JPH0216028B2 - - Google Patents

Description

Detailed Description of the Invention The present invention relates to a Josephson integrated circuit, in particular, a combination of functional elements that has a plurality of magnetic field control type or magnetically coupled type Josephson functional elements in a fixed arrangement pattern and is made to function as required. Concerning Josephson integrated circuits with easily modifiable structures.

Because Josephson devices are characterized by high speed and low power consumption, they are highly anticipated as future information processing devices, and various functions and configurations have been developed to realize a Josephson computer that integrates a large number of these devices. The development of something is desired.

Of course, Josephson elements themselves can be roughly divided into current-driven or direct-coupled types and magnetic-field-controlled or magnetically coupled types, and research and development have been carried out for each of them. In Josephson integrated circuits such as ROM (read-only memory) chips and logic array chips, magnetic field-controlled devices are one step ahead.

The unit configuration of such a magnetic field controlled Josephson switching element is typically as shown in FIGS. 1A and 1B, in which a ground plane 2 and an insulating layer 3 are formed on a substrate 1. After that, a Josephson junction consisting of a conductor pattern 4, a tunnel insulating film 5, and a second conductor pattern 6 is formed in the first sub-level above it, and an insulation layer is further formed in the second sub-level above it. Control conductor 8 through layer 7
It has become a form of development.

Since the tunnel insulating film 5 in the Josefson junction is extremely thin, the potential difference between the two conductors 4 and 5 sandwiching it may be zero (zero voltage state) depending on conditions, as is well known.
(ON state) or becomes greater than zero (voltage state or resistance state; OFF state), and the transition between these states, that is, the critical current value, is controlled by the presence or absence or strength of the magnetic field generated by the control conductor 8. be able to.

In addition to the configuration shown in the figure, Josephson switching may be configured such that the Josephson junction is not a tunnel junction as described above but a micro-bridge type, or it is configured as a closed circuit including a three-junction skid. Although there are some elements, their arrangement is generally the same as above.

By using such a unit of Josephson switching element as a 1-bit memory element or cell,
For example, when a two-dimensional ROM chip is constructed by using a total of X×Y in rows and Y columns, Josephson junctions located in each row are connected in series within the same plane, that is, within the first sub-level. On the other hand, the control conductors located in each row are connected in series in a second plane, ie, in a second sub-level, located above the plane in which the Josefson junction is formed. Based on this pattern configuration as a principle, determination of logic "1" or "0" for each coordinate point or address in accordance with the data to be written is performed in the following manner in the conventional circuit configuration method.

For example, a logic "1" indicates that when a current is passed through the control conductor in the second sub-level and a magnetic field is generated, the first sub-level as a magnetically coupled part to the control conductor in the second sub-level generates a magnetic field.
The critical current value of the Josephson junction in the level decreases and the current flowing through this junction causes the junction to switch to a voltage state, whereas a logic "0" indicates that the coordinate point Either the control conductor and the Josefson junction are physically arranged so that they are not magnetically coupled to each other, or
Alternatively, by changing the planar configuration of the insulating film in the Josephson junction, etc., the Josephson junction at the coordinate point does not change to a voltage state even if a current flows through the control conductor.

However, in this conventional circuit configuration method, in order to realize the given ROM content information within the ROM chip, the physical configuration and arrangement of the important functional parts of each Josephson switching element are not required. In the method in which the ROM must be set correspondingly for each coordinate point, if the contents of the ROM are changed, the chip before the change cannot be used at all, and in principle, all the masks used for its production are also lost. It will be wasted.

That is, in such a 2D ROM chip, as mentioned above, one 2D ROM functional level that carries out the 2D ROM function includes a first sub-level that includes a plurality of Josefson junctions, and a control conductor. The mask for creating each sub-level must be a specific two-dimensional pattern for each given ROM content. If the ROM changes, each mask must be re-created to match the changed ROM contents.

Conversely, a group of masks capable of forming a plurality of Josephson junctions of each specific configuration in a predetermined arrangement on the X-Y plane for the first sub-level, and a group of masks for the second sub-level as well. Each group of masks that can be made with a predetermined number of control conductors in a predetermined arrangement on the X-Y plane is prepared and placed, and the
Even if the ROM contents are specified, these mask groups can be used in common, and the rationality of consolidating changes in the two-dimensional pattern for each ROM contents into a separate mask is completely unreasonable with conventional circuit configuration methods. I can't ask for it.

In addition, in order to prevent the generation of magnetic coupling, methods such as detouring the control conductor in the height direction at that part were previously considered, but if such a method is adopted, the magnetic coupling Since the height position of the control conductor is located on a different plane on the Josephson junction where the connection should be made and on the junction where it is not, in some cases the connection part in the height direction may be There are also disadvantages that require It is obvious that vertical connections significantly complicate the manufacturing process, and even a dedicated mask that must be created for each specific ROM content may not be able to be attached to a single mask.

These shortcomings can similarly be noted for Josephson integrated circuits configured according to other specific patterns, such as conventional programmable logic arrays (PLAs). For example, above
In the ROM chip, the magnetically coupled part in the first sub-level is the Josefson junction, and the second sub-level is the Josephson junction.
The magnetic field generating part in the level was a control conductor, but both were Josephson junctions, and both were conductor lines, and at each point, one was the magnetic field generating part and the side that supplied the signal converted into magnetism. It is quite conceivable to configure a Josephson integrated circuit in which the other is a magnetically coupled part that receives this signal and changes its electrical state, but even in such a case, it is possible to When a requirement is made that the electrical behavior of some specific magnetically coupled parts be different from others, conventional circuit construction methods suffer from the same drawbacks as described above for ROM chips. There is no escape.

The present invention has been made in view of the above-mentioned circumstances, and the present invention has been developed in view of the above-mentioned circumstances.
The levels together constitute one two-dimensional functional level that performs a predetermined electrical function, and either the first or second sub-level has the presence or absence of an applied magnetic field. Or, a group of multiple magnetically coupled parts whose electrical state changes depending on their strength,
In the Josephson integrated circuit, the other sub-level is provided with a magnetic field generating section capable of generating a magnetic field to be applied to each of the plurality of magnetically coupled sections. When patterning to make the magnetic coupling between the magnetically coupled part and the magnetic field generating part different from others, even if the pattern is changed, the masks and manufacturing process for creating each sub-level, It is reasonable to be able to use as many parts as possible, so that the mask groups necessary to create the supreme, first, and second sub-levels can be shared regardless of the given pattern, and the pattern information can be consolidated into one mask. The objective is to provide a Josefson integrated circuit with a similar structure.

Furthermore, from a different point of view, even in Josephson 3D integrated circuits in which different 2D functional levels are stacked, one of a pair of 2D functional levels that overlap in the height direction, for example, the upper 2D functional level By considering the sub-level of the above as the first sub-level, the sub-level below the two-dimensional function level as the second sub-level, etc., you can select between the first and second sub-levels. It can be seen that the above main objective can also be applied when assembling an integrated circuit that selectively transmits and receives signals (magnetic fields) only at locations determined according to a unique pattern. Therefore, an additional object of the present invention is to enable such three-dimensional integrated circuits to be assembled simply and rationally without the need for wiring in the height direction.

Embodiments of the present invention will be described below with reference to FIG. 2 and subsequent figures, and components that are the same or similar to the conventional ones are designated by the same or dashed symbols as in FIG. 1.

2A and 2B show a first embodiment of the invention, in which there is a first sub-level on the substrate 1 and above the ground plane 2; , a plurality of Josephson junctions 5, 5', .

A conductive sheet 10 having an opening 20 is formed on the upper layer of the first sub-level through an insulating layer 9, and this sub-level with the insulating layer 9 and the conductive sheet 10 is added to the third sub-level according to the present invention.・It has become a level.

Above this newly formed third sub-level is a structure corresponding to the second sub-level in FIG. A structure is formed in which each control conductor 12, 13, . . . traverses orthogonally each Josephson junction 5, 5', .

Conductor sheet 1 formed in the third sub-level
In this case, the opening 20 opened at 0 is located only under one control conductor 12 among the plurality of control conductors 12, 13..., and there is no opening 20 under the other control conductor 13. . This opening 20 determines the logic of each coordinate point of the given pattern information, or enables signal transmission in the vertical direction only at a specific location, as will become apparent later. It has the function of configuring a port.

However, the control conductor groups do not necessarily have to be arranged in parallel orderly as shown in the figure, but may be diagonal or orthogonal to each other depending on the type of integrated circuit to be constructed.

In this embodiment, a second control conductor 8 is also formed in the insulating layer 9 in the third sub-level, which corresponds only to a particular Josephson junction 5 in the first sub-level below; Therefore, these constitute a Josephson switching element having exactly the same configuration as shown in FIG.
The existence of is not considered.

That is, Josephson junction 5 and control conductor 13,
Considering that another Josephson junction 5' and the corresponding control conductor 12 each constitute a Josephson switching element of the combination shown in the first diagram, without the third sub-level according to the invention, each Josephson The joint parts 5, 5' are
Signals Ig1 and Ig2 processed by an external drive circuit (not shown) or Josephson functional element according to a predetermined procedure
By sending the voltage as a current to each control conductor 12, 13, the voltage state is switched.

However, in this embodiment, these first,
In addition to the second sub-level configuration, an intermediate third sub-level configuration is provided, with one control conductor 1
Since the conductor sheet 10 having the opening 20 is formed only under the opening 20, even if currents Ig1 and Ig2 are applied to both the control conductors 12 and 13 and both of them generate a magnetic field, the conductor sheet 10 straddles the opening 20. Control conductor 1
The magnetic field generated in step 2 is applied as is to the corresponding Josephson junction 5' in the first sub-level, and even if that junction switches to a voltage state, it passes over the conductor sheet in the part without the opening 20. The magnetic field generated by the connected control conductor 13 is prevented from passing through or its energy is reduced by the magnetic shielding effect or eddy current generation effect of the conductive sheet 10, and therefore the corresponding Josephson junction 5 is at zero voltage. Becomes to remain in the state.

That is, the conductive sheet 10 in the third sub-level constitutes a signal (magnetic field) transmission port between the first and second sub-levels at the opening 20.

Also, as is clear from these principles, the individual configurations and mutual arrangement of the plurality of Josefson junctions in the first sub-level, and the individual configuration of the plurality of control conductors in the second sub-level. Even if they have exactly the same configuration, the first and second sub-levels within one two-dimensional functional level can be changed by simply changing the position of the opening 20 when forming the third sub-level. The signal transmission position in the vertical direction between levels can be changed; for example, when configuring a ROM chip, the logic “1” or “0” of each coordinate point can be changed.
The determination can be made simply by embodying the position of the aperture 20.

In other words, the mask for creating important Josefson functional parts can be used in common no matter what the given ROM content is.
The contents of the ROM can be summarized into a single mask that determines the arrangement of the openings in the conductive sheet 10 at the third sub-level.

Furthermore, considering the presence of the control conductor 8 in FIG. 2, this embodiment can perform the signal transmission function in the vertical direction between a plurality of functional levels that overlap vertically in a three-dimensional Josefson integrated circuit without wiring. is also shown.

That is, the first sub-level of the first two-dimensional functional level
Consider as a level the sub-level with each Josefson junction 5, 5', as a second sub-level the sub-level with the control conductor 8, while the first sub-level of the second two-dimensional functional level. As in the first functional level above, a sub-level with each Josefson junction 5, 5', and as a second sub-level the control conductors 12, 13 of the top layer.
Considering certain sub-levels, the illustrated embodiment can also be viewed as a three-dimensional integrated circuit structure in which first and second two-dimensional functional levels are nested within each other.

Therefore, in the illustrated embodiment, signals are transmitted and received in the height direction between the first and second two-dimensional functional levels, which are essentially electrically functionally separated and independent. It also discloses an example of a structure that can be implemented arbitrarily without wiring at a location that is easy to change.

Furthermore, the nested three-dimensional configuration itself as described above was made possible for the first time by the present invention by introducing a conductor sheet configuration that can exhibit a magnetic shielding effect only at selected locations. I can say it.

The conventional three-dimensional configuration was
It has been limited to simply stacking in the height direction a plurality of two-dimensional functional levels that are formed as not only functionally independent but also physically completely separate layers. Therefore, a structure in which a conductive layer for magnetic shielding is formed between adjacent two-dimensional functional levels only to eliminate mutual magnetic interference is disclosed in, for example, Japanese Patent Laid-Open No. 58-89877. However, no consideration was given to the structure of the conductor sheet with openings to enable signal transmission only in specific locations, and the transmission and reception of signals in the height direction was based on the premise of wired connection. Therefore,
Even if such a three-dimensional nested structure as described above had been considered, it would have been virtually impossible to create the height-direction connection portions because it would be extremely difficult to create. Therefore, it can also be said that the present invention provides a large degree of freedom in the method of stacking three-dimensional structures.

When considering the above considerations based on Figure 2, we get
The gist of the present invention is not to think of openings in the conductor sheet, but rather to create a magnetic field generating section provided in either the first or second sub-level, which together constitute one two-dimensional functional level. , in each set with a plurality of magnetically coupled parts provided on the other side, the magnetic field generated by the magnetic field generating part is turned into an eddy current by positionally corresponding to the part of the set whose magnetic coupling is to be canceled. It is more appropriate to view this as providing a sheet-like conductor that can be replaced and/or weakened or blocked by a magnetic shielding effect. Therefore, for example, the second
A conductor piece of an appropriate area may be formed between the control conductor 13 in the figure and the corresponding Josefson junction 5. In terms of manufacturing, it may be easier to create a mask pattern that opens the conductor as shown in the figure, or conversely, it may be easier to create a mask pattern that allows the conductor to be deposited only where it is needed. Sometimes it's better.

The present invention only needs to have the above-described configuration and function, and there are no limitations on the number of stacked functional levels, the size and shape of the opening, etc. As described above, the positions of the openings and the positions of the conductor pieces are set according to the desired planar pattern. For example, in the case of the embodiment shown in FIG. 2, the opening 20 is located so that its center is substantially centered on a line connecting the center 30 of the Josefson joint 5' and the center 31 of the control conductor 12, and It is sufficient to have an extent that includes the joint portion 5', and although the shape is shown as approximately square in the figure, it may be circular, oval, or other shapes. In short, the magnetic field generated by the control conductor 12 is effective only at the Josephson junction 5' (one is shown in the figure, but there may be more than one) in the other sub-levels to be controlled by it. Any arrangement or shape may be used as long as it is effective and does not affect other Josephson joints adjacent thereto.

In addition, in FIG. 2, the signal transmission direction at the sub-level signal transmission port is from top to bottom.
This can be done in a reverse configuration, i.e. in the first sub-level below as shown in the third diagram, control conductor groups 12, 13, . . .
Of course, it is also possible to form Josephson junctions 5, 5', . . . in the upper second sub-level so that the signal transmission direction is from bottom to top.

In addition, the embodiment shown in FIG. 4 is modified so that the layer where each conductor line 8, 8' in the insulating layer 9 is located is the first sub-level, and the layer where each conductor line 12, 13 is located is the second sub-level. Considering the sub-levels, the magnetic field can be canceled between the corresponding pair of conductor lines 8, 12 only through the opening 20 formed in the conductor sheet 10 in the third sub-level formed between them. Through effects such as , reciprocity, etc., signals can be exchanged bidirectionally. In such a case, both conductor lines
It can be said that it is both a magnetic field generating part and a magnetically coupled part.

Furthermore, as mentioned earlier, even if the Josephson functional part is used as the magnetically coupled part,
A current injection type element, a micro bridge type element, etc. different from those shown in the drawings may be used. These matters also apply to the following examples.

Still another embodiment of the present invention will be described with reference to FIGS. 5A, B, and C. In this embodiment, a plurality of control conductors 41, 42, . Holding conductor sheet 1
0, and further gate conductors 51, 52, . . . , 54 are formed in the vertical direction with an insulating layer 11 interposed therebetween. In this case, the Josefson junction 51'
. . . are arranged at each intersection of each gate conductor and each control conductor, and these are simply represented by the symbol "X" in FIG. 5A.

In this embodiment as well, the sub-conductor where the control conductor group is formed is
If the level is the first sub-level and the sub-level where the gate conductor group is formed is the second sub-level, the conductor structure with openings according to the present invention is the third sub-level. It can be seen that it is inserted between two sub-levels.

In the above configuration, the gate conductor 51 and the control conductor 4
5B shows a case where the conductor sheet 10 in the third sub-level has an opening 20, and FIG. 5C shows a case where the opening 20 does not exist. However, for simplicity, the substrate and the ground plane thereon are omitted in these drawings.

The effects of this embodiment will be explained below.

One of the control conductors 41, 42, ..., 43,
For example, when the control conductor 43 is selected and a current is passed through it, the control conductor 43 and the gate conductors 51 and 53
At the intersection with , there is an opening 20 in the conductor sheet 10 in the third sub-level, so that the generated magnetic field reaches the corresponding Josephson junctions 51' in the second sub-level and Transition to voltage state. Therefore, a voltage is generated at the corresponding terminals 61 and 63.

However, on the other hand, even in the third sub-level, there is no opening 20 corresponding to the intersection of control conductor 43 and gate conductors 52, 54 (i.e., conductor 1
0), the magnetic field generated by the control conductor 43 does not reach the Josephson junction corresponding to these intersection points due to the magnetic shielding effect of the conductor 10 or the magnetic flux canceling effect due to the eddy current. Therefore, no significant voltage is developed at terminals 62, 64.

In this manner, in this embodiment, by selectively driving each control conductor, a voltage pattern or a logic pattern can appear on the terminals 61, 62, . . . , 64 according to the arrangement pattern of the openings 20. That is, this embodiment is a mask ROM that can collectively store information in one mask as a pattern arrangement of openings or conductors.

Generally, chips with control procedures embedded in ROM can realize unique functions by specifying the contents of this ROM, but when creating such ROM chips using conventional circuit configuration methods, As mentioned earlier, this required a complex set of multiple ROM masks, each with its own set of masks for each ROM content, making it complex to manufacture and lacking flexibility in changing the content. However, it also had the disadvantage that it was difficult to check the logical content.
Also, in some special cases, it was possible to keep the logical content in a single mask, but
Since such a method changes the planar configuration of the Josefson joint within one sub-level, the ROM content must be determined at the beginning of the manufacturing process, and there is still little flexibility. Ta. In addition, even if the mutual arrangement of the important functional parts that perform Josephson's functions as described above requires changes for each content, this means that the electrical characteristics of chips with different ROM contents will vary after they are manufactured. There is a possibility that a difference may occur, and this is by no means desirable.

On the other hand, in the ROM chip shown in FIG. 5, which is constructed in accordance with the idea of the present invention, the given ROM contents can be easily concentrated in one opening or conductor pattern forming mask, and therefore the corresponding Even if the contents of the ROM are changed, there is no need to change the important functional parts that operate Josephson's functions, and checking the contents is also extremely easy.

Furthermore, as understood from the above, the conductor member 10 in the present invention only has to have the effect of selectively attenuating magnetic energy, so the third sub-level forming the conductor member is the third sub-level. It is not limited to between the first and second sub-levels, but may be provided above or below. Therefore, in accordance with this idea in the embodiment shown in the fifth figure, the third sub-section is
Placing the level on the top layer not only makes it easier to check the contents, but also makes it easier to check the contents.
Since it can be on standby in a state that has already been created on top of the ROM, it is possible to immediately respond to the requested ROM contents.

In addition, various modifications and considerations described in connection with the previous embodiments can be applied to the embodiment shown in FIG. 5 as they are.

Next, FIG. 6 shows a case in which a PLA chip is constructed in accordance with the idea of the present invention.

In the figure, the "X" mark indicates the Josefson junction as before, but the solid "X" is connected to the solid conductor pattern, and the broken "X" is connected to the dashed conductor pattern. Also, the first stage ROM/OR
The plane is configured according to the present invention, and the intermediate AND plane may have the conventional configuration.

Input logical variables a,,b,,c,,...,
When z is input to the first stage ROM/OR plane,
A variable pair is determined according to the arrangement pattern of the opening 20 to the conductor 10 in the plane, and the next-stage AND
Enter the plane. In the illustrated example, the outputs from the AND plane are a, b,...,
c.

These intermediate outputs are grouped by the final stage ROM/OR plane, and at the same time, an OR operation is performed, and in this case, a・b+
a・, b・c, ..., ・ are obtained. still,
φ output represents zero output.

In this way, this embodiment uses the ROM according to the present invention.
In the first stage, the plane is used only to determine pairs of variables, and in the final stage, it is used to perform OR operations as well.

Next, in accordance with FIG. 8, we will explain how to configure an AND circuit or an OR circuit that maintains an input/output separation relationship according to the present invention.Before that, FIG. Show and explain AND and OR gates.

Under conditions in which control currents Ig3 and Ig4 can be selectively applied to the two parallel control conductors 44 and 45, only one of the currents causes the Josephson junction 55 below it to transition to a voltage state. If it is possible to This constitutes an AND gate. Therefore, whether to use an AND gate or an OR gate is determined based on various parameters such as physical layout and the magnitude of applied current.

For example, in the circuit configuration shown in FIG.
Alternatively, by increasing the distance between the control conductors 44, 45 and the Josephson junction 55', the magnetic field created by the control conductors 44, 45 at the Josephson junction is weakened, and the sum of the two causes the Josephson junction 55' to If you try to make the transition to the voltage state
An AND circuit can be configured, and on the other hand, the control currents Ig3, Ig
4 alone or by shortening the distance between the control conductor and the Josefson junction 55' to strengthen the magnetic field created by the control conductors 44 and 45 at the Josephson junction 55', so that the magnetic field created by either control current An OR circuit can be constructed by making it possible to break the zero voltage state of Josephson junction 55'.

In such an AND circuit or an OR circuit, it is possible to logically AND or OR the both control conductors, and the output representing the result of the operation includes a Josephson junction separately from the control conductor on the input side. It can be extracted from the railroad tracks.

However, as can be understood from the above, although the basic configuration itself should be the same for AND circuits and OR circuits, when actually realizing the circuit, conventional circuit configuration methods differ between AND circuits and OR circuits. Because it is necessary to change the distance between the control conductor and the Josefson junction, or to change the width of each control conductor, it is necessary to prepare in advance a pair of control conductor and Josephson junction that are geometrically identical in configuration. , Is it possible to add an AND circuit later in response to user requests?
It is completely impossible to selectively decide whether to use an OR circuit.

Still another embodiment of the present invention, shown in FIG. 8, can avoid these drawbacks of the conventional example, and the current intensity to the control conductor, the geometric arrangement relationship with the Josefson junction, the distance relationship, etc. Keeping it constant,
According to the request, conversion from an OR circuit to an AND circuit can be realized by simply changing the aperture pattern or conductor pattern in the third sub-level.

That is, in this embodiment, an OR circuit configured according to the basic configuration shown in FIG. 7, which has already been described, is used in the Josefson function section. Specifically, a pair of Josephson switching functions are shown, each consisting of control conductors 44, 45 and Josephson junction 55';
The arrangement is such that only one current Ig3 or Ig4 applied to one of the control conductors 44 or 45 can cause the corresponding Josephson junction 55' to transition into a voltage state.

Of course, even in such a configuration, the surface on which the Josephson junction 55' is located can be considered as the first sub-level, and the surface on which the control conductors 44 and 45 are located can be considered as the second sub-level. However, the insulating layer between conductors and the like are omitted for simplicity.

Therefore, the OR by the first and second sub-level pairs configured to perform the OR function in this way
In accordance with the idea of the present invention, this embodiment newly introduces a third sub-level to the functional level, forms a conductor sheet 10' with an opening in this third sub-level, and forms an opening 20'. The above OR for the Josephson switching function corresponding to a certain location.
While the function is allowed to operate as is, the Josephson switching function section corresponding to the place where there is no conductor member, that is, the place where there is a conductor member, converts its original OR function to an AND function.

More specifically, in this embodiment, a third sub-level is formed as the top layer above each control conductor layer, and in the figure, the control conductors 44, which control the right-hand Josefson junction 55'; An aperture 20' is formed in the conductor sheet 10' in the third sub-level above 45, while there is no aperture above the Josephson switching feature on the left hand side in the figure.

Therefore, in the Josephson switching function section in which the opening 20' is provided, there is nothing to weaken the magnetic field Hi generated by the control conductors 44 and 45, so the Josephson switching function section cannot perform its original OR function. can be done, but
In the Josephson switching function part without the opening 20', that is, the part covered above by the conductor sheet 10', the magnetic field generated by each control conductor 44, 45 is
Hi′ is converted into eddy current within the conductor sheet and is partially consumed, so current flows in both conductors 44 and 45.
If Ig3 and Ig4 are not allowed to flow, the Josephson junction 55' below them will not transition to a voltage state.

As is clear from the above, this example
By creating and placing only a predetermined number of OR circuits in a predetermined pattern in advance, and later determining the opening pattern or conductor pattern according to the desired planar pattern, an AND circuit pattern corresponding to the pattern can be obtained. It can be seen that the circuit configuration method is shown.

Incidentally, since the conductor sheet only needs to be capable of weakening the magnetic field generated by the control conductors 44 and 45 in the planned Josefson switching function section, various modifications can be considered.

For example, as shown in FIG. 9A, the conductor pieces 21 may be arranged according to a predetermined pattern instead of the conductor sheet 10' with openings, or as shown in FIG. It may also be arranged between the Josefson junction 55' and the control conductors 44, 45 in the level. Furthermore, as shown in FIG.
21, and in particular this last modification, the third sub-level added by the present invention may optionally be integrated into the first and second sub-levels constituting the existing Josephson switching function.・It also shows that it may be located at the same height as the level.

However, this is a principled way of thinking, and of course, if each sub-level is viewed as a tangible object and a completely separate membrane structure or layer structure, then the first and second sub-levels - It is spatially impossible for a third sub-level to exist at the same height position as either of the levels.

However, conversely, one of the first and second sub-levels is a level where a magnetically coupled part such as a Josephson junction exists, and the other sub-level is a level where a magnetically coupled part such as a Josephson junction exists. The third sub-level is defined as the level in which magnetic field generating parts such as control conductors that selectively apply a magnetic field to the coupling part are provided, and the third sub-level is defined as the level in which magnetic field generating parts such as control conductors are provided that selectively apply a magnetic field to the coupling part. If defined as a level having a patterned conductive member that weakens or blocks the magnetic coupling with the magnetic coupling part, for example, as shown in FIG. 9C above, the control conductors 44, 45
If the sub-level in which the conductor members 21, 21 are formed is defined as the second sub-level, and additional conductor members 21, 21 are formed at the same height position according to the present invention, these Even if the height positions where the control conductors 44, 45 and the conductor members 21, 21 are formed are both at the second sub-level and at the same time at the third sub-level, there is no contradiction as an expression of the technical idea. .

However, in general, it is easier to understand the word sub-level when it has a concept of something tangible, so when used as an expression to express the gist of the present invention, there is a risk that it may be somewhat vague. We avoid principled expressions such as those mentioned above, and treat each sub-level as if it were a tangible object.

Note that in both the embodiments shown in FIGS. 8 and 9, the number of control conductors is not limited to two, but can be three or more.

Furthermore, in each figure of FIG. 9, the conductor members such as the conductor pieces 21, 21 are formed at the same height position as the sub-level where the Josephson junction, which is an example of the magnetically coupled part, is formed. Examples are not shown.

However, as is already clear from the above description, the conductor member used in the present invention converts the generated magnetic field selectively applied by the magnetic field generating part to the magnetically coupled part into an eddy current, and (Alternatively) It is sufficient if the magnetic shielding effect can be used to weaken or block the magnetic field, so for example, even if a conductor piece is placed side by side at the same height as the Josephson junction in Figure 9, the control conductor as a magnetic field generating part will not work. By making the magnetic field generated by the conductor cross this conductor piece, the magnetic field generated by the corresponding magnetic field generator can be weakened or blocked for the juxtaposed Josefson junction of this conductor piece as intended. Can be done. Of course, now that the present invention has been disclosed, construction of a suitable conductor member pattern shape, etc. is a matter of arbitrary design for those skilled in the art.

The structure shown in FIG. 9A has the feature that the relative pattern relationship of AND/OR can be determined according to the user's request after the manufacturing process of the main functional parts is completed. In the structure shown in B, the ROM program shown in Figure 5 is
It has the feature that it can be performed at the same mask level as determining the relative pattern relationship of AND/OR.

FIG. 10 shows an example of a PLA constructed by partially using the embodiments shown in FIGS. 8 to 9.

In the figure, the first stage and the last stage are ROM/OR planes configured in the embodiment shown in FIG. 5, as already explained with reference to FIG. This is an AND/OR plane configured according to the embodiment shown in FIG.

When logical variables a,,b,,c,,..., are input to the first stage ROM/OR plane, the sixth
As in the figure, variable pairs are determined by the first-stage ROM/OR plane and input to the next-stage AND/OR plane. Here, an AND or OR operation is performed depending on the presence or absence of the opening 20'.

As a result, in the illustrated example, the outputs of the AND/OR plane are a+b, ·, ..., respectively.
It becomes +.

These are grouped by the final stage ROM/OR plane, and at the same time an OR operation is performed.
Final output a+b+・,b・c,...,+
is obtained. The first and last stages are PLA as shown in Figure 6.
The reason why the output of the final stage is different even though the configuration is exactly the same is that the OR circuit is constructed by providing a pattern of openings 20' in the intermediate AND/OR plane.

In this way, by using the ROM/OR plane, AND/OR plane, etc. to which the present invention is applied, it is possible to configure a PLA with more diverse functions than the conventional PLA. This is more noticeable when the number of AND gates is limited. For example, according to the conventional circuit configuration method, if the number of AND circuits is n, it is possible to realize logical product of only up to n, but if a configuration like the embodiment of the present invention is adopted, up to 2n It is possible to realize the logical product of

Various embodiments have been described in detail above, but according to the present invention, a two-dimensional functional level in which the first and second sub-levels that overlap vertically together perform a predetermined electrical function. , and one of the first and second sub-levels includes a plurality of groups of magnetically coupled parts whose electrical state changes depending on the presence or absence or strength of an applied magnetic field. ,
In the Josephson integrated circuit, the other sub-level is provided with a magnetic field generating section capable of generating a magnetic field to be applied to each of the plurality of magnetically coupled sections. When patterning to make the magnetic coupling between the magnetically coupled part and the magnetic field generating part different from other states, the patterning is made extremely easy, and
Even if the pattern is changed, it is possible to reuse as many parts as possible, such as the masks and production processes for creating each sub-level, and therefore the mask groups necessary for creating the supreme, first, and second sub-levels can be provided. It is possible to provide a Josephson integrated circuit with a rational structure that can be shared regardless of the pattern and the pattern information can be integrated into one mask.

Furthermore, in a Josephson three-dimensional integrated circuit in which different two-dimensional functional levels are stacked, for example, among a pair of two-dimensional functional levels that overlap in the height direction, the upper sub-level of the lower two-dimensional functional level is placed first. By considering the sub-level of the upper two-dimensional functional level as the second sub-level, etc., it is possible to The present invention can also be effectively applied when assembling an integrated circuit that selectively transmits and receives signals (magnetic fields) only at predetermined locations.

Moreover, the stacking method for each two-dimensional functional level of the three-dimensional integrated circuit can be quite arbitrary, so it can be stacked simply one by one, or it can have at least some nested overlapping parts. Since it is possible to send and receive signals at a predetermined location between the necessary upper and lower sub-levels without wiring in the height direction, it is important to know how to send and receive signals between two-dimensional levels when building such a three-dimensional integrated circuit. This not only fundamentally solves the conventional problem of whether or not to use the product, but also has the effect of greatly increasing the degree of freedom in design and production.

[Brief explanation of drawings]

Figure 1 shows the existing Josephson switching system.
FIG. 2 is a schematic diagram of a Josephson integrated circuit according to an embodiment of the present invention, and FIGS. 3 and 4 are modifications of the circuit shown in FIG. 2. A schematic configuration diagram of another embodiment; FIG. 5 is an explanatory diagram of a configuration example of a Josephson mask ROM constructed by applying the present invention;
The figure shows the Josephson mask shown in Figure 5.
Josephson PLA constructed using ROM in part
Schematic diagram of the configuration, Figure 7 shows the conventional Josephson
A schematic configuration diagram of an OR circuit or an AND circuit, FIG. 8 is based on the OR circuit shown in FIG. 7, and by applying the present invention, a part thereof has an AND function.
An explanatory diagram of a configuration example of an AND/OR circuit, Fig. 8
An explanatory diagram of a modified example of the configuration example shown in the figure, FIG. 10 is an AND/OR plane according to the present invention.
1 is a schematic configuration diagram of an example of a Josephson PLA configured using a ROM/OR plane. In the figure, 1 is the board, 2 is the ground plane,
3, 7, 9, 11 are interlayer insulating films, 4, 6, 6',
51, 52, 53, 54, 55 are gate conductors,
5, 5', 51', 55' are Josephson junctions,
8, 12, 13, 41, 42, 43, 44, 45
1 is a control conductor, 10 and 10' are conductor sheets used to construct the present invention, 20 and 20' are openings in the conductor sheets, and 21 is a conductor piece used to construct the present invention.

Claims (1)

[Claims] 1. The presence or absence of a magnetic field that is provided in a fixed arrangement pattern and applied to one of the first and second sub-levels that spatially overlap vertically. or a plurality of magnetically coupled portions whose electrical states change depending on the strength; provided in a fixed arrangement pattern on the other sub-level of the first and second sub-levels; a plurality of magnetic field generating sections capable of selectively applying a magnetic field to each of the target coupling sections; The magnetically coupled portion is selected from among the plurality of magnetically coupled portions by being provided on the third sub-level at a different height from the second sub-level and having the desired geometric pattern shape. A conductive member for weakening or blocking a magnetic field applied from the corresponding magnetic field generating section to the magnetically coupled section.