JPH0217043B2 - - Google Patents
Info
- Publication number
- JPH0217043B2 JPH0217043B2 JP6359483A JP6359483A JPH0217043B2 JP H0217043 B2 JPH0217043 B2 JP H0217043B2 JP 6359483 A JP6359483 A JP 6359483A JP 6359483 A JP6359483 A JP 6359483A JP H0217043 B2 JPH0217043 B2 JP H0217043B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- optical path
- electro
- laser
- path length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 36
- 239000013078 crystal Substances 0.000 claims abstract description 27
- 230000003287 optical effect Effects 0.000 claims description 33
- 238000005259 measurement Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 abstract description 2
- 238000001228 spectrum Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 238000005305 interferometry Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6359483A JPS59190605A (ja) | 1983-04-13 | 1983-04-13 | 面内変位測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6359483A JPS59190605A (ja) | 1983-04-13 | 1983-04-13 | 面内変位測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59190605A JPS59190605A (ja) | 1984-10-29 |
| JPH0217043B2 true JPH0217043B2 (enrdf_load_stackoverflow) | 1990-04-19 |
Family
ID=13233745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6359483A Granted JPS59190605A (ja) | 1983-04-13 | 1983-04-13 | 面内変位測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59190605A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01287468A (ja) * | 1988-05-16 | 1989-11-20 | Fuji Xerox Co Ltd | ランダム空間パターンの移動情報検出方法 |
| IE910326A1 (en) * | 1991-01-31 | 1992-07-29 | Mairead Rosario Reynolds | A method and apparatus for detecting direction and¹displacement of a surface |
-
1983
- 1983-04-13 JP JP6359483A patent/JPS59190605A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59190605A (ja) | 1984-10-29 |
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