JPH0217215B2 - - Google Patents
Info
- Publication number
- JPH0217215B2 JPH0217215B2 JP60163025A JP16302585A JPH0217215B2 JP H0217215 B2 JPH0217215 B2 JP H0217215B2 JP 60163025 A JP60163025 A JP 60163025A JP 16302585 A JP16302585 A JP 16302585A JP H0217215 B2 JPH0217215 B2 JP H0217215B2
- Authority
- JP
- Japan
- Prior art keywords
- gas separation
- module
- gas
- tube sheet
- module container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000926 separation method Methods 0.000 claims description 43
- 239000012510 hollow fiber Substances 0.000 claims description 20
- 238000007789 sealing Methods 0.000 claims description 16
- 210000004907 gland Anatomy 0.000 claims description 14
- 239000012528 membrane Substances 0.000 claims description 13
- 238000012856 packing Methods 0.000 claims description 12
- 239000000919 ceramic Substances 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 239000003795 chemical substances by application Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000010306 acid treatment Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 239000005373 porous glass Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16302585A JPS6227023A (ja) | 1985-07-25 | 1985-07-25 | ガス分離モジユ−ルのシ−ル方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16302585A JPS6227023A (ja) | 1985-07-25 | 1985-07-25 | ガス分離モジユ−ルのシ−ル方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6227023A JPS6227023A (ja) | 1987-02-05 |
| JPH0217215B2 true JPH0217215B2 (de) | 1990-04-19 |
Family
ID=15765754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16302585A Granted JPS6227023A (ja) | 1985-07-25 | 1985-07-25 | ガス分離モジユ−ルのシ−ル方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6227023A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0478919U (de) * | 1990-11-22 | 1992-07-09 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57122293A (en) * | 1980-08-28 | 1982-07-30 | Akzo Nv | Apparatus for transmitting heat and/or material through hollow fiber |
| JPS57136906A (en) * | 1980-12-29 | 1982-08-24 | Monsanto Co | Permeating device |
-
1985
- 1985-07-25 JP JP16302585A patent/JPS6227023A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57122293A (en) * | 1980-08-28 | 1982-07-30 | Akzo Nv | Apparatus for transmitting heat and/or material through hollow fiber |
| JPS57136906A (en) * | 1980-12-29 | 1982-08-24 | Monsanto Co | Permeating device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0478919U (de) * | 1990-11-22 | 1992-07-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6227023A (ja) | 1987-02-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0290322B1 (de) | Kartusche aus Verbundmaterial für Einkristall-Produktions-Vorrichtung | |
| KR101647958B1 (ko) | 처리 챔버용 밀봉 장치 | |
| CN1041616A (zh) | 气体吹洗砖 | |
| JPH0217215B2 (de) | ||
| US3984131A (en) | Packing gland for TiCl4 inlet to oxidizer reactor | |
| JP2530167B2 (ja) | 集塵装置 | |
| US5497727A (en) | Cooling element for a semiconductor fabrication chamber | |
| CN102296366A (zh) | LiGaS2多晶的合成方法 | |
| US5370736A (en) | Horizontal reactor hardware design | |
| JP3773749B2 (ja) | 導管接続装置 | |
| CN110975453A (zh) | 尾气处理装置及半导体加工设备 | |
| JP4597046B2 (ja) | 昇華精製装置 | |
| CN213295504U (zh) | 一种用于高纯材料生长的cvd管式炉 | |
| JPH046780B2 (de) | ||
| JP3013276B2 (ja) | 高温ガス濾過装置 | |
| RU2126290C1 (ru) | Мембранный узел для разделения газов | |
| US3938832A (en) | Packing gland for TiCl4 inlet to oxidizer reactor | |
| JP2963665B2 (ja) | 水熱反応処理用容器 | |
| US4106759A (en) | Device and method for the introduction of gases into reaction vessels containing liquids | |
| CA2383325A1 (en) | Joining of cvd diamond bodies to metal structures | |
| CN218440159U (zh) | 气体纯化器的螺纹防松脱装置 | |
| JP7460010B1 (ja) | シリコン単結晶製造装置 | |
| US5987053A (en) | High temperature air cooled vacuum furnace | |
| SU896805A1 (ru) | Автоклав дл вскрыти труднорастворимой пробы | |
| JPH0791566B2 (ja) | 焼結炉の処理物収納内室 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |