JPS59190605A - 面内変位測定装置 - Google Patents

面内変位測定装置

Info

Publication number
JPS59190605A
JPS59190605A JP6359483A JP6359483A JPS59190605A JP S59190605 A JPS59190605 A JP S59190605A JP 6359483 A JP6359483 A JP 6359483A JP 6359483 A JP6359483 A JP 6359483A JP S59190605 A JPS59190605 A JP S59190605A
Authority
JP
Japan
Prior art keywords
brightness
measured
difference
laser
optical path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6359483A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217043B2 (enrdf_load_stackoverflow
Inventor
Akira Hirai
明 平井
Nobuo Shibata
信雄 柴田
Toshio Akatsu
赤津　利雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6359483A priority Critical patent/JPS59190605A/ja
Publication of JPS59190605A publication Critical patent/JPS59190605A/ja
Publication of JPH0217043B2 publication Critical patent/JPH0217043B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP6359483A 1983-04-13 1983-04-13 面内変位測定装置 Granted JPS59190605A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6359483A JPS59190605A (ja) 1983-04-13 1983-04-13 面内変位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6359483A JPS59190605A (ja) 1983-04-13 1983-04-13 面内変位測定装置

Publications (2)

Publication Number Publication Date
JPS59190605A true JPS59190605A (ja) 1984-10-29
JPH0217043B2 JPH0217043B2 (enrdf_load_stackoverflow) 1990-04-19

Family

ID=13233745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6359483A Granted JPS59190605A (ja) 1983-04-13 1983-04-13 面内変位測定装置

Country Status (1)

Country Link
JP (1) JPS59190605A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01287468A (ja) * 1988-05-16 1989-11-20 Fuji Xerox Co Ltd ランダム空間パターンの移動情報検出方法
WO1992014115A1 (en) * 1991-01-31 1992-08-20 Vincent Toal A method and apparatus for determining direction of displacement of an object surface

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01287468A (ja) * 1988-05-16 1989-11-20 Fuji Xerox Co Ltd ランダム空間パターンの移動情報検出方法
WO1992014115A1 (en) * 1991-01-31 1992-08-20 Vincent Toal A method and apparatus for determining direction of displacement of an object surface

Also Published As

Publication number Publication date
JPH0217043B2 (enrdf_load_stackoverflow) 1990-04-19

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