JPH0218313A - 多結晶シリコンシートの製造方法 - Google Patents
多結晶シリコンシートの製造方法Info
- Publication number
- JPH0218313A JPH0218313A JP16957588A JP16957588A JPH0218313A JP H0218313 A JPH0218313 A JP H0218313A JP 16957588 A JP16957588 A JP 16957588A JP 16957588 A JP16957588 A JP 16957588A JP H0218313 A JPH0218313 A JP H0218313A
- Authority
- JP
- Japan
- Prior art keywords
- mold
- cavity
- molten silicon
- polycrystalline silicon
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 29
- 239000010703 silicon Substances 0.000 claims abstract description 29
- 238000002347 injection Methods 0.000 claims description 14
- 239000007924 injection Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- 230000005484 gravity Effects 0.000 abstract description 6
- 230000010355 oscillation Effects 0.000 abstract 2
- 230000010358 mechanical oscillation Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 11
- 239000011261 inert gas Substances 0.000 description 4
- 238000005266 casting Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16957588A JPH0218313A (ja) | 1988-07-07 | 1988-07-07 | 多結晶シリコンシートの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16957588A JPH0218313A (ja) | 1988-07-07 | 1988-07-07 | 多結晶シリコンシートの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0218313A true JPH0218313A (ja) | 1990-01-22 |
| JPH0479973B2 JPH0479973B2 (enrdf_load_stackoverflow) | 1992-12-17 |
Family
ID=15889021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16957588A Granted JPH0218313A (ja) | 1988-07-07 | 1988-07-07 | 多結晶シリコンシートの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0218313A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5653137A (en) * | 1989-05-31 | 1997-08-05 | Hitachi, Ltd. | Five-high rolling mill |
-
1988
- 1988-07-07 JP JP16957588A patent/JPH0218313A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5653137A (en) * | 1989-05-31 | 1997-08-05 | Hitachi, Ltd. | Five-high rolling mill |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0479973B2 (enrdf_load_stackoverflow) | 1992-12-17 |
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