JPS62101230U - - Google Patents
Info
- Publication number
- JPS62101230U JPS62101230U JP19323785U JP19323785U JPS62101230U JP S62101230 U JPS62101230 U JP S62101230U JP 19323785 U JP19323785 U JP 19323785U JP 19323785 U JP19323785 U JP 19323785U JP S62101230 U JPS62101230 U JP S62101230U
- Authority
- JP
- Japan
- Prior art keywords
- fixed position
- inner cup
- chuck
- semiconductor wafer
- cup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19323785U JPS62101230U (de) | 1985-12-16 | 1985-12-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19323785U JPS62101230U (de) | 1985-12-16 | 1985-12-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62101230U true JPS62101230U (de) | 1987-06-27 |
Family
ID=31149073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19323785U Pending JPS62101230U (de) | 1985-12-16 | 1985-12-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62101230U (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013093361A (ja) * | 2011-10-24 | 2013-05-16 | Tokyo Electron Ltd | 液処理装置および液処理方法 |
JP2018133429A (ja) * | 2017-02-15 | 2018-08-23 | 東京エレクトロン株式会社 | 基板処理装置 |
-
1985
- 1985-12-16 JP JP19323785U patent/JPS62101230U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013093361A (ja) * | 2011-10-24 | 2013-05-16 | Tokyo Electron Ltd | 液処理装置および液処理方法 |
JP2018133429A (ja) * | 2017-02-15 | 2018-08-23 | 東京エレクトロン株式会社 | 基板処理装置 |