JPH021855U - - Google Patents
Info
- Publication number
- JPH021855U JPH021855U JP7995588U JP7995588U JPH021855U JP H021855 U JPH021855 U JP H021855U JP 7995588 U JP7995588 U JP 7995588U JP 7995588 U JP7995588 U JP 7995588U JP H021855 U JPH021855 U JP H021855U
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- sample surface
- sample
- respect
- scanning beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7995588U JPH021855U (zh) | 1988-06-16 | 1988-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7995588U JPH021855U (zh) | 1988-06-16 | 1988-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH021855U true JPH021855U (zh) | 1990-01-09 |
Family
ID=31304802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7995588U Pending JPH021855U (zh) | 1988-06-16 | 1988-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH021855U (zh) |
-
1988
- 1988-06-16 JP JP7995588U patent/JPH021855U/ja active Pending
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