成をおこない両面の導体回路形成とス
ルーホールを導通させる。これにより厚膜回路基板のス
ルーホール形成をおこなっている。FIG. 2 is a cross-sectional view of a ceramic circuit board formed using conventional printing methods. A hole 7 is formed in the ceramic substrate 1 by laser processing or punching with a die. First, a first printed conductor 2 is formed using a screen printing method, and at the same time, a conductive paste is inserted halfway into the inner wall of the hole by sucking it up from the side opposite to the surface on which the first printed conductor is formed, and then dried in a dryer. A method of firing after this is also used. Next, invert the ceramic substrate 1 and
At the same time as printing and forming the second printed conductor 3, the conductor paste is inserted partway into the inner wall of the hole by suctioning from the side opposite to the second printed conductor forming surface, and the conductor paste is inserted halfway into the hole inner wall to connect the first printed conductor forming surface and the conductor shape portion 4. form and conduct the conductor circuits on both sides. After this, drying and firing are performed to form conductive circuits on both sides and conduct the through holes. This is used to form through holes in thick film circuit boards.
発明が解決しようとする課題
厚膜回路基板の導体材料として、従来からAg−Pdペ
ーストが主流で多く用いられてきている。ところが最近
、その廉価性や、電気特性の有利さからCuペーストが
用いられるようになって来た。AgPdペーストでは、
第2図に示すような従来方法によるスルーホール型底に
おいて何ら問題にならなかったが、Cuペーストにする
ことにより新たに以下のような問題点が発生してきた。Problems to be Solved by the Invention Conventionally, Ag-Pd paste has been mainly used as a conductor material for thick film circuit boards. However, recently, Cu paste has come into use because of its low cost and advantageous electrical properties. In AgPd paste,
Although there were no problems with the through-hole type bottom formed by the conventional method as shown in FIG. 2, the following new problems have arisen by using Cu paste.
導体ペースト印刷時、特に第3図(blに示したような
グリーンシート時に金型により孔加工したセラミ、り基
板をもちいたとき、パンチング反対側の基板の孔加工エ
ツジ部を持つ面では第2図に示すように、パンチング反
対側基板コーナ一部6において導体ペーストが極端に薄
くなりひどい場合にはクランクが発生し、導通不良とな
ることがたびたびあった。When printing a conductive paste, especially when using a ceramic board with holes punched by a mold when printing a green sheet as shown in Figure 3 (bl), the second side of the board opposite to the punching has the hole-machined edge. As shown in the figure, the conductive paste becomes extremely thin at the corner 6 of the board opposite to the punching, and in severe cases, cranking often occurs, resulting in poor conduction.
本発明は上記課題に鑑み、エツジ部をもつ基板コーナ一
部においての導体のクラックの発生、ひ本発明によるJ
ブ膜回路基板のスルーホール形成方法は、金型で孔が形
成された7!−板を用いて、スルーホールを形成する場
合、まずパンチング側基板コーナ一部の面を第1番目印
刷導体形成面とし、スクリーン印刷法を用いて第1番目
印刷導体を形成すると同時に、第1番目印刷と、S体形
成面と反対側から吸引することにより孔内壁全面をおお
うように、第1番目印刷導体形成面と反対側工、ヂ部以
上に導体ペーストを挿入したのち乾燥機により乾燥する
。次に基板を反転して第2番目印刷導体を形成すると同
時に、第2番目印刷導体形成面と反対側から吸引するこ
とにより孔内壁途中まで導体ペーストを挿入し、前記第
1番目印刷導体形成面と導体型なり部を形成し両側の導
体回路を導通させる。In view of the above-mentioned problems, the present invention solves the problem of occurrence of cracks in a conductor at a part of a board corner having an edge part.
The method for forming through-holes in film circuit boards is to form holes using a mold.7! - When forming a through hole using a board, first, a part of the corner of the board on the punching side is used as the first printed conductor forming surface, and at the same time, the first printed conductor is formed using a screen printing method; After the first printing, conductor paste is inserted from the side opposite to the first printed conductor forming surface so as to cover the entire inner wall of the hole by suctioning from the side opposite to the S body forming surface, and then dried in a dryer. do. Next, the board is reversed to form a second printed conductor, and at the same time, the conductive paste is inserted partway into the inner wall of the hole by suction from the side opposite to the second printed conductor forming surface, and the conductive paste is inserted halfway into the hole inner wall, and This forms a conductor shaped portion and connects the conductor circuits on both sides.
その後乾燥、焼成することにより両面の導体回路形成と
スルーホール形成された厚膜回路基板を完成させる。Thereafter, by drying and baking, a thick film circuit board with conductor circuits and through holes formed on both sides is completed.
作用
以上説明したように、本発明によるスルーホール形成技
術をもちいれば、第1番目印刷導体形成時に反対側の孔
エツジ部にも導体ペーストが塗布されることにより同エ
ツジ部に丸みを持たせることが出来る。Function As explained above, if the through-hole forming technique according to the present invention is used, conductor paste is also applied to the edge of the hole on the opposite side when forming the first printed conductor, thereby making the edge of the hole rounded. I can do it.
次に第2番目印刷導体形成時には、第1番目印刷導体形
成時に形成された丸みをおびた、印刷導体を含むコーナ
一部の上からさらに印刷形成されるためエツジ部の印刷
導体は二重塗りとなり従来のスルーホール形成に、比ら
べj¥く印刷できるため、焼成後のクランクの発生を防
ぐことが出来る。Next, when forming the second printed conductor, the printed conductor at the edges is double-coated because it is further printed from above the rounded corner that was formed when the first printed conductor was formed and includes the printed conductor. This allows for less printing compared to conventional through-hole formation, which prevents the occurrence of cranks after firing.
これにより両面厚膜回路基板の完全なスルーホール形成
が可能であり、導通不良のない厚膜回路基板を得ること
ができる。As a result, it is possible to completely form through holes in a double-sided thick film circuit board, and a thick film circuit board without conduction defects can be obtained.
実施例
以下に本発明による一実施例を第1図、第4図、第5図
を用いて説明する。あらかじめグリーンシートで打ち抜
き金型により孔加工された、たて90鰭:よこ1001
m:厚み0.81のセラミック基板1を準備した。その
時の大数は500個、穴径はO; 4 amである。次
に導体ペーストとじて市販のデュポン社製9153銅ペ
ーストを使用した。印刷機は同基板の吸引が可能なニュ
ーロング社製造15GTNを使用した。印刷のための製
版は穴径0.41に対し同一中心点を持つ1.om鳳の
円状のパターンを持つ250meshステンレス、乳剤
厚10μmの版を準備した。Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1, 4, and 5. Vertical 90 fins: 1001 horizontal fins, with holes punched out of a green sheet using a die.
m: A ceramic substrate 1 having a thickness of 0.81 mm was prepared. The large number at that time was 500, and the hole diameter was O; 4 am. Next, commercially available DuPont Co., Ltd. 9153 copper paste was used as the conductor paste. The printing machine used was a 15GTN manufactured by New Long, which is capable of suctioning the same substrate. The plate making for printing is 1. having the same center point for a hole diameter of 0.41. A plate made of 250 mesh stainless steel with an emulsion thickness of 10 μm and having a circular pattern was prepared.
第5図に印刷工法の概略図を示す。Figure 5 shows a schematic diagram of the printing method.
まず前述したセラミック基板20+11を印刷機の印刷
台21に載置し、下方から吸引ブロアー22により吸引
しながら、前述の製版と、銅ペースト23をもちいて、
印刷した。吸引圧力を変えながら孔7に挿入されるペー
スト24の状態を観察し、第1図の第1番目印刷導体2
の状態、すなわちセラミック基板20の裏面にも銅ペー
ストが塗布されるように吸引圧力を決定した。First, the above-mentioned ceramic substrate 20 + 11 is placed on the printing table 21 of the printing machine, and while being sucked from below by the suction blower 22, using the above-mentioned plate making and copper paste 23,
Printed. Observing the state of the paste 24 inserted into the hole 7 while changing the suction pressure, the first printed conductor 2 in FIG.
The suction pressure was determined so that the copper paste was also applied to the back surface of the ceramic substrate 20.
次に恒温乾燥機にて120℃、10分間乾燥した。Next, it was dried in a constant temperature dryer at 120°C for 10 minutes.
その後同様にセラミック基板20を反転し印刷台21に
載置し下方から吸引ブロアー22により吸引しながら第
1図の第2番目印刷導体3を孔7の内壁に基板1の厚み
の半分程度にまで形成し、恒温乾燥機にて120℃、
10分間乾燥したのち、ピーク温度900℃、キープ時
間10分間、全行程60分の窒素を流した中性雰囲気ベ
ルト炉により焼成した。完成した厚膜回路基板の断面を
第1図に示す。ここで、5はパンチング側基板コーナ一
部、6はパンチング反対側基板コーナー 部である。Thereafter, the ceramic substrate 20 is similarly inverted and placed on the printing table 21, and while suction is applied from below by the suction blower 22, the second printed conductor 3 shown in FIG. Form it and heat it in a constant temperature dryer at 120℃.
After drying for 10 minutes, it was fired in a neutral atmosphere belt furnace in which nitrogen was flowed at a peak temperature of 900°C, a holding time of 10 minutes, and a total process of 60 minutes. Figure 1 shows a cross section of the completed thick film circuit board. Here, 5 is a part of the substrate corner on the punching side, and 6 is a corner part of the substrate on the opposite side to the punching.
一方、同吸引圧力を調整し第2図の示すような従来方法
のスルーホール基板も同時に印刷、焼成した。印刷基板
数はそれぞれ10枚づつ、スルーホール数にして500
0個所づつ形成した。その後それぞれのスルーホールを
実体顕微鏡により目視観察と、導通チエッカ−により導
通チエツクを行った。On the other hand, by adjusting the same suction pressure, a through-hole substrate using the conventional method as shown in FIG. 2 was also printed and fired at the same time. The number of printed circuit boards is 10 each, and the number of through holes is 500.
0 locations were formed. Thereafter, each through hole was visually observed using a stereomicroscope, and continuity was checked using a continuity checker.
第4図にその結果を示す。図に示す通り従来のスルーホ
ール形成方法では、孔数5000個に対して、3151
個のクラックが発生し良品率37%であるのに対し、本
発明によるスルーホール形成方法では4個のクランク発
生であり良品率99.9%以上であった。また導通チエ
ッカ−による導通不良は従来のスルーホール形成方法3
09個、良品率93%であるのに対し、本発明によるス
ルーホール形成方法では0個、良品率100%であった
。Figure 4 shows the results. As shown in the figure, in the conventional through hole forming method, for 5000 holes, 3151
In contrast, in the through-hole forming method according to the present invention, four cracks occurred, resulting in a non-defective rate of 99.9% or more. In addition, if the continuity checker is used to detect poor continuity, the conventional through-hole formation method 3.
In contrast, the through-hole forming method according to the present invention had 0 through holes, resulting in a non-defective rate of 100%.
発明の効果
以上より明らかなように本発明によるスルーホール印刷
形成方法は、特にグリーンシート時金型をもちいて打ち
抜かれた孔を有するセラミック基板のように、片面エツ
ジ部のするどい孔に対し、1体ペーストを二重塗りする
ことにより丸みをつけ、同時に厚く印刷形成することに
より、クラック発生をなくすことが出来、信頼性の高い
両面厚膜回路基板を提供しうるちのである。Effects of the Invention As is clear from the above, the through-hole printing method according to the present invention is particularly effective for forming sharp holes on one side edge portion, such as a ceramic substrate having holes punched using a green sheet mold. By double-coating the body paste to give it a rounded shape and at the same time printing it thickly, it is possible to eliminate cracks and provide a highly reliable double-sided thick-film circuit board.
なお、本発明の実施例においては導体ペーストとしてデ
ュポン社の9153を使用したが、このペストは何らこ
れに限定されるものではなく、広く銅ペースト以外、A
g1pdやAuペーストにも有効であることは明白であ
る。In the embodiments of the present invention, DuPont's 9153 was used as the conductive paste, but this paste is not limited to this in any way, and can be widely used other than copper paste.
It is clear that it is also effective for g1pd and Au paste.
第1図は本発明のスルーホール印刷形成方法による両面
厚膜回路基板の孔・スルーホール部の断面図、第2図は
、従来から行われているスルーホール印刷形成方法によ
る両面厚膜回路基板の孔・スルーホール部の断面図、第
3図(alはレーザー加工によるセラミック基板の断面
図、第3図fblはセラミックグリーンシートの金型に
よる孔加工の概略図、第4図は本発明と従来方法による
スルーホール印刷形成後の調査、試験結果を示したグラ
フ、第5図は本発明のスルーホール印刷形成方法の概略
図である。
1・・・・・・セラミック基板、2・・・・・・第1番
目印刷導体、3・・・・・・第2番目印刷導体、4・・
・・・・導体組なり部、5・・・・・・パンチング側基
板コーナ一部、6・・・・・・パンチング反対側基板コ
ーナ一部。
代理人の氏名 弁理士 栗野重孝 はか1名いト
!
憾
?−・・レーザー加工剰
クラシフ発生腟査
合格品
填通試撃
合乃品
20−・−
22−・
乙−−
几
口づミ・ツクi′I!1
EnJlJ台
au g+ラロア
it停ペースト(印別崩〕
m体ペースト(孔!二田刷2ホた〕Fig. 1 is a sectional view of the hole/through-hole portion of a double-sided thick film circuit board formed by the through-hole printing method of the present invention, and Fig. 2 is a double-sided thick film circuit board formed by the conventional through-hole printing method. Figure 3 is a cross-sectional view of the hole/through-hole portion of the ceramic substrate (al is a cross-sectional view of the ceramic substrate processed by laser processing, Figure 3 fbl is a schematic diagram of hole processing using a ceramic green sheet mold, and Figure 4 is a cross-sectional view of the ceramic substrate according to the present invention). A graph showing the investigation and test results after through-hole printing by the conventional method, and FIG. 5 are schematic diagrams of the through-hole printing and forming method of the present invention. 1... Ceramic substrate, 2... ...1st printed conductor, 3...2nd printed conductor, 4...
...Conductor assembly part, 5...Part of the corner of the board on the punching side, 6...Part of the corner of the board on the opposite side of the punching. Name of agent: Patent attorney Shigetaka Kurino Only one name! Regret? -... Laser processing surplus clasif occurred Vaginal examination passed product loading trial game 20 - - 22 - Otsu - - Zumi Tsukui Tsuku i'I! 1 EnJlJ stand au g + Laroi it stop paste (inbetsu break) m body paste (hole! Nita printing 2 hota)
Claims (3)
に導体ペーストを用いて回路パターンを印刷形成すると
同時に印刷する面と反対側から吸引しながら導体ペース
トを孔内壁に印刷し、両面の回路パターンを導通せしめ
る厚膜回路基板のスルーホール形成において、まずセラ
ミック基板の孔加工した方向から印刷をおこない、その
時の孔への導体ペーストの挿入を反対側の基板面までお
こない、次にセラミック基板の反対側を印刷形成する時
に導体ペーストを基板厚みの半分程度孔内に挿入し、最
初に印刷形成した導体ペーストと重ねることを特徴とす
る厚膜回路基板のスルーホール形成方法。(1) Print a circuit pattern using conductive paste on both sides of a ceramic substrate with holes pre-drilled in it, and at the same time print the conductive paste on the inner wall of the hole while suctioning it from the side opposite to the side to be printed, to make the circuit pattern on both sides conductive. When forming through-holes in thick-film circuit boards, first print from the direction in which the holes are made in the ceramic board, then insert the conductive paste into the holes up to the opposite side of the board, and then print from the opposite side of the ceramic board. A method for forming a through hole in a thick film circuit board, which comprises inserting a conductive paste into the hole about half the thickness of the board during printing and overlapping it with the conductive paste that was first printed.
ト時に金型をもちいて打ちぬかれたセラミック基板を用
いることを特徴とする特許請求の範囲第1項記載の厚膜
回路基板のスルーホール形成方法。(2) The method for forming through holes in a thick film circuit board according to claim 1, characterized in that the hole-processed ceramic substrate is a ceramic substrate punched using a mold at the time of green sheeting. .
セラミック基板を用い、導体ペーストが銅ペーストであ
ることを特徴とする特許請求の範囲第2項記載の厚膜回
路基板のスルーホール形成方法。(3) A method for forming through holes in a thick film circuit board according to claim 2, characterized in that a ceramic substrate having holes formed using a mold during green sheeting is used, and the conductive paste is a copper paste. .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3056689A JPH02209798A (en) | 1989-02-09 | 1989-02-09 | Forming of through hole in thick film circuit substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3056689A JPH02209798A (en) | 1989-02-09 | 1989-02-09 | Forming of through hole in thick film circuit substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02209798A true JPH02209798A (en) | 1990-08-21 |
Family
ID=12307377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3056689A Pending JPH02209798A (en) | 1989-02-09 | 1989-02-09 | Forming of through hole in thick film circuit substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02209798A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9148956B2 (en) | 2012-04-27 | 2015-09-29 | Seiko Epson Corporation | Base substrate, electronic device, and method of manufacturing base substrate |
-
1989
- 1989-02-09 JP JP3056689A patent/JPH02209798A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9148956B2 (en) | 2012-04-27 | 2015-09-29 | Seiko Epson Corporation | Base substrate, electronic device, and method of manufacturing base substrate |
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