JPH02146829U - - Google Patents
Info
- Publication number
- JPH02146829U JPH02146829U JP5497489U JP5497489U JPH02146829U JP H02146829 U JPH02146829 U JP H02146829U JP 5497489 U JP5497489 U JP 5497489U JP 5497489 U JP5497489 U JP 5497489U JP H02146829 U JPH02146829 U JP H02146829U
- Authority
- JP
- Japan
- Prior art keywords
- processed
- spin head
- resist coating
- coating apparatus
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000004381 surface treatment Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5497489U JPH02146829U (de) | 1989-05-12 | 1989-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5497489U JPH02146829U (de) | 1989-05-12 | 1989-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146829U true JPH02146829U (de) | 1990-12-13 |
Family
ID=31577517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5497489U Pending JPH02146829U (de) | 1989-05-12 | 1989-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146829U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8932672B2 (en) | 2006-02-02 | 2015-01-13 | Screen Semiconductor Solutions Co., Ltd. | Substrate processing apparatus |
| CN108987311A (zh) * | 2017-05-31 | 2018-12-11 | 株式会社斯库林集团 | 基板处理装置和基板处理方法 |
-
1989
- 1989-05-12 JP JP5497489U patent/JPH02146829U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8932672B2 (en) | 2006-02-02 | 2015-01-13 | Screen Semiconductor Solutions Co., Ltd. | Substrate processing apparatus |
| US9477162B2 (en) | 2006-02-02 | 2016-10-25 | Screen Semiconductor Solutions Co., Ltd. | Substrate processing method |
| CN108987311A (zh) * | 2017-05-31 | 2018-12-11 | 株式会社斯库林集团 | 基板处理装置和基板处理方法 |
| JP2018206877A (ja) * | 2017-05-31 | 2018-12-27 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置および基板処理方法 |
| CN108987311B (zh) * | 2017-05-31 | 2022-03-04 | 株式会社斯库林集团 | 基板处理装置和基板处理方法 |