JPH0218480Y2 - - Google Patents
Info
- Publication number
- JPH0218480Y2 JPH0218480Y2 JP1984086744U JP8674484U JPH0218480Y2 JP H0218480 Y2 JPH0218480 Y2 JP H0218480Y2 JP 1984086744 U JP1984086744 U JP 1984086744U JP 8674484 U JP8674484 U JP 8674484U JP H0218480 Y2 JPH0218480 Y2 JP H0218480Y2
- Authority
- JP
- Japan
- Prior art keywords
- firing
- ceramic
- firing jig
- jig
- fired
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010304 firing Methods 0.000 claims description 42
- 239000000919 ceramic Substances 0.000 claims description 30
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 11
- 230000003746 surface roughness Effects 0.000 description 4
- 230000002349 favourable effect Effects 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052863 mullite Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 102100039339 Atrial natriuretic peptide receptor 1 Human genes 0.000 description 1
- 101710102163 Atrial natriuretic peptide receptor 1 Proteins 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- -1 Mo and W Chemical class 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8674484U JPS6016998U (ja) | 1984-06-13 | 1984-06-13 | セラミツク焼成用治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8674484U JPS6016998U (ja) | 1984-06-13 | 1984-06-13 | セラミツク焼成用治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6016998U JPS6016998U (ja) | 1985-02-05 |
| JPH0218480Y2 true JPH0218480Y2 (US07223432-20070529-C00017.png) | 1990-05-23 |
Family
ID=30216669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8674484U Granted JPS6016998U (ja) | 1984-06-13 | 1984-06-13 | セラミツク焼成用治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6016998U (US07223432-20070529-C00017.png) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0429588Y2 (US07223432-20070529-C00017.png) * | 1987-12-16 | 1992-07-17 | ||
| JP2862189B2 (ja) * | 1990-10-30 | 1999-02-24 | 株式会社東芝 | 高温熱処理用治具 |
| JP2002114537A (ja) * | 2000-10-04 | 2002-04-16 | Nippon Electric Glass Co Ltd | ガラス基板熱処理用セッター |
| JP2018148163A (ja) * | 2017-03-09 | 2018-09-20 | 日本特殊陶業株式会社 | 半導体製造装置用部品の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4417658Y1 (US07223432-20070529-C00017.png) * | 1965-02-13 | 1969-07-30 | ||
| JPS50101410A (US07223432-20070529-C00017.png) * | 1974-01-11 | 1975-08-12 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS477435U (US07223432-20070529-C00017.png) * | 1971-02-23 | 1972-09-27 |
-
1984
- 1984-06-13 JP JP8674484U patent/JPS6016998U/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4417658Y1 (US07223432-20070529-C00017.png) * | 1965-02-13 | 1969-07-30 | ||
| JPS50101410A (US07223432-20070529-C00017.png) * | 1974-01-11 | 1975-08-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6016998U (ja) | 1985-02-05 |
