JPH02152009A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH02152009A JPH02152009A JP30504788A JP30504788A JPH02152009A JP H02152009 A JPH02152009 A JP H02152009A JP 30504788 A JP30504788 A JP 30504788A JP 30504788 A JP30504788 A JP 30504788A JP H02152009 A JPH02152009 A JP H02152009A
- Authority
- JP
- Japan
- Prior art keywords
- recording layer
- layer
- recording medium
- magnetic
- recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 13
- 239000011029 spinel Substances 0.000 claims abstract description 6
- 229910052596 spinel Inorganic materials 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 abstract description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 238000001771 vacuum deposition Methods 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 abstract description 2
- 239000011521 glass Substances 0.000 abstract description 2
- 239000010453 quartz Substances 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 2
- 230000035699 permeability Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- -1 i-wafers and GGG Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は垂直磁気記録及び光磁気記録に用いられる高密
度磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a high-density magnetic recording medium used for perpendicular magnetic recording and magneto-optical recording.
高密度磁気記録媒体として基板上にＮｉ −Ｚｎフェラ
イト、Ｍｎ −Ｚｎフェライト等のスピネルフェライト
（スピネル型結晶構造を有するフェライト）の（１１１
）配向膜からなる下地層とその上にマグネトプランバイ
ト型フェライトＣ軸配向膜をエピタキシャル的に成長さ
せて垂直磁化膜からなる記録層を設けたものが知られて
いる。しかしＣ軸配向膜の記録層を得るには基板をかな
り高温にする必要がある等の問題点を有するものであっ
た。しかもＣ軸配向膜が得られてもその配向性は充分と
は云えなかった。As a high-density magnetic recording medium, (111
) It is known to have a recording layer made of a perpendicular magnetization film formed by epitaxially growing a magnetoplumbite-type ferrite C-axis orientation film on the underlayer made of an orientation film. However, in order to obtain a recording layer of a C-axis oriented film, it is necessary to heat the substrate to a considerably high temperature. Moreover, even if a C-axis oriented film was obtained, its orientation could not be said to be sufficient.
本発明は従来技術における以上のような問題を解消し、
記録層のＣ軸配向性の良好な磁性膜を低温でも容易に形
成できる磁気記録媒体を提供することである。The present invention solves the above-mentioned problems in the prior art,
An object of the present invention is to provide a magnetic recording medium in which a magnetic film having a recording layer with good C-axis orientation can be easily formed even at low temperatures.
本発明の磁気記録媒体は基板上に下地層とマグネトプラ
ンバイト型フェライトＣ軸配向膜からなる記録層とを設
けた磁気記録媒体において。The magnetic recording medium of the present invention is a magnetic recording medium in which an underlayer and a recording layer made of a magnetoplumbite type ferrite C-axis alignment film are provided on a substrate.
下地層がＡｆｌを含むスピネルフェライトの（１１１）
配向膜からなることを特徴とするものである。(111) of spinel ferrite whose underlayer contains Afl
It is characterized in that it consists of an alignment film.
本発明の磁気記録媒体は第１図に示すように基本的には
基板上上に前述のような下地層２及び記録層３を設けた
ものである。As shown in FIG. 1, the magnetic recording medium of the present invention basically has the above-described underlayer 2 and recording layer 3 provided on a substrate.
本発明において、基板としては石英等のガラ大基板、Ｓ
ｉウェハー、ＧＧＧ等の単結晶基板、Ａｌ等の金属基板
、ＰＣ，ＰＭＭＡ等のプラスチック基板等が使用される
。そして、下地層としては、■Ｍ、 Ｆｅ、−ｘＡ １
２ Ｘ０４
（但し、Ｍ■はＭｇ、Ｚｎ、Ｎｉ、Ｃｏ、Ｍｎ、Ｃｕ、
Ｆｅ、ＬＬの少なくとも１種、０＜ｘ＜１．５）
■ＭＩＦａ、 −ＸＡ Ｑ Ｘ！’ｈ ｙ（Ｌ（但し、
河はＧａ、Ａ Ｑ 、Ｉｎ、Ｃｒ、Ｓｃの少なくとも１
種）
で示され、室温で磁気特性をもつＡｌを含むスピネルフ
ェライトの（１１１）配向膜が使用される。In the present invention, the substrate is a glass large substrate such as quartz, S
Single crystal substrates such as i-wafers and GGG, metal substrates such as Al, and plastic substrates such as PC and PMMA are used. And, as the base layer, ■M, Fe, -xA 1
2 X04 (However, M■ is Mg, Zn, Ni, Co, Mn, Cu,
At least one of Fe, LL, 0<x<1.5) ■MIFa, -XA Q X! 'hy(L(However,
The river contains at least one of Ga, AQ, In, Cr, and Sc.
A (111) oriented film of spinel ferrite containing Al, which has magnetic properties at room temperature, is used.
この下地層の格子定数としては基板の熱膨張係数及び記
録層の作製温度によっても異なるが。The lattice constant of this underlayer varies depending on the thermal expansion coefficient of the substrate and the manufacturing temperature of the recording layer.
ａ ＝８．３３人程度又はそれ以下が好ましい、磁気特
性としては保持力（Ｈｅ）が小さく飽和磁化（Ｍｓ）の
大きなものがよく、）としてＮｉ−Ｚｎ又はＭｎ−Ｚｎ
等が適当である。具体的にはＮ１０．５ＺｎＯ，ＳＦ”
１．５Ａｌ１１．ＳＯ４１Ｍｎｏ、５７−ｎｏ、Ｊ６１
．６Ａ Ｉｌ ００５０４等が挙げられる。これら下地
層２は真空蒸着、スパッタリング等の方法で形成できる
。It is preferable that a = about 8.33 or less.As for magnetic properties, it is preferable to have a small coercive force (He) and a large saturation magnetization (Ms).
etc. are appropriate. Specifically, N10.5ZnO, SF”
1.5Al11. SO41Mno, 57-no, J61
．． 6A Il 00504 and the like. These base layers 2 can be formed by methods such as vacuum deposition and sputtering.
一方、記録層３の材料としては下記一般式で示されるよ
うなマグネトプランバイト型フェライトが使用される。On the other hand, as a material for the recording layer 3, magnetoplumbite type ferrite as shown by the following general formula is used.
一般式：
％式％
（但しＭ、はＢａ、Ｓｒ及びｐｂの少くとも１種；−は
Ｌａ、 Ｃａ及びＢｉの少くとも１種；河薦はＣｏ、
Ｔｉｔ Ｎｂ、 Ｔａ、 Ｎｉ、 Ｗ。General formula: % formula % (where M is at least one of Ba, Sr and PB; - is at least one of La, Ca and Bi; Kawasaki is Co,
Tit Nb, Ta, Ni, W.
Ｍｎ、 Ｃｒ、 Ｉｎ、 Ｇａ及びＡｌの少くとも１種
；０≦Ｘ≦０．７． Ｏ≦ｙ≦８）
一般式の具体例：
ＢａＦｅＢ、４ｚＣｏＸＴｉｘＯ□、 （０，３≦Ｘ≦
０．８）ＳｒＦｅ、、２）（ＣｏＸＴｉ）（Ｏ□、 （
０，３≦Ｘ≦０．８）Ｂａｉ−ＩＫＬａ）ｌＦｅ、、
−ｘ−ｚｙＣＯＸｗｙＴ１７０ｚｓ（０，１≦Ｘ≦０．
４．０．２≦ｙ≦０．６）Ｓｒ、−１Ｐｂ）（Ｆｅ１２
−２ｙｃｏｙＴｉｙｏ□ｇ（Ｏ，ＯＳ≦ス≦０．２，０
．３≦ｙ≦０．８）ＳｒＦｅ、、 ＸＧａＸ０ｔｓ（
０−５≦Ｘ≦４）ＳｒＦｅｉ、ｚＸ−７ＣＯＸＴ４ＸＧ
ａＶＯ１ｓ（０，３≦Ｘ≦０．８． ０．５≦ｙ≦４）
なお記録層の形成法も下地層と同様、真空蒸着、スパッ
タリング等の方法が適用される。厚さは０．０５〜０．
５μｍ程度が適当である。At least one of Mn, Cr, In, Ga, and Al; 0≦X≦0.7. O≦y≦8) Specific examples of general formula: BaFeB, 4zCoXTixO□, (0,3≦X≦
0.8) SrFe, 2) (CoXTi) (O□, (
0,3≦X≦0.8)Bai-IKLa)lFe,,
-x-zyCOXwyT170zs(0,1≦X≦0.
4.0.2≦y≦0.6)Sr, -1Pb)(Fe12
−2ycoyTiyo□g(O,OS≦S≦0.2,0
．． 3≦y≦0.8)SrFe,, XGaX0ts(
0-5≦X≦4) SrFei, zX-7COXT4XG
aVO1s (0,3≦X≦0.8. 0.5≦y≦4)
Note that the recording layer can be formed by vacuum deposition, sputtering, or the like, similar to the underlayer. The thickness is 0.05~0.
Approximately 5 μm is appropriate.
本発明の磁気記録媒体を光磁気記録媒体として使用する
場合は、第２図に示されるように高透磁率層４を記録層
３上に設けるか、第３図に示されるように反射層５を設
けてもよく、あるいは第４図に示されるように高透磁率
層４及び反射層５を併設してもよい。光磁気記録媒体に
高透磁率層４を設けることにより、記録層３にかかる反
磁界をさらに小さくすることができる。When the magnetic recording medium of the present invention is used as a magneto-optical recording medium, a high magnetic permeability layer 4 is provided on the recording layer 3 as shown in FIG. 2, or a reflective layer 5 is provided on the recording layer 3 as shown in FIG. Alternatively, as shown in FIG. 4, a high magnetic permeability layer 4 and a reflective layer 5 may be provided together. By providing the high permeability layer 4 in the magneto-optical recording medium, the demagnetizing field applied to the recording layer 3 can be further reduced.
高透磁率層４としては下地層２と同一のもの又はパーマ
ロイ等が使用できる。パーマロイ等の金属膜を使用した
場合は反射層としての機能をも有する。反射層５として
はＡｕ、Ａｇ、Ｃｕ、Ｃｒ、Ａ １１等の金属膜又は誘
電体多層膜が使用できる。また、第２図〜第４図の構成
に、断熱、多重反射の効果を利用するために５ｉＯ）Ｂ
、５ｉａＮ４等の中間層を１層又は複数摺入れることも
できる。As the high magnetic permeability layer 4, the same material as the underlayer 2 or permalloy or the like can be used. When a metal film such as permalloy is used, it also functions as a reflective layer. As the reflective layer 5, a metal film such as Au, Ag, Cu, Cr, A11, etc. or a dielectric multilayer film can be used. In addition, in order to utilize the effects of heat insulation and multiple reflection in the configurations shown in Figures 2 to 4, 5iO)B
, 5iaN4 or the like may be inserted one or more times.
また、本発明の磁気記録媒体を垂直磁気記録媒体として
使用する場合は、第５図に示されるようにＣ等の潤滑層
６を加えてもよい。Further, when the magnetic recording medium of the present invention is used as a perpendicular magnetic recording medium, a lubricating layer 6 of C or the like may be added as shown in FIG.
以下に本発明を実施例によって説明する。The present invention will be explained below by way of examples.
実施例１
石英基板上にＲＦマグネトロンスパッタリング法により
基板温度約２００℃で
Ｎ１ｇ−５２ｎｏ、５Ｆｅｔ−ｓＡｌａ−６０４の（１
１１）配向膜からなる０、１μｍ厚の下地層を形成した
後、その上にＤＣＣ対向ターゲラ式スパッタリング法に
より基板温度４００℃で５ｒＣｏ、、 ａ ｓ Ｔｌ（
１＊ ５ Ｆｅ、 □、０１ ｇのＣ軸配向膜からなる
０、３μｍ厚の記録層を形成し、さらにその上にＤＣマ
グネトロンスパッタにより、０．１μｍのパーマロイ膜
を形成し、光磁気ディスクを作製した。Example 1 N1g-52no, 5Fet-sAla-604 (1
11) After forming a base layer with a thickness of 0.1 μm consisting of an alignment film, 5rCo, a s Tl (
A 0.3 μm thick recording layer consisting of a C-axis oriented film of 1*5 Fe, □, 01 g was formed, and a 0.1 μm permalloy film was further formed on it by DC magnetron sputtering to form a magneto-optical disk. Created.
得られた光磁気ディスクは記録層が良好なＣ軸配向性を
示し、光磁気記録した場合、記録層にかかる反磁界が減
少し、再生Ｓ／Ｎが向上した。In the obtained magneto-optical disk, the recording layer exhibited good C-axis orientation, and when magneto-optically recorded, the demagnetizing field applied to the recording layer was reduced and the reproduction S/N was improved.
実施例２
表面アルマイト処理したＡｌ基板上にＲＦマグネトロン
スパッタリン法により基板温度２００℃でＮｌａ 、ｓ
Ｚｎ、 ＊５Ｆｅ−１、、Ａｌ ｏ 、５０４の（１１
１）配向膜からなる０、５μｍ厚の下地層を形成した後
、その上にＤＣ対向ターゲットスパッタリング法により
基板温度４００℃で５ｒＣｏｏ、、Ｔｘｏ、、Ｆｅ□、
、６０□、のＣ＠配向膜からなる１μｍ厚の記録層を形
成し、さらにその上にＣからなる潤滑層を設け、垂直磁
気記録媒体を作製した。Example 2 Nla, s was deposited on an Al substrate with surface alumite treatment at a substrate temperature of 200°C by RF magnetron sputtering method.
Zn, *5Fe-1,, Al o , 504 (11
1) After forming a 0.5 μm thick underlayer consisting of an alignment film, 5rCoo, Txo, Fe□,
A perpendicular magnetic recording medium was fabricated by forming a recording layer with a thickness of 1 μm consisting of a C@oriented film of , 60□, and further providing a lubricating layer consisting of C on top of the recording layer.
得られた垂直磁気記録媒体は記録層が良好なＣ軸配向性
を示し、下地層と記録層との二層構造の相互作用により
磁気ヘッドが発生させる磁束が集中し、記録感度及び再
生感度とも向上するものであった。In the obtained perpendicular magnetic recording medium, the recording layer exhibits good C-axis orientation, the magnetic flux generated by the magnetic head is concentrated due to the interaction of the two-layer structure between the underlayer and the recording layer, and both recording sensitivity and reproduction sensitivity are improved. It was an improvement.
以上のような本発明によれば、記録層としてのマグネト
プランバイト型フェライトの下地層としてＡｌを含むス
ピネルフェライトの（１１１）配向膜を設けているため
、この下地層と記録層とのミスフィツトが小さくなり、
記録層の良好なＣ軸配向性だ得られる。According to the present invention as described above, since the (111) oriented film of spinel ferrite containing Al is provided as the underlayer of magnetoplumbite ferrite as the recording layer, misfit between the underlayer and the recording layer is reduced. becomes smaller,
Good C-axis orientation of the recording layer can be obtained.
さらにこの磁気記録媒体を光磁気記録媒体として使用す
ると記録層にかかる反磁界が小さくなり、その結果、記
録の安定性が向上し、しかもＳ／Ｎが大きくなる。Furthermore, when this magnetic recording medium is used as a magneto-optical recording medium, the demagnetizing field applied to the recording layer is reduced, resulting in improved recording stability and an increased S/N ratio.
また、本発明の磁気記録媒体を垂直磁気記録媒体として
使用すると、記録時の磁気ヘッドが発生させる磁束が集
中し、ヘッドの消費電力を低減させることができ、記録
、再生感度の向上と、記録密度の向上が期待できる。Furthermore, when the magnetic recording medium of the present invention is used as a perpendicular magnetic recording medium, the magnetic flux generated by the magnetic head during recording is concentrated, reducing the power consumption of the head, improving recording and reproducing sensitivity, and improving recording and reproducing sensitivity. An improvement in density can be expected.
第１図は本発明磁気記録媒体の基本構成図、第２〜５図
はそれぞれ、第１図の記録媒体の変形図である。FIG. 1 is a basic configuration diagram of the magnetic recording medium of the present invention, and FIGS. 2 to 5 are modified diagrams of the recording medium shown in FIG. 1, respectively.
Claims (1)
トＣ軸配向膜からなる記録層とを設けた磁気記録媒体に
おいて、下地層がＡｌを含むスピネルフェライトの（１
１１）配向膜からなることを特徴とする磁気記録媒体。1. In a magnetic recording medium in which an underlayer and a recording layer consisting of a magnetoplumbite-type ferrite C-axis alignment film are provided on a substrate, the underlayer is made of spinel ferrite containing Al (1).
11) A magnetic recording medium comprising an alignment film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30504788A JPH02152009A (en) | 1988-12-01 | 1988-12-01 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30504788A JPH02152009A (en) | 1988-12-01 | 1988-12-01 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02152009A true JPH02152009A (en) | 1990-06-12 |
Family
ID=17940473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30504788A Pending JPH02152009A (en) | 1988-12-01 | 1988-12-01 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02152009A (en) |
-
1988
- 1988-12-01 JP JP30504788A patent/JPH02152009A/en active Pending
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