JPS59153372U - 反応性スパツタ蒸着装置 - Google Patents

反応性スパツタ蒸着装置

Info

Publication number
JPS59153372U
JPS59153372U JP4795083U JP4795083U JPS59153372U JP S59153372 U JPS59153372 U JP S59153372U JP 4795083 U JP4795083 U JP 4795083U JP 4795083 U JP4795083 U JP 4795083U JP S59153372 U JPS59153372 U JP S59153372U
Authority
JP
Japan
Prior art keywords
sputter deposition
reactive sputter
deposition equipment
gas ejection
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4795083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217002Y2 (enExample
Inventor
佐々和　明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP4795083U priority Critical patent/JPS59153372U/ja
Publication of JPS59153372U publication Critical patent/JPS59153372U/ja
Application granted granted Critical
Publication of JPH0217002Y2 publication Critical patent/JPH0217002Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4795083U 1983-03-30 1983-03-30 反応性スパツタ蒸着装置 Granted JPS59153372U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4795083U JPS59153372U (ja) 1983-03-30 1983-03-30 反応性スパツタ蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4795083U JPS59153372U (ja) 1983-03-30 1983-03-30 反応性スパツタ蒸着装置

Publications (2)

Publication Number Publication Date
JPS59153372U true JPS59153372U (ja) 1984-10-15
JPH0217002Y2 JPH0217002Y2 (enExample) 1990-05-11

Family

ID=30178490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4795083U Granted JPS59153372U (ja) 1983-03-30 1983-03-30 反応性スパツタ蒸着装置

Country Status (1)

Country Link
JP (1) JPS59153372U (enExample)

Also Published As

Publication number Publication date
JPH0217002Y2 (enExample) 1990-05-11

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