JPH0219135B2 - - Google Patents

Info

Publication number
JPH0219135B2
JPH0219135B2 JP61261634A JP26163486A JPH0219135B2 JP H0219135 B2 JPH0219135 B2 JP H0219135B2 JP 61261634 A JP61261634 A JP 61261634A JP 26163486 A JP26163486 A JP 26163486A JP H0219135 B2 JPH0219135 B2 JP H0219135B2
Authority
JP
Japan
Prior art keywords
polymer
manufacturing
ethane
bis
organosilicon compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61261634A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63117037A (ja
Inventor
Yoshifumi Takeda
Minoru Takamizawa
Akira Hayashida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP61261634A priority Critical patent/JPS63117037A/ja
Priority to US07/114,111 priority patent/US4869854A/en
Priority to FR8715124A priority patent/FR2606777B1/fr
Priority to DE3736914A priority patent/DE3736914C2/de
Publication of JPS63117037A publication Critical patent/JPS63117037A/ja
Publication of JPH0219135B2 publication Critical patent/JPH0219135B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Fibers (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Catalysts (AREA)
  • Silicon Polymers (AREA)
JP61261634A 1986-10-31 1986-10-31 有機シラザン重合体の製造方法 Granted JPS63117037A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61261634A JPS63117037A (ja) 1986-10-31 1986-10-31 有機シラザン重合体の製造方法
US07/114,111 US4869854A (en) 1986-10-31 1987-10-27 Process for manufacturing organic silazane polymers and ceramics therefrom
FR8715124A FR2606777B1 (fr) 1986-10-31 1987-10-30 Procede de fabrication de polymeres silazanes organiques et utilisation de ces polymeres pour fabriquer des ceramiques
DE3736914A DE3736914C2 (de) 1986-10-31 1987-10-30 Verfahren zur Herstellung von organischen Silazanpolymeren und daraus gebildeten Keramikmaterialien

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61261634A JPS63117037A (ja) 1986-10-31 1986-10-31 有機シラザン重合体の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1244168A Division JPH02120279A (ja) 1989-09-19 1989-09-19 セラミックスの製造方法

Publications (2)

Publication Number Publication Date
JPS63117037A JPS63117037A (ja) 1988-05-21
JPH0219135B2 true JPH0219135B2 (cs) 1990-04-27

Family

ID=17364618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61261634A Granted JPS63117037A (ja) 1986-10-31 1986-10-31 有機シラザン重合体の製造方法

Country Status (1)

Country Link
JP (1) JPS63117037A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4146725B1 (en) * 2020-05-07 2024-05-22 Merck Patent GmbH Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4340619A (en) * 1981-01-15 1982-07-20 Dow Corning Corporation Process for the preparation of poly(disilyl)silazane polymers and the polymers therefrom
US4397828A (en) * 1981-11-16 1983-08-09 Massachusetts Institute Of Technology Stable liquid polymeric precursor to silicon nitride and process
US4482669A (en) * 1984-01-19 1984-11-13 Massachusetts Institute Of Technology Preceramic organosilazane polymers

Also Published As

Publication number Publication date
JPS63117037A (ja) 1988-05-21

Similar Documents

Publication Publication Date Title
JPH0215577B2 (cs)
US4869854A (en) Process for manufacturing organic silazane polymers and ceramics therefrom
US4847345A (en) Process for manufacturing organic silazane polymers and ceramics therefrom
EP0153008A2 (en) Preceramic organosilazane polymers
EP0323062B1 (en) Process for manufacturing organic silazane polymers
EP0417526B1 (en) Methods for preparing polytitanocarbosilazane polymers and ceramics therefrom
JPH0362667B2 (cs)
JPH0219135B2 (cs)
US5296418A (en) Method for manufacturing a hafnium-containing silazane polymer and a method for manufacturing a ceramic from said polymer
JPH0313188B2 (cs)
JPH0577691B2 (cs)
JP2518119B2 (ja) セラミックスの製造方法
US5200371A (en) Method for preparing organic silazane polymers and method for preparing ceramics from the polymers
US5145813A (en) Process for manufacturing organic silazane polymers and ceramics therefrom
US5210058A (en) Method for preparing organic silazane polymers and method for preparing ceramics from the polymers
JPH0234565A (ja) 有機シラザン重合体の不融化方法
JPH0798865B2 (ja) セラミックスの製造方法
JPH0798866B2 (ja) セラミックスの製造方法
JPH0214220A (ja) 有機シラザン重合体の不融化方法
JP2507762B2 (ja) メチルポリシラザンの製造法
JPH04153226A (ja) ホウ素含有シラザン重合体の製造方法及びセラミックスの製造方法
JPH07172929A (ja) イットリウム含有複合粉末及びその製造方法