JPH0217476Y2 - - Google Patents
Info
- Publication number
- JPH0217476Y2 JPH0217476Y2 JP1981008265U JP826581U JPH0217476Y2 JP H0217476 Y2 JPH0217476 Y2 JP H0217476Y2 JP 1981008265 U JP1981008265 U JP 1981008265U JP 826581 U JP826581 U JP 826581U JP H0217476 Y2 JPH0217476 Y2 JP H0217476Y2
- Authority
- JP
- Japan
- Prior art keywords
- exposed
- mark
- stage
- plate
- dry plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 17
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Light Sources And Details Of Projection-Printing Devices (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981008265U JPH0217476Y2 (de) | 1981-01-23 | 1981-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981008265U JPH0217476Y2 (de) | 1981-01-23 | 1981-01-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57121134U JPS57121134U (de) | 1982-07-28 |
| JPH0217476Y2 true JPH0217476Y2 (de) | 1990-05-16 |
Family
ID=29806421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981008265U Expired JPH0217476Y2 (de) | 1981-01-23 | 1981-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217476Y2 (de) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5544355Y2 (de) * | 1975-10-22 | 1980-10-17 | ||
| JPS5533644Y2 (de) * | 1976-03-31 | 1980-08-09 |
-
1981
- 1981-01-23 JP JP1981008265U patent/JPH0217476Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57121134U (de) | 1982-07-28 |
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