JPH02154156A - Measuring instrument for electronic circuit - Google Patents

Abstract

PURPOSE:To improve the measurement accuracy by separating the application line of the part between a measurement terminal and a terminal to be measured and a measurement line by the contacts of both the terminals. CONSTITUTION:A voltage or current which is required to measure the electronic circuit is applied from a measuring instrument main body 1 to an application terminal 12 through the application cable 7 and applied to a circuit 11 to be measured through the terminal 10 to be measured. A voltage generated at the terminal 10 is measured by the main body 1 through the measurement terminal 13 and measurement cable 8. In this case, the terminals 12 and 13 are joined together across an electric insulation layer 14 so as to make the measurement terminal extremely small. Thus, the application line and measurement line can be separated by the contacts of the measurement terminal and terminal to be measured, the voltage generated at the terminal to be measured can be measured through the measurement line without being affected by a voltage drop due to the internal resistance of the measurement terminal of the application line and the contact resistance between the measurement terminal and terminal to be measured.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an electronic circuit measuring device for measuring the electrical characteristics of an electronic circuit with accuracy.

2. Description of the Related Art In recent years, electronic circuits, as typified by semiconductor devices, have become increasingly finer and smaller in size, and a method for measuring electrical characteristics has become necessary.

A conventional electronic circuit measuring device will be described below.

FIG. 2 shows the configuration of a conventional microelectronic circuit measuring device.

1 is an electronic circuit measuring device body (hereinafter abbreviated as “measuring device body”), 2 is a variable voltage source built into the measuring device body 1, 3 is a variable voltage source, 4 is an ammeter, 5 is a voltmeter, and 6 is a current application,
This is a switch that changes voltage application. 7 is a cable for applying voltage and current signals from the measuring device main body 1 to the measuring terminal 9 (hereinafter abbreviated as application cable); 8 is a cable for transmitting the voltage detected by the measuring terminal 9 to the measuring device main body 1 (hereinafter abbreviated as a measurement cable), 9 is a measurement terminal that comes into contact with the terminal to be measured 10 .

10 is a terminal to be measured that is brought into contact with the measurement terminal 9. 11
is an electronic circuit that is the circuit under test.

The operation of the electronic circuit measuring device configured as described above will be described below.

First, from the measuring device main body 1, after switching between voltage application and current application using the switch 6, the variable voltage source 2 or
Voltage and current signals necessary for measuring the electronic circuit are applied from the variable current source 3 and the ammeter 4 to the measurement terminal 9 through the application cable 7, and then to the terminal to be measured 10. Then, the voltage generated in the circuit to be measured 11 is passed through the terminal to be measured 10, the measurement terminal 9, and the measurement cable 8, and is measured by the voltmeter 5 of the measuring device main body 1. At this time, the measurement cable 8 is connected as close as possible to the terminal to be measured 10 so that the voltmeter 5 is not influenced by errors due to voltage drops caused by currents flowing through the application cable 7 and the measurement terminal 9.

Problems to be Solved by the Invention However, in the conventional configuration described above, since a terminal with a single structure is used, it is not possible to separate the application line and the measurement line at the measurement terminal 9, so that the internal resistance of the measurement terminal 9 and the circuit This method has a disadvantage in that it cannot eliminate errors due to voltage drop in contact resistance between the measuring terminal 9 and the terminal to be measured 10, which is increasing with miniaturization.

The purpose of the present invention is to eliminate the above-mentioned errors, accurately measure electrical characteristics, and An object of the present invention is to provide a measuring device for electronic circuits with improved M-thinness.

Means for Solving the Problems To achieve this object, the electronic circuit measuring device of the present invention is equipped with a measurement terminal that measures voltage at a contact different from the contact that applies voltage and current. .

Effect: With this configuration, at the contact point between the measurement terminal and the terminal under test,
Because the application line and measurement line inside the measurement terminal can be separated, the voltage drop at the measurement terminal in the application line is not affected by the internal resistance of the measurement terminal and the contact resistance between the measurement terminal and the terminal under test. Since the generated voltage can be measured on the measurement line, measurement accuracy can be improved while maintaining the fineness of the measurement terminal.

EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings. FIG. 1 shows the configuration of an electronic circuit measuring device according to an embodiment of the present invention.

In FIG. 1, reference numeral 12 denotes a conductive application terminal that contacts the terminal to be measured IO in order to apply voltage and current signals. Reference numeral 13 denotes a measurement terminal that comes into contact with the terminal to be measured 10 in order to measure the voltage generated at the terminal to be measured 10 . 14
is an insulating layer for physically joining the application terminal 12 and the measurement terminal 13 in an electrically insulated state. In addition, 1 is the measuring device main body, 7 is the application cable, 8 is the measurement cable,
10 is a terminal to be measured, and 11 is a circuit to be measured, which have the same configuration as the conventional example.

The operation of the electronic circuit measuring apparatus of this embodiment configured as described above will be described below.

First, from the measuring device main body 1, the voltage or current necessary for measuring the electronic circuit is passed through the application cable 7 and applied to the application terminal 12.
is applied to the circuit under test 11 through the terminal under test 10. Then, the voltage generated at the terminal to be measured 10 is passed through the measurement terminal 13 and the measurement cable 8, and is measured by the measurement device main body 1. At that time, in order to miniaturize the measurement terminal,
The application terminal 12 and the measurement terminal 13 are connected to each other with an electrical insulating layer 14 sandwiched between them.

As described above, according to this embodiment, the application line and the measurement line can be separated at the contact point between the measurement terminal and the terminal under test, so that the internal resistance of the measurement terminal in the application line and
The voltage generated at the terminal to be measured can be measured on the measurement line without being affected by voltage drop due to contact resistance between the terminal to be measured and the terminal to be measured. Since only voltage is measured in the measurement line, almost no current flows, and errors due to voltage drop due to internal resistance of the measurement terminal and contact resistance between the measurement terminal and the terminal to be measured are extremely small.

Effects of the Invention The present invention has achieved miniaturization and high precision by separating the application line and measurement line in the measurement terminal that contacts the circuit under test, and joining the application terminal and measurement terminal with an insulating layer in between. This makes it possible to realize an excellent electronic circuit measuring device.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of an electronic circuit measuring apparatus according to an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional electronic circuit measuring apparatus. l... Measuring device body, 2... Variable voltage source, 3... Variable current source, 4... Ammeter, 5... Voltmeter, 6... Application mode changeover switch, 7... Application cable, 8...
...Measurement cable, 9...Measurement terminal, 10
...Terminal to be measured, 11... Circuit to be measured, 12... Application terminal, 13... Measurement terminal, 14... Insulating layer . Name of agent: Patent attorney Shigetaka Awano and one other person (□Yo)

Claims (1)

[Claims] a first contact that applies voltage and current to the terminal under test;
A measuring device for an electronic circuit, comprising a second contact that comes into contact with the terminal to be measured and measures the voltage, the first contact and the second contact being separated by an insulator and connected to each other. .