JPH0220368B2 - - Google Patents

Info

Publication number
JPH0220368B2
JPH0220368B2 JP26047785A JP26047785A JPH0220368B2 JP H0220368 B2 JPH0220368 B2 JP H0220368B2 JP 26047785 A JP26047785 A JP 26047785A JP 26047785 A JP26047785 A JP 26047785A JP H0220368 B2 JPH0220368 B2 JP H0220368B2
Authority
JP
Japan
Prior art keywords
electrode
processed
chuck
detached
electrostatic chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP26047785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62120931A (ja
Inventor
Tsunemasa Tokura
Takehiro Kawasaki
Masashi Tezuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP26047785A priority Critical patent/JPS62120931A/ja
Publication of JPS62120931A publication Critical patent/JPS62120931A/ja
Publication of JPH0220368B2 publication Critical patent/JPH0220368B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP26047785A 1985-11-20 1985-11-20 静電チヤツク装置 Granted JPS62120931A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26047785A JPS62120931A (ja) 1985-11-20 1985-11-20 静電チヤツク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26047785A JPS62120931A (ja) 1985-11-20 1985-11-20 静電チヤツク装置

Publications (2)

Publication Number Publication Date
JPS62120931A JPS62120931A (ja) 1987-06-02
JPH0220368B2 true JPH0220368B2 (OSRAM) 1990-05-09

Family

ID=17348493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26047785A Granted JPS62120931A (ja) 1985-11-20 1985-11-20 静電チヤツク装置

Country Status (1)

Country Link
JP (1) JPS62120931A (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6399148A (ja) * 1986-10-15 1988-04-30 Tokuda Seisakusho Ltd 静電チヤツク装置
JP2692323B2 (ja) * 1989-08-08 1997-12-17 富士電機株式会社 半導体ウエハ保持装置
JP2580791B2 (ja) * 1989-09-27 1997-02-12 株式会社日立製作所 真空処理装置
JP3264391B2 (ja) * 1993-05-17 2002-03-11 東京エレクトロン株式会社 静電吸着体の離脱装置
US5708556A (en) * 1995-07-10 1998-01-13 Watkins Johnson Company Electrostatic chuck assembly
CN113862645B (zh) * 2021-09-28 2023-09-08 北京北方华创微电子装备有限公司 承载装置及半导体工艺腔室

Also Published As

Publication number Publication date
JPS62120931A (ja) 1987-06-02

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees