JPH0218589B2 - - Google Patents
Info
- Publication number
- JPH0218589B2 JPH0218589B2 JP20891781A JP20891781A JPH0218589B2 JP H0218589 B2 JPH0218589 B2 JP H0218589B2 JP 20891781 A JP20891781 A JP 20891781A JP 20891781 A JP20891781 A JP 20891781A JP H0218589 B2 JPH0218589 B2 JP H0218589B2
- Authority
- JP
- Japan
- Prior art keywords
- doctor blade
- ceramic
- slurry
- green sheet
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 claims description 43
- 239000002002 slurry Substances 0.000 claims description 39
- 239000000758 substrate Substances 0.000 claims description 15
- 238000001035 drying Methods 0.000 claims description 10
- 238000007606 doctor blade method Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-M Butyrate Chemical compound CCCC([O-])=O FERIUCNNQQJTOY-UHFFFAOYSA-M 0.000 description 1
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Natural products CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000012611 container material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Producing Shaped Articles From Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20891781A JPS58110089A (ja) | 1981-12-23 | 1981-12-23 | セラミツク基板の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20891781A JPS58110089A (ja) | 1981-12-23 | 1981-12-23 | セラミツク基板の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58110089A JPS58110089A (ja) | 1983-06-30 |
JPH0218589B2 true JPH0218589B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-04-26 |
Family
ID=16564253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20891781A Granted JPS58110089A (ja) | 1981-12-23 | 1981-12-23 | セラミツク基板の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58110089A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1981
- 1981-12-23 JP JP20891781A patent/JPS58110089A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58110089A (ja) | 1983-06-30 |