JPS61186230U - - Google Patents
Info
- Publication number
- JPS61186230U JPS61186230U JP7168785U JP7168785U JPS61186230U JP S61186230 U JPS61186230 U JP S61186230U JP 7168785 U JP7168785 U JP 7168785U JP 7168785 U JP7168785 U JP 7168785U JP S61186230 U JPS61186230 U JP S61186230U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer
- thicker
- periphery
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7168785U JPS61186230U (de) | 1985-05-13 | 1985-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7168785U JPS61186230U (de) | 1985-05-13 | 1985-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61186230U true JPS61186230U (de) | 1986-11-20 |
Family
ID=30609406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7168785U Pending JPS61186230U (de) | 1985-05-13 | 1985-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61186230U (de) |
-
1985
- 1985-05-13 JP JP7168785U patent/JPS61186230U/ja active Pending