JPH0217002Y2 - - Google Patents
Info
- Publication number
- JPH0217002Y2 JPH0217002Y2 JP4795083U JP4795083U JPH0217002Y2 JP H0217002 Y2 JPH0217002 Y2 JP H0217002Y2 JP 4795083 U JP4795083 U JP 4795083U JP 4795083 U JP4795083 U JP 4795083U JP H0217002 Y2 JPH0217002 Y2 JP H0217002Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- film
- gas ejection
- target
- pipes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005546 reactive sputtering Methods 0.000 claims description 8
- 238000004804 winding Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 27
- 238000007740 vapor deposition Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4795083U JPS59153372U (ja) | 1983-03-30 | 1983-03-30 | 反応性スパツタ蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4795083U JPS59153372U (ja) | 1983-03-30 | 1983-03-30 | 反応性スパツタ蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59153372U JPS59153372U (ja) | 1984-10-15 |
| JPH0217002Y2 true JPH0217002Y2 (enExample) | 1990-05-11 |
Family
ID=30178490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4795083U Granted JPS59153372U (ja) | 1983-03-30 | 1983-03-30 | 反応性スパツタ蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59153372U (enExample) |
-
1983
- 1983-03-30 JP JP4795083U patent/JPS59153372U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59153372U (ja) | 1984-10-15 |
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