JPH0219135B2 - - Google Patents

Info

Publication number
JPH0219135B2
JPH0219135B2 JP61261634A JP26163486A JPH0219135B2 JP H0219135 B2 JPH0219135 B2 JP H0219135B2 JP 61261634 A JP61261634 A JP 61261634A JP 26163486 A JP26163486 A JP 26163486A JP H0219135 B2 JPH0219135 B2 JP H0219135B2
Authority
JP
Japan
Prior art keywords
polymer
manufacturing
ethane
bis
organosilicon compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61261634A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63117037A (ja
Inventor
Yoshifumi Takeda
Minoru Takamizawa
Akira Hayashida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP61261634A priority Critical patent/JPS63117037A/ja
Priority to US07/114,111 priority patent/US4869854A/en
Priority to DE3736914A priority patent/DE3736914C2/de
Priority to FR8715124A priority patent/FR2606777B1/fr
Publication of JPS63117037A publication Critical patent/JPS63117037A/ja
Publication of JPH0219135B2 publication Critical patent/JPH0219135B2/ja
Granted legal-status Critical Current

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  • Carbon And Carbon Compounds (AREA)
  • Catalysts (AREA)
  • Silicon Polymers (AREA)
  • Inorganic Fibers (AREA)
  • Ceramic Products (AREA)
JP61261634A 1986-10-31 1986-10-31 有機シラザン重合体の製造方法 Granted JPS63117037A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61261634A JPS63117037A (ja) 1986-10-31 1986-10-31 有機シラザン重合体の製造方法
US07/114,111 US4869854A (en) 1986-10-31 1987-10-27 Process for manufacturing organic silazane polymers and ceramics therefrom
DE3736914A DE3736914C2 (de) 1986-10-31 1987-10-30 Verfahren zur Herstellung von organischen Silazanpolymeren und daraus gebildeten Keramikmaterialien
FR8715124A FR2606777B1 (fr) 1986-10-31 1987-10-30 Procede de fabrication de polymeres silazanes organiques et utilisation de ces polymeres pour fabriquer des ceramiques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61261634A JPS63117037A (ja) 1986-10-31 1986-10-31 有機シラザン重合体の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1244168A Division JPH02120279A (ja) 1989-09-19 1989-09-19 セラミックスの製造方法

Publications (2)

Publication Number Publication Date
JPS63117037A JPS63117037A (ja) 1988-05-21
JPH0219135B2 true JPH0219135B2 (de) 1990-04-27

Family

ID=17364618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61261634A Granted JPS63117037A (ja) 1986-10-31 1986-10-31 有機シラザン重合体の製造方法

Country Status (1)

Country Link
JP (1) JPS63117037A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102591159B1 (ko) * 2020-05-07 2023-10-20 메르크 파텐트 게엠베하 폴리카보실라잔, 및 이를 포함하는 조성물 및 이를 사용하는 규소-함유 막의 제조방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57117532A (en) * 1981-01-15 1982-07-22 Dow Corning Manufacture of poly(disilyl)silazane polymer
US4397828A (en) * 1981-11-16 1983-08-09 Massachusetts Institute Of Technology Stable liquid polymeric precursor to silicon nitride and process
JPS60226890A (ja) * 1984-01-19 1985-11-12 マサチユ−セツツ・インステチユ−ト・オブ・テクノロジ− プレセラミツク有機シラザン重合体

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57117532A (en) * 1981-01-15 1982-07-22 Dow Corning Manufacture of poly(disilyl)silazane polymer
US4397828A (en) * 1981-11-16 1983-08-09 Massachusetts Institute Of Technology Stable liquid polymeric precursor to silicon nitride and process
JPS60226890A (ja) * 1984-01-19 1985-11-12 マサチユ−セツツ・インステチユ−ト・オブ・テクノロジ− プレセラミツク有機シラザン重合体

Also Published As

Publication number Publication date
JPS63117037A (ja) 1988-05-21

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